Fabrication of polycrystalline 3C-SiC diode for harsh environment micro chemical sensors and their characteristics (극한 환경 마이크로 화학센서용 다결정 3C-SiC 다이오드 제작과 그 특성)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2009.06a
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- pp.195-196
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- 2009