• Title/Summary/Keyword: $TiO_{2}$-$SnO_{2}$

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The composition control of ITO/PET by Plasma Emission Monitors (PEM을 이용한 ITO/PET film 조성 제어)

  • 한세진;김용한;김영환;이택동
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.213-213
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    • 1999
  • 현재 LCD용 기판재료는 ITO/glass를 전극으로 사용하고 있다. 그러나 유리기판은 무겁고 깨지기 쉽기 때문에 사용상 곤란한 점이 많다. 최근 flexible하고 가공성 및 생산성이 우수한 플라스틱한 ITO를 성막하여 EL용, Touch panel, plastic LCD용 사용하려는 시도로, roll-to-roll 연속 스퍼터링에 의한 ITO성막공정에 대한 연구가 최근 활발하게 이루어지고 있다. 폴리머는 유리에 비해 Tg 온도가 낮고, 기판으로부터의 수분 및 여러 종류의 가스방출이 심하기 때문에 유리와는 달리 ITO막의 제조에 있어 큰 차이점이 있다. 따라서, 폴리머에 반응성 스퍼터링을 하기 위해서는 표면처리가 중요한 변수가 되며, roll to roll sputter로 ITO 필름을 얻기 위해서는 폭과 길이 방향으로 균일한 막을 얻는 것이 중요하다. 두께 75$\mu\textrm{m}$, 폭 190mm, 길이 400m로 권취된 광학용 Polyethylene terephthalate(PET:Tg:8$0^{\circ}C$)위에 In-10%Sn의 합금타겟과 Unipolar pulsed DC power supply를 사용하여 반응성 마그네트론 스퍼터링 방법으로 0.2m/min의 속도로 연속 스퍼터링 하였다. PET를 Ar/O2 혼합가스로 플라즈마 전처리를 한 후, AFM, XPS를 이용하여 효과를 분석을 하였고, 성막전에 가스방출을 막기 위해 TiO를 코팅하였다. Pilot 연속 생산공정에서 재현성을 위해 PEM(Plasma Emission Monitor)의 optical emission spectroscopy를 이용, 금속과 산화물의 천이구역에서 sprtter된 I/Sn 이온과 산소 이온의 반응에 의한 최적의 플라즈마의 강도값을 입력하여 플라즈마의 radiation을 검출하고, 스퍼터링 공정중 실질적인 in-situ 정보로 이용하였다. PEM을 통하여 In/Sn의 플라즈마 강도변화를 조사하였다. 초기 In/Sn의 플라즈마 강도(intensity)는 강도를 100하여, 산소를 주입한 결과, plasma intensity가 35 줄어들었고, 이때 우수한 ITO 박막을 얻을 수 있었다. Pulsed DC power를 사용하여 아크 현상을 방지하였다. PET 상에 coating 된 ITO 박막의 표면저항과 광투과도는 4-point prove와 spectrophotometer를 이용하여 분석하였고, AES로 박막의 두께에 따른 성분비를 확인하였다. ITO 박막의 광투과도는 산소의 유량과 sputter 된 In/Sn ion의 plasma emission peak에 따라 72%-92%까지 변화하였으며, 저항은 37$\Omega$/$\square$ 이상을 나타내었다. 박막의 Sn/In atomic ratio는 0.12, O/In의 비율은 In2O3의 화학양론적 비율인 1.5보다 작은 1.3을 나타내었다.

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A Study on the Change of Dye-ability of Cornus officinalis with Mordanting Treatment and Colorfastness (산수유의 염색성과 견뢰도에 관한 연구)

