• Title/Summary/Keyword: 나노정밀도

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Development of High-Accuracy Image Centroiding Algorithm for CMOS-based Digital Sun Sensor (CMOS 기반의 디지털 태양센서를 위한 고정밀 이미지 중심 알고리즘의 개발)

  • Lee, Byung-Hoon;Chang, Young-Keun
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.35 no.11
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    • pp.1043-1051
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    • 2007
  • The digital sun sensor calculates the incident sunlight angle using the sunlight image registered on a CMOS image sensor. In order to accomplish this, an exact center of the sunlight image has to be determined. Therefore, an accurate estimate of the centroid is the most important factor in digital sun sensor development. The most general method for determining the centroid is the thresholding method, and this method is also the simplest and easy to implement. Another centering algorithm often used is the image filtering method that utilizes image processing. The sun sensor accuracy using these methods, however, is quite susceptible to noise in the detected sunlight intensity. This is especially true in the thresholding method where the accuracy changes according to the threshold level. In this paper, a template method that uses the sunlight image model to determine the centroid of the sunlight image is suggested, and the performance has been compared and analyzed. The template method suggested, unlike the thresholding and image filtering method, has comparatively higher accuracy. In addition, it has the advantage of having consistent level of accuracy regardless of the noise level, which results in a higher reliability.

A Study of the Salt Rejection from the Surface of Marine Waste using Ultra Fine Bubble (초미세기포를 이용한 해양쓰레기 표면 내 염분제거에 관한 연구)

  • Kim, Bo-Min;Kim, Kwang-Koo;Park, Chan-Gyu
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.22 no.6
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    • pp.11-18
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    • 2021
  • Nano bubble water is used in various washing processes, including cleaning of solar panels, salt rejection of roads, and cleaning precision parts of machines. High cleaning efficiency and water conservation are obtained by applying nano bubbles during pretreatment of the marine waste cleaning system. This study compared the salt rejection of nano bubble water, and it was revealed that marine waste was produced by wood immersed in 200,000 mg/L NaCl solution. Using tap water and nano bubble water for washing, comparisons of the surface salt concentrations of wood were determined according to the nozzle, orifice diameter, pump speed and washing time. Decreased surface salt concentration was observed on the wood surface with increasing washing time. Water consumption was optimal between 5- and 10-seconds washing time. Increasing orifice diameter of the nozzle reduced the spraying pressure, with consequent increase in the wood surface salt concentration, thereby establishing the importance of orifice diameter of the nozzle. Compared to levels obtained with tap water, salt concentration of the wood surface after washing with nano bubble water was 2.2% lower with sector nozzle, and 30.9% lower with circular nozzle. In the washing experiment using nano bubble water, the salt concentration on the wood surface was about 9.5 mg/L lower when washed with sector nozzle than the circular nozzle.

Room Temperature Imprint Lithography for Surface Patterning of Al Foils and Plates (알루미늄 박 및 플레이트 표면 미세 패터닝을 위한 상온 임프린팅 기술)

  • Tae Wan Park;Seungmin Kim;Eun Bin Kang;Woon Ik Park
    • Journal of the Microelectronics and Packaging Society
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    • v.30 no.2
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    • pp.65-70
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    • 2023
  • Nanoimprint lithography (NIL) has attracted much attention due to its process simplicity, excellent patternability, process scalability, high productivity, and low processing cost for pattern formation. However, the pattern size that can be implemented on metal materials through conventional NIL technologies is generally limited to the micro level. Here, we introduce a novel hard imprint lithography method, extreme-pressure imprint lithography (EPIL), for the direct nano-to-microscale pattern formation on the surfaces of metal substrates with various thicknesses. The EPIL process allows reliable nanoscopic patterning on diverse surfaces, such as polymers, metals, and ceramics, without the use of ultraviolet (UV) light, laser, imprint resist, or electrical pulse. Micro/nano molds fabricated by laser micromachining and conventional photolithography are utilized for the nanopatterning of Al substrates through precise plastic deformation by applying high load or pressure at room temperature. We demonstrate micro/nanoscale pattern formation on the Al substrates with various thicknesses from 20 ㎛ to 100 mm. Moreover, we also show how to obtain controllable pattern structures on the surface of metallic materials via the versatile EPIL technique. We expect that this imprint lithography-based new approach will be applied to other emerging nanofabrication methods for various device applications with complex geometries on the surface of metallic materials.

