Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
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Nano-Positioning of High-Power Ultrasonic Linear Motor Stage in High-Vacuum Environment

고진공 환경중 고출력 초음파 모터 이송 스테이지의 나노미터 위치 제어

  • Kim, Wan-Soo (Dept. of Mechatronics, Gwangju Institute of Science and Technology) ;
  • Lee, Dong-Jin (Dept. of Mechatronics, Gwangju Institute of Science and Technology) ;
  • Lee, Sun-Kyu (Dept. of Mechatronics, Gwangju Institute of Science and Technology)
  • 김완수 (광주과학기술원 기전공학과) ;
  • 이동진 (광주과학기술원 기전공학과) ;
  • 이선규 (광주과학기술원 기전공학과)
  • Received : 2010.05.03
  • Accepted : 2010.09.03
  • Published : 2010.11.01
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Abstract

In this paper, the ultraprecision positioning control of an ultrasonic linear motor in a high-vacuum environment is presented. The bolt-clamped Langivin type transducer (BLT) with the 3rd longitudinal; and 6th lateral vibration modes was developed, which was excited by using the Eigen resonance frequency for two vibration modes in order to generate stable and high power. In practical applications, however, even if a geometrical design has an Eigen frequency, discordance between both mode frequencies can be generated by the contact mechanism and because of manufacturing errors as well as environmental factors. Both mode frequencies were precisely matched by adjusting the impedence. By using this method, the BLT can be driven under any environmental conditions. The nominal characteristic trajectory following(NCTF) control method was adopted to control the positioning of the system in vacuum. The developed linear motor stage show high positioning accuracy with 5 nm.

본 연구는 고진공 환경중 초음파 리니어 스테이지의 나노미터 위치제어를 기술하고 있다. 고진공 환경 중 초정밀 위치 제어 시스템에 응용하기 위해 3 차 종진동 모드와 6 차 횡진동 모드를 가지는 BLT를 개발 했다. 안정적인 고출력을 위해 BLT 는 하나의 공진 주파수로 두 개의 모드 진동을 발생 시켜야 한다. 하나의 공진 주파수를 이용 하기 위해 어드미턴스를 변화시켜 각 모드의 공진 주파수를 일치시켜 조건이 다른 대기 환경에서 안정적인 고출력을 얻을 수 있었다. 기압 변화에 따라 구동 특성이 달라지는 시스템을 제어하기 위해 마찰력 변화에 따른 비선형 특성을 보상한 NCTF 제어를 사용했다. 설계된 제어기를 이용해 고진공 환경에서 시스템을 나노미터 정도로 제어하는 결과를 얻을 수 있었다.

Keywords

References

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