  • Bae, Kye-In;Choi, In-Ryu;Park, Kyeon-Soon
    • Journal of the Korea Fashion and Costume Design Association
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    • v.9 no.3
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    • pp.47-57
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    • 2007
  • This study focused on the properties natural dyeing and natural material and on the development of functional material for well-being in apparel industry. Comus officinalis Siebold et Zuccarini is used as natural dyeing material which had been reported that have curable effect for unbalanced immunity, geriatric diseases like urinary tract system, diabetes, hypertension, arthritis, tinnitus, hyperhidrosis and women's diseases like hypermenorrhea. And this material also has anti-cancer effect so that can restraint cancer cells. 3 kinds tester of cotton, wool and silk are dyed by boiled with each dye (flower, fruits, bark of tree) as first dyeing and dried in the shade. These testers are done by post-mordanting method. Aluminium Potassium(Alk(SO4)2), Cuprie Sulfate($CuSO4{\cdot}5H2O$), Stannous Chloride($SnCl2{\cdot}2H2O$), Ferrous Sulfate($FeCl2{\cdot}4H2O$), Titanium Sulfate 24% aqueous solution(Ti(SO4)2) are used as mordants. Dyeing results of Comus officinalis Siebold et Zuccarini flower and bark are shown as yellow color series. And dyeing result of fruits is pink color series. Silk shows the best dyeing property. As the point of view for dyeing property, Ti, Sn, Fe would be the properchoice for mordant. Following results are extracted in this study. Yellow color is resulted in dyeing with Cornus officinalis flower as non-mordanting condition. Yellowish red color is come from dyeing with Comus officinalis fruit as non-mordanting condition. Grayish yellow tone is resulted in dyeing with bark as non-mordanting condition. Orange tone color with Ti-mordanting, green tone color with Sn-mordanting and gray tone color with Fe-mordanting is resulted respectively. However light-fastness of Comus officinalis(flower, fruit, bark) is very low as 1 or 2 level in non-mordanting condition, Comus officinalis flower dyeing is turned out 3 or 4 level and fruit dyeing is 4 or 5 level, bark dyeing is 2 or 3 level with Ti-mordanting respectively. Eventually Comus officinalis fruit has the best light-colorfastness property among all of dyes. dry cleaning colorfastness of Cornus officinalis(flower, fruit, bark) is good as 4 or 5 level in Ti-mordanting condition, perspiration-colorfastness of Cornus officinalis(flower, fruit, bark) is good as 4 or 5 level in Ti-mordanting condition, With these results, this study could conclude that dye-ability, colorfastness problem is getting better after mordanting process and practical usage would be possible.

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Effect of SO2 on the Simultaneous Removal of Mercury and NOx over CuCl2-loaded V2O5-WO3/TiO2 SCR Catalysts (CuCl2가 담지된 V2O5-WO3/TiO2 SCR 촉매에 의한 수은 및 NOx 동시 제거에서 SO2의 영향)

  • Ham, Sung-Won
    • Clean Technology
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    • v.28 no.1
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    • pp.38-45
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    • 2022
  • CuCl2-loaded V2O5-WO3/TiO2 catalyst showed excellent activity in the catalytic oxidation of elemental mercury to oxidized mercury even under SCR condition in the presence of NH3, which is well known to significantly inhibit the oxidation activity of elemental mercury by HCl. Moreover, it was confirmed that, when SO2 was present in the reaction gas together with HCl, excellent elemental mercury oxidation activity was maintained even though CuCl2 supported on the catalyst surface was converted to CuSO4. This is thought to be because not only HCl but also the SO4 component generated on the catalyst surface promotes the oxidation of elemental mercury. However, in the presence of SO2, the total mercury balance before and after the catalytic reaction was not matched, especially as the concentration of SO2 increased. In order to understand the cause of this, further studies are needed to investigate the effect of SO2 in the SnCl2 aqueous solution employed for mercury species analysis and the effect of sulfate ions generated on elemental mercury oxidation. It was confirmed that SO2 also promotes NOx removal activity, which is thought to be because the increase in acid sites by SO4 generated on the catalyst surface by SO2 facilitates NH3 adsorption. The composition change and structure of the components present on the catalyst surface under various reaction conditions were measured by XRD and XRF. These measurement results were presented as a rational explanation for the results that SO2 enhances the oxidation activity of elemental mercury and the NOx removal activity in this catalyst system.

Dielectric and Pyroelectric Properties of Y-modified PSS-PT-PZ Ceramics

  • Lee, Sung-Gap
    • Transactions on Electrical and Electronic Materials
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    • v.6 no.3
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    • pp.119-123
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    • 2005
  • $0.10Pb(Sb_{1/2}Sn_{1/2})O_3-0.25PbTiO_3-0.65PbZrO_3$ specimens doped with $ MnO_2\;(0.18\;mol\%)$ and $Y_2O_3\;(0\~0.4\;wt\%)$ were fabricated by the mixed-oxide method. All specimens showed the typical XRD patterns of a perovskite polycrystalline structure and the lattice constant decreased with increasing amount of $Y_2O_3$. The relative dielectric constant and the dielectric loss of the specimens doped with $0.2\;wt\%\;Y_2O_3$ were 704 and 0.0201, respectively. The remanent polarization, the coercive field and the pyroelectric coefficient of the specimen doped with $0.2\;wt\%\;Y_2O_3$ were $10.88\times10^{-2}Cm^{-2},\;11.12\times10^2kVm^{-1}$ and $5.03\times10^{-4}Cm^{-2}K^{-1}$ at $25^{\circ}C$, respectively. The figures of merit, $F_V$ for the voltage responsivity and $F_D$ for the specific detectivity, of the specimen doped with $0.2\;wt\%\;Y_2O_3$ were the good values of $3.04\times10^{-2}\;m^2C^{-1}\;and\;1.50\times10^{-5}\;Pa^{-1/2}$, respectively.

