• Journal of the Korea Institute of Information and Communication Engineering
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• v.14 no.4
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• pp.923-928
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• 2010

Anodic aluminum oxide (AAO) nanotemplates for nano electronic device applications have been attracting increasing interest because of ease of fabrication, low cost process, and possible fabrication in large area. The size and density of the nanostructured materials can be controlled by changing the pore diameter and the pole density of AAO nanotemplate. In this paper, nano porous alumina films AAO nanotemplate was fabricated by second anodization method using sputterd Al films. In addition, effects of electrolyte temperature and anodization voltate on the microstructure of porous alumina films were investigated. As the electrolyte temperature was increased from $8^{\circ}C$ to $20^{\circ}C$, the growth rate of nanoporous alumina films was increased from 86.2 nm/min to 179.5 nm/min. The AAO nanotemplate fabricated with optimal condition had the mean pore diameter of 70 nm and the pore depth of $1\;{\mu}m$.

• Journal of Adhesion and Interface
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• v.16 no.1
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• pp.6-14
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• 2015

In this study, physically and chemically stable core-crosslinked amphiphilic polymer (CCAP) nanoparticles were prepared using amphiphilic reactive precursors via soap-free emulsion process. Obtained CCAP nanoparticles were used as templates for synthesis of nanostructured $TiO_2$ nanoparticles. First, CCAP nanoparticles dispersed aqueous solutions were mixed with titanium isopropoxide to prepare stable organic-inorganic hybrid sols, and then obtained sols were spin coated onto glass substrate to prepare hybrid thin films onto glass, and then hybrid thin films were calcinated at various temperature to remove CCAP. Nanostructure of calcinated thin fims were examined by SEM. To study effect of CCAP nanoparticles on nanostructure of $TiO_2$ nanoparticles, the morphology of $TiO_2$ nanoparticles prepared using various CCAP templates was compared with that of $TiO_2$ nanoparticles prepared using conventional organic template, nonionic surfactant, Triton X-100.

• Applied Chemistry for Engineering
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• v.16 no.4
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• pp.461-473
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• 2005

Nanotechnology has attracted great attention as one of essential fields in modern science. In particular, the fabrication of nanostructures with nanometer dimension in size is the starting point and essential part of nanotechnology research. Anodic aluminum oxide (AAO) nanotemplate technique has many merits including ease of fabrication, low cost process, and nanotemplate fabrication in large area. Moreover, AAO nanotemplate technique can realize self-ordered hexagonal pore structure with extremely high aspect ratio which is difficult to achieve with conventional lithographic techniques. Simple control of pore dimensions such as diameter, length, and density by varying anodizing condition would be advantageous, too. AAO nanotemplate has been the topic of intensive investigations for the past decade due to above strong points, and the application to various fields of nanotechnology is expected. In this review paper, the fabrication and application of AAO nanotemplate are introduced.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.11a
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• pp.123-123
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• 2003

나노튜브는 반도체 재료로서 뿐만 아니라 다른 분야로까지 다양한 응용범위를 가진 물질로서 기존에는 주의 탄소를 사용하여 제작, 사용되어지고 있으나 게이트옥사이드(Gate Oxide) 물질인 지르코니아(ZrO$_2$), 타이타니아(TiO2$_2$) 등을 이용한 나노튜브는 많이 제작되어지고 있지 못하다. 따라서 보다 나은 성질을 갖는 물질로서 나노튜브를 제작할 시 반도체 재료에서의 고집적화를 통해 좋은 성질을 갖게 할 수 있으며 여러 분야로까지 확대가 가능한 재료를 사용하여 광학 및 환경분야 등 응용범위를 넓힐 수 있다. 본 실험은 나노튜브 제작에 있어서 템플레이트의 구멍 내부를 ALD 기술을 이용하여 균일한 두께를 갖는 금속 산화물층을 성장시킨 후 템플레이트 재료의 식각을 통해 금속산화물 나노튜브가 남아있게 하여 제작하는 방법이다.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2013.05a
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• pp.63-63
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• 2013

다양한 분야에서의 차세대 응용이 기대되고 있는 단일벽 탄소나노튜브(Single-walled carbon nanotubes, SWNTs)의 직경을 합성단계에서 제어할 수 있다면, SWNTs의 전도성을 제어하는 것이 훨씬 수월하게 되어 차세대 나노전자소자의 실현을 크게 앞당길 수 있게 된다. SWNTs의 직경제어를 위한 기초연구로서, 본 연구에서는 나노사이즈 직경의 정렬된 기공을 갖는 제올라이트를 합성 템플레이트로 이용하여 SWNTs를 합성하고, 합성조건 및 제올라이트의 종류에 따른 SWNTs의 직경 변화를 규명하고자 하였다.

