Transactions of the Korean Society for Noise and Vibration Engineering (한국소음진동공학회논문집)

The Korean Society for Noise and Vibration Engineering (한국소음진동공학회)
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Responses and Modal Analyses of Micro Double Cantilever Beams Interacted by Elctrostatic Forces

정전기력을 받는 마이크로 이중 외팔 보의 응답 및 모드 해석

  • 정강식 (한양대학교 대학원 기계설계학과) ;
  • 문승재 (한양대학교 기계공학부) ;
  • 유홍희 (한양대학교 기계공학부)
  • Published : 2005.02.01
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Abstract

The governing equations of micro double cantilever beam structures interacted by electrostatic forces are obtained employing Galerkin's method based on Euler beam theory. Variations of static and dynamic responses as well as natural frequencies are estimated for applied voltages. In particular, it is investigated how the variations of beam properties resulted by manufacturing process influence the deflections and the modal characteristics. This study can help to design MEMS structures and to predict the performances with respect to manufacturing tolerances.

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References

  1. Kovacs. Gregory T. A., 1998. Micromachined Transducers Sourcebook. McGraw-Hill. pp. 278-281
  2. Hirai. Yoshihiko, Marushima. Yoshinari, Soda, Shinnosuke, Jin, Donghao, Kawata, Hiroaki, Inoue. Kouji, Tanaka, Yoshio, 2000, 'Electrostatic Actuator with Novel Shaped Cantilever,' 2000 International Symposium on Micromechatronics and Human Science. pp. 223-227
  3. Wei. Leow Cheah, Mohammad, Abu Baker, Kassim, Norazan Mohd., 2002. 'Analytical Modeling for Determination of Pull-in Voltage for An Electrostatic Actuated MEMS Cantilever Beam,' lCSE Proc., pp. 233-238
  4. Dequesnes, Marc, Rotkin, S. V., Aluru, N. R., 2002, 'Calculation of Pull-in Voltages for Carbonnanotube- based N anoelectromechanical Switches,' lOP publishing, pp. 120- 131
  5. Wang, P. K. C., 1998, 'Feedback Control of Vibration in a Micromachined Cantilever Beam with Electrostatic Actuators:' J. of Sound and Vibration, pp. 537-550
  6. Yoo, H. H., Moon, S. J., Jung, K. S., 2004, 'Dynamic Analysis of Micro Cantilever Beams Undertaking Electrostatic Forces:' Transactions of the Korean Society for Noise and Vibration Engineering, Vol. 14. No. 9, pp. 846-851 https://doi.org/10.5050/KSNVN.2004.14.9.846

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