• Journal of the Korean Society of Manufacturing Process Engineers
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• v.19 no.10
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• pp.8-15
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• 2020

The diffusion cell method is the main technique employed for the in vitro diffusion test of transdermal drug delivery preparations. Most existing transdermal diffusion devices use a water bath heating structure and direct current motor magnetic stirrer. However, these devices are confronted with problems, such as large volume, incompatible vertical and horizontal diffusion cells, few diffusion cell sets, and poor reliability. To overcome these deficiencies, the system adopts a dry heating method and uses a rotating magnetic field generated by the electromagnetic stirrer to drive the magnetic stirrer. Accordingly, the resulting device is characterized by a simple structure and small volume, convenient operation, compatible vertical and horizontal diffusion cells, and numerous diffusion cell sets. The reliability and practicability of the system is verified by the in vitro percutaneous permeability test of the bisoprolol patch.

• Journal of the Microelectronics and Packaging Society
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• v.28 no.4
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• pp.109-114
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• 2021

We investigated the effects of atmospheric hydrogen plasma treatment on Cu-Cu direct bonding. Hydrogen plasma was effective in reducing the surface oxide layer of Cu thin film, which was confirmed by GIXRD analysis. It was observed that larger plasma input power and longer treatment time were effective in terms of reduction and surface roughness. The interfacial adhesion energy was measured by DCB test and it was observed to decrease as the bonding temperature decreased, resulting in bonding failure at bonding temperature of 200℃. In case of wet treatment, strong Cu-Cu bonding was observed above bonding temperature of 250℃.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.17 no.5
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• pp.269-274
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• 2016

This paper proposes the development of a low frequency electronic hammer drive system that is used to prevent scaling or clogging in the hopper process. The electro-mechanical hammering driving method involves the generation of vibration and impact energy. The operation principles of the electromagnetic hammer were considered by parallel/series spring coefficient analysis and the amount of kinetic energy generated was calculated from the product of the equivalent spring constant, which is coupled with the E core and the gap of between the E core and I core. In addition, the Pulsation Driving algorithm was applied to the proposed electromagnetic hammer to obtain the maximizing kinetic energy. This algorithm was then implemented by a logical AND operation process and micro-controller (atmega128) built in functions with a timer interrupt and PWM generation function. The driving circuit of the electromagnetic hammer was designed using the H-bridge type IGBT circuit. The experimental test was performed by usefulness of the developed electromagnetic hammer systems with the acceleration measurement method. The experimental result showed that the proposed system has good kinetic energy generation performance and can be applied to the hopper process.

• The Transactions of the Korean Institute of Power Electronics
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• v.9 no.1
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• pp.88-95
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• 2004

Micro stepping method is adopted in order to eliminate effectively the resonant phenomena and to increase the positional resolution. Exist micro-step method by using Sinusoidal waveform, drive circuit is complex by using micro controller and ROM, it have fault on cost Increase. This paper proposed trapezoidal current wave form for simple control circuit and micro stepping method by using a low cost controller. This paper proposed method verify by using CPLD(EPM9320RC208-15) of low cost. This paper make experiment that comparison of exist method and proposed method. This paper obstruct a escape of motor by using high speed detect.

• 한국전산유체공학회:학술대회논문집
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• 2008.03b
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• pp.671-674
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• 2008

We investigate the slippage effect in a micro-channel depending on the surface characteristics; hydrophilic, hydrophobic, and super-hydrophobic wettabilities. The micro-scale grooves are fabricated on the vertical wall to make the super-hydrophobic surfaces, which enable us visualize the flow fields near walls and directly measure the slip length. Velocity profiles are measured using micro-particle image velocimetry (Micro-PIV) and compared those in the hydrophilic glass, hydrophobic PDMS, and super-hydrophobic PDMS micro-channels. To directly measure the velocity in the super-hydrophobic micro-channel, the transverse groove structures are fabricated on the vertical wall in the micro-channel. The velocity profile near the wall shows larger slip length and, if the groove structure is high and wide, the liquid meniscus forms curves into the valley so that the wavy flow is created after the grooves.