Effect of Atomic Layer Deposited Al2O3 Thin Films on the Mechanical Properties of Anti-reflective Moth Eye Nanostructured Films (원자층 증착법에 의한 Al2O3 박막 형성에 따른 모스아이 구조 반사방지 필름의 기계적 물성에 미치는 영향)

  • Yun, Eun-Yeong;Lee, U-Jae;Jang, Gyeong-Su;Choe, Hyeon-Jin;Choe, U-Chang;Gwon, Se-Hun
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2015.05a
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    • pp.176-177
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    • 2015
  • 최근 자연계에 존재하는 광학 구조체를 모사하여 우수한 반사 방지 효과를 표면에 구현하고자 하는 연구가 이루어지고 있으며, 특히 우수한 무반사 특성을 가지고 있는 나방의 눈 구조를 모사하여 응용하고자 하는 연구가 활발히 진행되고 있다. 하지만, 주로 폴리머를 기판으로 하여 구현되는 모스아이 구조의 필름은 기계적 성질이 좋지 않아 문제가 되고 있다. 따라서, 본 연구에서는 모스아이 나노구조가 형성된 폴리머 기판에 비해 기계적 물성이 우수한 $Al_2O_3$ 물질을 적용하여, 모스아이 패턴의 기계적 특성을 향상 시키면서도, 모스아이 패턴이 가지는 고유의 우수한 광학적 성질을 유지시키기 위한 실험을 진행하였다. 모스아이 패턴의 광학적 성질을 유지하기 위해서는 나노구조 돌기상에 위치에 따른 두께 차이가 최소화된 균일한 코팅층을 형성하여 그 구조를 유지시킬 필요가 있으므로 이러한 구조물상에 단차피복성(Step Coverage)이 우수하고 sub-nm 단위의 정밀한 두께 조절이 용이한 원자층 증착법(Atomic layer deposition, ALD)을 이용하여 박막을 증착하였다.

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Implementation of Large Area CMOS Image Sensor Module using the Precision Align Inspection (정밀 정렬 검사를 이용한 대면적 CMOS 이미지 센서 모듈 구현)

  • Kim, Byoungwook;Kim, Youngju;Ryu, Cheolwoo;Kim, Jinsoo;Lee, Kyungyong;Kim, Myungsoo;Cho, Gyuseong
    • Journal of Radiation Industry
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    • v.8 no.3
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    • pp.147-153
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    • 2014
  • This paper describes a large area CMOS image sensor module Implementation using the precision align inspection program. This work is needed because wafer cutting system does not always have high precision. The program check more than 8 point of sensor edges and align sensors with moving table. The size of a $2{\times}1$ butted CMOS image sensor module which except for the size of PCB is $170mm{\times}170mm$. And the pixel size is $55{\mu}m{\times}55{\mu}m$ and the number of pixels is $3,072{\times}3,072$. The gap between the two CMOS image sensor module was arranged in less than one pixel size.

Optimal Design of Controller for Ultra-Precision Plane X-Y Stage (초정밀 평면 X-Y 스테이지의 최적제어기 설계)

  • Kwak, L. K.;kim, J. Y.;Yang, D. J.;Ko, M. S.;You, S.;Kim, K. T.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2002.05a
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    • pp.342-347
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    • 2002
  • After the industrial revolution in 20 century, the world are preparing for new revolution that is society with knowledge for a basis such as IT(Information Technology), NT(Nano Technology) and BT(Bio Technology). Recently, NT is applied to various fields that are composed of science, industry, media and semiconductor-micro technology. It has need of IT that is ultra-precision positioning technology with strokes of many hundreds mm and maintenance of nm precision in fields of ultra micro process, ultra precision measurement, photo communication part and photo magnetic memory. Performance test of servo control system that is used ultra-precision positioning system with single plane X-Y stage is performed by simulation with Matlab. Analyzed for previous control algorithm and adapted for modern control theory, dual servo algorithm is developed by minimum order observer, and stability and priority on controller are secured. Through the simulation and experiments on ultra precision positioning, stability and priority on ultra-precision positioning system with single plane X-Y stage and control algorithm are secured by using Matlab with Simulink and ControlDesk made in dSPACE

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Stability Analysis of a Micro Stage for Micro Cutting Machine with Various Hinge Type and Material Transformation (초정밀 가공기용 마이크로 스테이지의 힌지 형상과 재질 변화에 따른 안정성 해석)

  • Kim, Jae-Yeol;Kwak, Yi-Gu;Yoo, Sin
    • Journal of the Korean Society for Precision Engineering
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    • v.20 no.7
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    • pp.233-240
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    • 2003
  • Recently, the world are preparing for new revolution, called as If (Information Technology), NT (Nano-Technology), and BT (Bio-Technology). NT can be applied to various fields such as semiconductor-micro technology. Ultra precision processing is required for NT in the field of mechanical engineering. Recently, together with radical advancement of electronic and photonics industry, necessity of ultra precision processing is on the increase for the manufacture of various kernel parts. Therefore, in this paper, stability of ultra precision cutting unit is investigated, this unit is the kernel unit in ultra precision processing machine. According to alteration of shape and material about hinge, stability investigation is performed. In this paper, hinge shapes of micro stage in UPCU(Ultra Precision Cutting Unit) are designed as two types, where, hinge shapes are composed of round and rectangularity. Elasticity and strength are analyzed about micro stage, according to hinge shapes, by FE analysis. Micro stage in ultra precision processing machine has to keep hinge shape under cutting condition with 3-component force (cutting component, axial component, radial component) and to reduce modification against cutting force. Then we investigated its elasticity and its strength against these conditions. Material of micro stage is generally used to duralumin with small thermal deformation. But, stability of micro stage is investigated, according to elasticity and strength due to various materials, by FE analysis. Where, Used materials are composed of aluminum of low strength and cooper of medium strength and spring steel of high strength. Through this stability investigation, trial and error is reduced in design and manufacture, at the same time, we are accumulated foundation data for unit control.

