• 전기의세계
• /
• v.41 no.2
• /
• pp.12-21
• /
• 1992

현재 습도측정분야는 측정의 정화도 향상 및 저온, 저습, 고온 등 특수 환경에서 측정을 위한 연구와 응답속도가 빠르고 정확도가 높으며 신뢰성 있는 습도센서 및 측정기기 개발연구가 진행되고 있다. 습도센서의 개발연구는 감습물질, 제조기술, 성능평가 연구를 포함하고 있으며, 물질 연구에서 고분자 감습재료에 대해 연구한 결과에 의하면, 고분자 감습물질에서 -OH기나 C=O기와 같은 친수성기와 탄화수소계열의 소수성기의 적절한 조합을 통하여 감습특성을 개선할 수 있으며 그한가지 방법으로 플라즈마중합이 시도되었다.

• Korean Journal of Materials Research
• /
• v.5 no.6
• /
• pp.715-722
• /
• 1995

Vinylbenzyl triphenyl phosphonium chloride (VTPC) was prepared for the humid membrane. The humidity sensitive memo)lane was composed of copolymers, which have differnet content of VTPC and styrene (VTPC : ST=1 : 0.7 : 3, 5 : 5, 3 : 7). The changes in electrical properties of copolymers with relative humidity were measured. It was found that the impedance decreased with an increase of the content of VTPC in the humid membrane, and the Impedance also decreased with an increase of thickness of humid membrane. The copolymer derived from same equip of VTPC and ST showed 12M$\Omega$-100M$\Omega$ at 70%RH-90%RH, which was required for the current humidity sensor operating at high humidity or dew point. The temperature dependence coefficient at a temperature range 15$^{\circ}C$∼35$^{\circ}C$ was found to be -0.5%RH/$^{\circ}C$ and the hysterisis fabled within the range ${\pm}$2%RH. The response time was found to be 40seconds for varing relative humidity from 75% RH to 95%RH and vice versa.

• Journal of the Korean Institute of Telematics and Electronics T
• /
• v.35T no.2
• /
• pp.1-5
• /
• 1998

$CaSnO_3$ specimens were fabricated by solid reaction method, and their humidity sensitive characteristics have been investigated. Capacitance increases with increasing relative humidity, better humidity sensitivity are shown at lower frequencies. Humidity sensitivity are stable at variable temperatures, and hysteresis phenomenon is shown with adsorption and desorption. Drift phenomenon is exhibited by exposing the specimens in the air, and a decrease of humidity sensitive by contamination is inhibited by heat cleaning.

• Proceedings of the KAIS Fall Conference
• /
• 2000.10a
• /
• pp.245-250
• /
• 2000

고습도 또는 결로시 내수성을 지니는 저항형 습도센서를 제조하기 위하여 vinylbenzyl tributyl phosphonium chloride를 포함하는 4원 공중합체를 합성하여 저습도와 고습도 범위에서 측정이 가능한 습도센서용 감습막을 제작하였다. 1,5-dibrompentane과 4차 염화 가교 반응을 통하여 최종 저항형 습도센서를 제작하였다. 감습막은 알루미나 기판에 한 쌍의 금 paste가 인쇄된 전극을 사용하였으며, 감습막은 다양한 비율의 vinylbenzyl tributyl phosphonium chloride, 2-(dimethlamino)ethyl methacrylate, 2-ethylhexyl acrylate, 그리고 [2-(methacryloyloxy)ethyl]trimethyl ammonium chloride 등을 이용하여 제조하였다. 감습막은 micro-syringe를 이용하여 도포하였으며 건조 oven에서 50℃에서 6시간 동안 가교반응을 진행하였다. 습도센서의 임피던스 특성은 2-(dimethylamino)ethyl methacrylate 또는 [2-(methacryloyloxy)ethyl]trimethyl ammonium chloride의 함량이 증가할수록 감소하였다. vinylbenzyl tributyl phosphonium chloride / 2-(dimethylamino)ethyl methacrylate / 2-ethylhexyl acrylate / [2-(methacryloyloxy)ethyl]trimethyl ammonium chloride의 조성비가 4/4/1/1인 공중합체의 경우 30-90%RH 범위에서 2.64 ㏁ - 3.11 ㏀의 임피던스 특성을 보였으며 우수한 직선성과 낮은 히스테리시스 나타내었다.

• Journal of Sensor Science and Technology
• /
• v.6 no.1
• /
• pp.43-48
• /
• 1997

$Ca_{10}(PO_{4})_{6}(OH)_{2}$ humidity-sensitive devices were fabricated by a solid reaction method, and their humidity-sensitive characteristics were investigated. The impedance decreases with increasing relative humidity, and the good sensitivity is shown in which impedance changes by about $10^{2}\;{\Omega}$ over the region of $30{\sim}90\;%$. Also, It is shown that the humidity sensitivity is stable in temperature variations and long time exposures to the humidity. The sensitivity of the specimens is not affected by a heat treatment, and the hysteresis in one humidity cycle is negligible.