• Journal of the Korean Vacuum Society
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• v.15 no.4
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• pp.427-433
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• 2006

We have fabricated nanodot arrays by using phase separated (PS- b- PMMA) diblock copolymer film and anodic aluminum oxide (AAO) membrane as templates with hexagonal arrays of cylindrical microdomains perpendicular to the substrate. Pulsed laser deposition technique was used to deposit various kinds of materials including Ag, Ni, ZnO, Si:Er, and Co/Pt onto Si substrates. The size and separation of nanodots correspond to those of the templates used, The density of nanodots was estimated to be $6{\times}10^{11}/cm^2$ and $1{\times}10^{10}/cm^2$ when the diblock copolymer and AAO were used, respectively. In particular, the optical properties of ZnO and Si: Er nanodot arrays were investigated and the strong photoluminescence at 380 nm and $1.54{\mu}m$ was observed from ZnO and Si:Er nanodot arrays, respectively.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2006.05a
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• pp.188-190
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• 2006

본 연구에서는 Anodic Aluminum Oxide(AAO) 템플레이트를 이용하여 전기도금법으로 일정한 길이와 고밀도 대면적의 Nickel nanorod를 제작하였다. 전기도금법으로 AAO-템플레이트내를 채우는 방법으로 제작되었다. 그 결과 직경 $80{\sim}100$ nm, 길이 $0.5{\mu}m$ 가량의 균일한 nanorod를 직경 40mm, 두께 $0.8{\mu}m$의 대면적 원형 AAO-템플레이트에 가득 채우는데 성공 하였으며 AAO 템플레이트는 제거되어 기판 위에 free-standing 되는 구조로 제작 되었다

• Journal of the Korean Electrochemical Society
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• v.7 no.2
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• pp.100-107
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• 2004

The nano or micro sized structures of conducting polymer had been prepared by synthesizing the desired polymer within the pores of template of nano or micro porous membrane filter. In this study, we had tried to fabricate conducting polymer microstructures on an electrode by using electrochemical deposition adopting template synthesis. Our attention was focused on two different things, attaching template on the electrode and fabricating microstructures only at limited areas of the electrode. A conducting polymer, PEDiTT (poly 3,4-ethylenedithi-athiophene) solution was blended with PVA(polyvinyl alcohol) solution and used as an conducting adhesive. After attaching template membrane, the electrode were immersed in 0.5M pyrrole in 0.1M KCI solution, and electrochemical polymerization was performed. The growth process of the microstructures studied by SEM. The electrochemical fabrication of conducting polymer was performed by using two-electrode system. A large working electrode and a micro scale disc electrode were used for the confined area synthesis. Polymerization potential was 4V in an electrolytic solution made of KCI in deionized water. The optimum polymerization conditions were, i.e. (4V/100sec) for $250{\mu}m$ electrode and (6V/30 sec) for $10{\mu}m$ electrode.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.146-147
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• 2006

본 논문에서 탄소나노튜브의 성장 제어를 위해 양극산화 알루미늄 템플레이트를 사용하였다. Si 기판위에 TiN과 Ni 층을 순서대로 증착하였으며 알루미늄을 그 위에 증착하였다. 또한 양극산화 과정은 수산법을 이용하였고 탄소나노튜브의 성장은 마이크로웨이브 플라즈마 화학기상증착법을 이용하여 성장하였다. 양극산화 알루미늄 층 과 탄소나노튜브의 관찰을 위해서 FE-SEM 을 사용하였으며 성장된 탄소나노튜브의 직경은 40 nm 이고 길이는 약 $1\;{\mu}m$ 내외로 확인되었다.

• Applied Chemistry for Engineering
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• v.20 no.6
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• pp.586-592
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• 2009

The preparation of structures with nanosized arrays allows mimicking many different morphologies that exist in nature. In addition, polymer is considered as a material that can be easily applicable to the fabrication of nanostructures and can effectively exhibit nanosize effects since material, synthesis and processing cost is low, and many of polymer structures are well studied. Porous alumina template prepared by anodization of aluminum among nanofabrication methods is the one of promising routes that cost-effectively provides very regularly arrayed nanostructures. In this review, we describe the fabrication of the nanotemplate and template-based polymer nanostructures and their applications.