Ultra high precision Dual stage system Using Air bearing and VCM for Nano level Scanning (VCM을 이용한 나노 정밀도 스캐닝 용 초정밀 이중 스테이지)

  • Kim Ki-Hyun;Gweon Dae-Gab;Choi Young-Man;Kim Dong-Min;Nam Byoung-Uk;Lee Suk-Won;Lee Moon-Gu
    • Journal of the Korean Society for Precision Engineering
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    • v.22 no.5 s.170
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    • pp.103-112
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    • 2005
  • This paper presents one-axis high precision scanning system and illustrates the design of modified $X-Y-{\theta}$ stage as a tracker using VCM and commercialized air bearings for it. The scanning system for 100nm resolution is composed of the 3-axis stage and one axis long stroke linear motor stage as a follower. In this study a previous proposed and presented structure of VCM for the fine stage is modified. The tracker has 3 DOF($X-Y-{\theta}$ motions by four VCM actuators which are located on the same plane. So 4 actuating forces are suggested and designed to create least pitch and roll motions. This article will show about the design especially about optimal design. The design focus of this fine stage is to have high acceleration to accomplish high throughput. The optimal design of maximizing acceleration is performed in restrained size. The most sensitive constraint of this optimal design is heat dissipation of coil. There are 5 design variables. Because the relationship between design variables and system parameters are quite complicated, it is very difficult to set design variables manually. Due to it, computer based optimal design procedure using MATLAB is used. Then, this paper also describes the procedures of selecting design variables for the optimal design and a mathematical formulation of the optimization problem. Based on the solution of the optimization problem, the final design of the stage is also presented. The results can be verified by MAXWELL. The designed stage has the acceleration of about 5 $m/s^{2}$ with 40kg total mass including wafer chuck and interferometer mirror. And the temperature of coil is increased $50^{\circ}C$. In addition, the tracker is controlled by high precision controller system with HP interferometer for it and linear scaler for the follower. At that time, the scanning system has high precision resolution about 5nm and scanning resolution about 40nm in 25mm/s constant speed

Research on Precision Processing Production System based on Manufacturing Execution System (제조 실행 시스템 기반 정밀 가공 생산 시스템 연구)

  • Seong-Uk Shin;Hyun-Mu Lee;Seung-Ho Park
    • Journal of Digital Policy
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    • v.2 no.4
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    • pp.17-23
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    • 2023
  • In this paper, in order to improve production processing for small and medium-sized precision processing companies, we apply a manufacturing execution system to existing process methods and integrate precision processing data to strengthen process management within the company, increase facility operation efficiency, and realize a reduction in defect rates. The differences in productivity improvement and cost reduction rates were compared and analyzed. As a result, production productivity improved by 7.0% and product defect rate improved by 0.1% point due to the introduction of the manufacturing execution system. It was confirmed that manufacturing cost reduction improved by 10.0% and delivery compliance rate improved by 1.1%. If additional smart factory technology is applied based on the manufacturing execution system proposed in this study in the future, sales and profits in the processing industry are expected to increase due to an increase in the PQCD index.

Nano-Positioning of High-Power Ultrasonic Linear Motor Stage in High-Vacuum Environment (고진공 환경중 고출력 초음파 모터 이송 스테이지의 나노미터 위치 제어)

  • Kim, Wan-Soo;Lee, Dong-Jin;Lee, Sun-Kyu
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.34 no.11
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    • pp.1613-1622
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    • 2010
  • In this paper, the ultraprecision positioning control of an ultrasonic linear motor in a high-vacuum environment is presented. The bolt-clamped Langivin type transducer (BLT) with the 3rd longitudinal; and 6th lateral vibration modes was developed, which was excited by using the Eigen resonance frequency for two vibration modes in order to generate stable and high power. In practical applications, however, even if a geometrical design has an Eigen frequency, discordance between both mode frequencies can be generated by the contact mechanism and because of manufacturing errors as well as environmental factors. Both mode frequencies were precisely matched by adjusting the impedence. By using this method, the BLT can be driven under any environmental conditions. The nominal characteristic trajectory following(NCTF) control method was adopted to control the positioning of the system in vacuum. The developed linear motor stage show high positioning accuracy with 5 nm.