• Proceedings of the Materials Research Society of Korea Conference
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• 한국재료학회 2003년도 추계학술발표강연 및 논문개요집
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• pp.69-69
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• 2003

최근 trench capacitor, isolation trench, micro-electromechanical system(MEMS), micro-opto-electromechanical system(MOEMS)등의 다양한 기술에 적용될 고종횡비(HAR) 실리콘 식각기술연구가 진행되어 지고 있다. 이는 기존의 습식식각시 발생하는 결정방향에 따른 식각률의 차이에 관한 문제와 standard reactive ion etching(RIE) 에서의 낮은 종횡비와 식각률에 기인한 문제점들을 개선하기 위해 고밀도 플라즈마를 이용한 건식식각 장비를 사용하여 고종횡비(depth/width), 높은 식각률을 가지는 이방성 트랜치 구조를 얻는 것이다. 초기에는 주로 HBr chemistry를 이용한 연구가 진행되었는데 이는 식각률이 낮고 많은양의 식각부산물이 챔버와 시편에 재증착되는 문제가 발생하였다. 또한 SF6 chemistry의 사용을 통해 식각률의 향상은 가져왔지만 화학적 식각에 기인한 local bowing과 같은 이방성 식각의 문제점들로 인해 최근까지 CHF3, C2F6, C4F8, CF4등의 첨가가스를 이용하여 측벽에 Polymer layer의 식각보호막을 형성시켜 이방성 구조를 얻는 multi_step 공정이 일반화 되었다. 이에 본 연구에서는 SF6 chemistry와 소량의 02/HBr의 첨가가스를 이용한 single_step 공정을 통해 공정의 간소화 및 식각 프로파일을 개선하여 최적의 HAR 실리콘 식각공정 조건을 확보하고자 하였다.

• Proceedings of the Korean Institute of Building Construction Conference
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• 한국건축시공학회 2013년도 춘계 학술논문 발표대회
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• pp.43-45
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• 2013

The purpose of this study is to obtain basic data for making performance criteria about the structural safety of lightweight dry wall later by examining types and characteristics of horizontal load acting on the wall. The subjects applying horizontal load to the wall are human and objects. The types of horizontal load are classified as static load and dynamic load depending on the difference of acting time. The magnitude of horizontal load "0.25kN/㎡" defined by KBC 2009 has no significant meaning since it is the unsubstantial nominal load. The result of examining types and characteristics of horizontal load is as follows. (1) Static load by human needs to have more systematic investigation including differences in wall hardness and human weight. (2) Dynamic load by human needs to raise the significance of study result by increasing the number of subjects. (3) Dynamic load by objects needs to accumulate the load specific data for various load subjects considering real situations.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 한국소음진동공학회 2005년도 추계학술대회논문집
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• pp.950-953
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• 2005

Floor impact sounds from two different floor systems were measured. One of the two floor systems is a dry floor system (with 150mm concrete slab) and the other is a standard floor system (210mm concrete slab). Real impact sources such as jumping and running of children were used as well as standard impact sources (bang machine, impact ball and tapping machine) to evaluate sound Isolation of the two floor systems. Subjective evaluations of the floor impact sound isolation performance for the two systems were also conducted by the methods of 3 scales & 9 categories, paired comparison and semantic differentials. Measurement results indicate that floor impact sound isolation performance of the dry floor was better than that of standard floor in both cases of real and standard impact sources. The subjects in auditory experiments also evaluated the dry floor as a better sound isolation system.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• 제23권1호
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• pp.34-40
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• 2013

The 1st assessment(performance test) was applied to assure the floor impact sound performance for developing the dry double-floor with the change of rubber hardness of the upper panel's support and the ceiling structure of the sub-floor. Depends on the change of the rubber hardness in sub-structure, the heavy-weight sound impact value is improved up to 3 dB, and the light-weight sound impact value is moved up to 21 dB, comparing with the bare-slab. Also, the improved value for the floor impact sound conjugating with the sub-floor's ceiling was 5 dB. Based on this result, the 2nd assessment(performance test) was made the state that the rubber hardness of the sub-floor support was ranged between 50 and 70 for considering the stability of walking patients. In addition to this process, the assessment was carried out with a variety of ceiling structure applied to the dry double-floor structure with the air flow system on the sub-floor's ceiling. The result for the 2nd assessment proved that TYPEII-3 had the better sound reduction performance in the heavy-weight impact sound test than other types, and also for the light-weight impact sound TYPEII-3 had the 29 dB sound reduction performance overall. Henceforth, based on the result the research for the sound reduction performance from the floor impact sound shall be ongoing process as well as the development of a double-dry floor and a sound reduction ceiling to suitable on the field.