• Proceedings of the KIPE Conference
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• 2011.07a
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• pp.50-51
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• 2011

본 논문에서는 영구자석 동기발전기(PMSG)의 전압 및 역률 보상을 위한 기계식 접점을 가지는 조상기의 문제점을 개선하기 위해 전자회로 방식을 채택하여 제어회로에 마이크로프로세서를 사용, 회로를 최소화하고 접점 부분은 전자적인 스위칭소자(MOSFET)를 사용함으로써 조상기의 신뢰성과 특성을 개선할 수 있는 시스템을 제안하고 시뮬레이션을 통해 그 타당성을 검증한다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.68-68
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• 2009

최근 디스플레이 산업의 발달로 LCD 판넬의 수요가 급증함에 따라 검사장치 분야도 동반 성장하고 있다. LCD 검사를 위한 probe unit은 미세전기기계시스템 (MEMS) 공정을 이용하여 제작된다. 본 연구에서는 probe card의 미세 슬릿을 제작하기 위한 Si 깊은 식각 공정을 수행하였다. 공정에 사용된 장비는 STS 사의 D-RIE 시스템으로 식각가스로 $SF_6$, passivation용으로 $C_4F_8$ 가스를 각각 사용하였다. 식각용 마스크는 $30{\sim}50{\mu}m$의 선폭을 probe card의 패턴에 따라 제작되었으며, 분석은 SEM 측정을 이용하였다. 식각 공정 중 발생하는 scallop은 시료를 oxidation 시켜 $SiO_2$ 층을 형성한 후에 식각용액에 에칭하여 제거하였다. 제거전 scallop의 크기는 약 120 nm에서 제거후 약 $50{\mu}m$로 크게 개선됨을 SEM 사진으로 확인하였다.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.12 s.177
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• pp.170-174
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• 2005

A numerical system to extract effective elastic properties of polycrystalline thin-films for MEMS devices is developed. In this system, the statistical model based on lattice system is used for modeling the microstructure evolution simulation and the key kinetics parameters of given micrograph, grain distributions and deposition process can be extracted by inverse method proposed in the system. In this work, effects of kinetics parameters on the extraction of effective elastic properties of polycrystalline thin-films are studied by using statistical method. Effects of the fraction of the potential site($f_p$) among the parameters for deposition process of microstructure on the extraction of effective elastic properties of polycrystalline thin-films are investigated. For this research, polysilicon is applied to this system as the polycrystalline thin-films.

• Journal of the Microelectronics and Packaging Society
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• v.29 no.2
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• pp.113-119
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• 2022

In order to improve the mechanical reliability of next-generation electronic devices including flexible, wearable devices, a high level of mechanical reliability is required at various flexible joints. Organic adhesive materials such as epoxy for bonding existing polymer substrates inevitably have an increase in the thickness of the joint and involve problems of thermodynamic damage due to repeated deformation and high temperature hardening. Therefore, it is required to develop a low-temperature bonding process to minimize the thickness of the joint and prevent thermal damage for flexible bonding. This study developed flexible laser transmission welding (f-LTW) that allows bonding of flexible substrates with flexibility, robustness, and low thermal damage. Carbon nanotube (CNT) is thin-film coated on a flexible substrate to reduce the thickness of the joint, and a local melt bonding process on the surface of a polymer substrate by heating a CNT dispersion beam laser has been developed. The laser process conditions were constructed to minimize the thermal damage of the substrate and the mechanism of forming a CNT junction with the polymer substrate. In addition, lap shear adhesion test, peel test, and repeated bending experiment were conducted to evaluate the strength and flexibility of the flexible bonding joint.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.15 no.2 s.95
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• pp.199-205
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• 2005

The governing equations of micro double cantilever beam structures interacted by electrostatic forces are obtained employing Galerkin's method based on Euler beam theory. Variations of static and dynamic responses as well as natural frequencies are estimated for applied voltages. In particular, it is investigated how the variations of beam properties resulted by manufacturing process influence the deflections and the modal characteristics. This study can help to design MEMS structures and to predict the performances with respect to manufacturing tolerances.