• 전자공학회논문지 IE
• /
• v.43 no.3
• /
• pp.1-5
• /
• 2006

[ $CaZrO_3$ ] humidity sensors were prepared using the solid-state synthetic method and their humidity sensitive characteristics have been investigated. It was found that the impedance of the humidity sensors decreased with increasing relative humidity and the humidity sensitivity depended on the applied frequencies. The sensitivity of sensor is stable with heat treatment and a negligible hysteresis under cyclic humidity changes is shown, and the activation energy for electrical conduction is reduced with water adsorption.

• Industry Promotion Research
• /
• v.9 no.1
• /
• pp.31-38
• /
• 2024

In this study, evaluated the properties of layered silicate-based nanocomposite sensitive film. For the fabrication of nanocomposite materials, we selected organically modified layered silicate materials, specifically Cloisite^® and Bentone^®, which were treated with quaternary ammonium salts. The impedance of the humidity sensors containing organically modified montmorillonite/hectorite clay decreased with increasing relative humidity(RH%). In the case of the Cloisite^® humidity sensor exhibited slightly better impedance linearity and hysteresis compared to the Bentone^® 38 humidity sensor. Additionally the impedance of the sensor with Bentone^® 38 addition was the lowest when compared to the Cloisite^®-modified sensor. Comparing the Cloisite^®-modified sensors individually, we observed different moisture absorption characteristics based on the hydrophilic properties of the organic-treated materials. The response speed of Cloisite^® 93A tended to be slower due to differences in moisture evaporation rates influenced by the hydrophilic organic components. Based on these results, moisture barriers utilizing organically modified layered silicate materials may exhibit slightly lower moisture absorption properties compared to conventional polymer-based moisture barriers. However, their excellent stability, simple processing, and cost-effectiveness make them suitable for humidity sensor applications.

• Proceedings of the KIEE Conference
• /
• 2005.07c
• /
• pp.1898-1899
• /
• 2005

반도체 집적회로 공정에서 사용되는 폴리이미드 포토레지스트(P12723, Dupont)를 감습막으로 사용하는 마이크로 습도센서 소자를 제작하였다. 마이크로 습도센서는 실리콘 웨이퍼 기판 위에 $SiO_2$ 박막을 건식열산화 공정으로 제작하고, Al 박막을 포토리소그라피 공정으로 패터닝 한 IDT (Interdigital Transducer)를 전극 위에 폴리이미드 포토레지스트를 공정변수를 다양하게 조절하면서 감습막으로 제작하였다. 폴리이미드 감습막은 스핀코팅법으로 제작하였으며, 회전수를 조절하여 두께를 변화시켰다. 완성된 마이크로 습도센서 소자의 상대습도 변화$(10{\sim}90% RH)$에 따른 정전용량 값 변화를 항온항습조 내에서 다양한 온도에서 HP4192A Impedance Analyzer를 사용하여 조사함으로써, 폴리이미드 포토레지스트를 사용하는 마이크로 정전용량형 습도센서의 제작 가능성을 검토하였다. 폴리이미드 정전용량형 마이크로 습도센서는 다양한 인가 전원 주파수에서 기준 센서로 사용된 상용 Vaisala Hygrometer와 유사한 감습특성 및 응답특성을 보였다.

• Polymer(Korea)
• /
• v.34 no.6
• /
• pp.565-573
• /
• 2010

Copoly(2-(dimethylamino)ethyl methacrylate)(DAEMA)/butyl acrylate (BA) and copoly(methyl methacrylate)(MMA)/BA/2-(cinnamoyloxy)ethyl methacryate (CEMA), which were cross-linked with dibromoalkane and UV irradiation, respectively, were prepared for the precursors of interpenetrating polymer network (IPN) humidity-sensitive films. 3-(Triethoxysilyl)propyl cinnamate (TESPC) was used as a surface-pretreating agent for the attachment of IPN-polyelectrolyte to the electrode surface by UV irradiation. Humidity sensitive polymeric thin films with an IPN structure were prepared by crosslinking reactions of copoly(DAEMA/BA) with 1,4-dibromobutane (DBB) and copoly(MMA/BA/CEMA) by UV-irradiation. The anchoring of an IPN-polyelectrolyte into the substrate was carried out via the photochemical $[2{\pi}+2{\pi}]$ cycloaddition. The resulting humidity sensors showed a high sensitivity in the range of 20~95%RH and a small hysteresis (<1.5%RH). The response time for adsorption and desorption process at 33~94%RH was 48 and 65 s, respectively, indicating a fast response. The effects of the concentration of copolymers, molar ratio of crosslinking agents and time of the precursor solution for dip-coating on their humidity sensitive properties including water durability were investigated.

• Electrical & Electronic Materials
• /
• v.6 no.3
• /
• pp.248-254
• /
• 1993

Ca(Ti, V)O$_{3}$의 감습특성에 대하여 조사하였다. 시편의 임피던스는 V$_{2}$O$_{5}$의 치환량이 증가함에 따라 감소하며 1mol% V$_{2}$O$_{5}$를 치환한 시편이 가장 우수한 감도를 나타내었다. 전극물질은 감도에 영향을 미치며 Pt가 가장 적합하였다. 히스테리시스 현상은 거의 나타나지 않으며 감도는 분위기 온도 및 열처리에 안정하였다.