• Korean Chemical Engineering Research
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• 제61권4호
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• pp.619-626
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• 2023

Primary and secondary amine-based sorbents were synthesized to investigate the operation capacity for the carbon dioxide separation TSA process. (3-Aminopropyl) triethoxysilane was used as a primary amine precursor as a crosslinking agent to synthesize a secondary amine precursor in which amine groups were crosslinked with a crosslinking agent. Carbon dioxide absorbed by primary amines is completely separated above 170 ℃. The working capacity of the primary amine absorbent was less than 2% when regenerated at 130℃. The secondary amine absorbent has a higher carbon dioxide separation capacity at a lower regeneration temperature than the primary amine absorbent. The secondary amine absorbent could predict process operation performance of about 6.5% with 2% carbon dioxide absorption and 100% carbon dioxide regeneration conditions. Therefore, it was found that the working capacity of the secondary amine absorbent was higher than that of the primary amine.

• Proceedings of the Korean Vacuum Society Conference
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.141.1-141.1
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• 2015

탄소나노튜브는 우수한 전기적 특성과 더불어 열전도도, 강도, 높은 화학적 안정성, 바이오 물질과의 친화성 때문에 많은 응용이 가능하며 최근까지도 활발히 연구되는 대표적인 탄소질의 물질이다. 이러한 다중 벽 탄소나노튜브를 제품화시키기 위해서는 특정 용매에서 용이한 분산성을 지닐 수 있도록 기능화 공정이 필수적이고 많은 양의 파우더를 기능화 시킬 수 있는 장비의 구조 및 공정개선이 요구된다. 플라즈마 기술을 이용한 건식의 순환형 나노분산 파우더 플라즈마 반복처리장치를 통하여 기능화 처리된 탄소나노튜브를 습식공정에 비해 간편한 공정으로 재현성 있고 균일한 결과로 많은 양의 확보가 가능하다. 이에 탄소나노튜브의 기능화 결과를 제시함으로써 본 장비를 소개하고자 한다.

• Proceedings of the Korean Vacuum Society Conference
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.216.2-216.2
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• 2014

플라즈마의 연속 운전 조건은 플라즈마 발생원의 기하적, 전기적 특성에 의한 공정 특성을 갖는다. RF power를 pulsing하는 경우 off시간에 하전 입자와 중성 라디칼의 소멸 특성의 차이로 인하여 나노 미세 구조의 식각에 유리한 측면이 있다. 유도 결합 플라즈마원을 주발생원으로 이용하는 건식 식각장비의 기판 바이어스를 rf pulsing하는 경우 유체 모델을 이용한 계산 방법에서 rf off 시간 중의 2차 전자 발생 계수를 rf on time시와 동일 하게 계산하거나 입사 이온의 에너지와 무관하게 0.05 등의 상수로 처리하는 경우가 많은데 본 연구에서는 rf bias off 시간 동안의 SEC(secondary electron coefficient)를 변화시키는 조건이 플라즈마의 특성에 어떤 영향을 미치는지 CFD-ACE+에 user subroutine을 이용하여 조사하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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• pp.153-156
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• 2005

원자층 증착 (atomic layer deposit : ALD) 방식으로 증착한 $Al_2O_3$의 건식식각 특성을 연구하였다. 전자 싸이클로트론 공진 (electron cyclotron resonance : ECR) 방식의 건식식각장치에서 source power, bias power, 압력 그리고 $Cl_2$ 가스를 변수로 하여 $Al_2O_3$의 식각속도와 Poly-Si 의 $Al_2O_3$에 대한 선택비를 측정하였다. bias power가 감소할수록 그리고 압력이 증가할수록 $Al_2O_3$의 식각속도는 감소하였고 Poly-Si 의 $Al_2O_3$에 대한 선택비는 증가하였다. 이 특성을 이용하여 TiN/$Al_2O_3$/Poly-Si 구조의 캐패시터와 Periphery 회로영역의 레지스터를 $Al_2O_3$를 식각 정지막으로 이용하여 구현하였다.

• Transactions of the Korean Society of Pressure Vessels and Piping
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• 제17권2호
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• pp.65-74
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• 2021

This study aims to assess the effect of postulated seismic loads on the structural integrity of a spent nuclear fuel dry storage facility. Firstly, three-dimensional modal and response spectrum analyses were carried out. With regard to the latter analysis, the effect of incident angles against two horizontal and one vertical response spectra was also considered. Results showed that even though two critical locations were predicted at the longitudinal axis central part of upper flow path as well as the end discontinuity part of upper and lower flow paths connector, their maximum principal stress values were less than the tensile strength. Moreover, since the influence of vertical angle was 87% higher than that of horizontal angle in particular, which should be carefully handled to demonstrate integrity of the facility.

• Proceedings of the Korea Concrete Institute Conference
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• 한국콘크리트학회 2009년도 춘계 학술대회 제21권1호
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• pp.459-460
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• 2009

The purpose of this study is to develop precast concrete structural wall panel that can assure reliable seismic performance. In the previous study, the connection of precast concrete structural wall has some problems in seismic performance. Therefore, this research proposed the precast concrete structural walls which can improve seismic performance. And their seismic performance was verified through lateral loading experiment.