The structure of $Ga_2O_3$ nanomaterials synthesized by the GaN single crystal (GaN 단결정에 의해 제조된 $Ga_2O_3$ 나노물질의 구조)

  • 박상언;조채룡;김종필;정세영
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2003.11a
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    • pp.120-120
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    • 2003
  • The metallic oxide nanomaterials including ZnO, Ga$_2$O$_3$, TiO$_2$, and SnO$_2$ have been synthesized by a number of methods including laser ablation, arc discharge, thermal annealing procedure, catalytic growth processes, and vapor transport. We have been interested in preparing the nanomaterials of Ga$_2$O$_3$, which is a wide band gap semiconductor (E$_{g}$ =4.9 eV) and used as insulating oxide layer for all gallium-based semiconductor. Ga$_2$O$_3$ is stable at high temperature and a transparent oxide, which has potential application in optoelectronic devices. The Ga$_2$O$_3$ nanoparticles and nanobelts were produced using GaN single crystals, which were grown by flux method inside SUS$^{TM}$ cell using a Na flux and exhibit plate-like morphologies with 4 ~ 5 mm in size. In these experiments, the conventional electric furnace was used. GaN single crystals were pulverized in form of powder for the growth of Ga$_2$O$_3$ nanomaterials. The structure, morphology and composition of the products were studied mainly by X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), and high-resolution transmission electron microscopy (HRTEM).).

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Pyroelectric Properties of PZT System Ceramics with Addition of $Y_2O_3$ ($Y_2O_3$ 첨가에 따른 PZT계 세라믹의 초전특성)

  • Kang, Jeong-Min;Cho, Hyun-Moo;Lee, Sung-Gap;Lee, Sang-Heon;Lee, Young-Hie
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.11a
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    • pp.329-331
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    • 2003
  • In this paper, $0.10Pb(Sb_{1/2}Sn_{1/2})O_3-0.25PbTiO_3-0.65PbZrO_3$ ceramics were fabricated by the mixed-oxide method. The sintering temperature and time were $1230^{\circ}C$ and 2(hr), respectively. The structural, dielectric and pyroelectric properties with addition of $Y_2O_3$ were studied. The crystal structure of a specimen was rhombohedral. As a result of SEM, the average grain size were decreased with increasing the contents of $Y_2O_3$. Relative dielectric constant and dielectric loss of the specimen doped with 0.2wt% $Y_2O_3$ were 597 and 0.022, respectively. Remanent polarization and coercive field of the specimen doped with 0.4wt% $Y_2O_3$ were $8.5[{\mu}C/cm^2]$ and 10.2[kV/cm], respectively.

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Dielectric and Piezoelectric Characteristics of PSS-PZT Piezoelectric Ceramics with CrS12TOS13t Addition (Cr2O3 첨가에 따른 PSS-PZT 압전 세라믹스의 유전 및 압전 특성)

  • 홍재일;이개명;윤석진;유주현;박창엽
    • The Transactions of the Korean Institute of Electrical Engineers
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    • v.41 no.6
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    • pp.687-693
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    • 1992
  • To improve dielectric, piezoelectric and temperature stability in 0.50Pb(SnS11/2TSbS11/2T)OS13T - 0.35PbTiOS13T - 0.60PbZrOS13T + 0.4[wt%]MnOS12T piezoelectric ceramics which is used for surface acoustic wave devices, CrS12TOS13T was added and the specimens were fabricated by Hot Press method, and their characteristics were measured with CrS12TOS13T addition. From the results, in the specimen added by 0.2[wt%]CrS12TOS13T, dielectric constant and mechanical quality factor were 380 and 2307, respectively, and it was suited for surface acoustic wave device and the temperature coefficient of the resonant frequency in the specimen added by 0.4[wt%]CrS12TOS13T was the least value of 74.96[ppm/$^{\circ}C$].

Catalytic synthesis and properties of β-Ga2O3 nanowires by metal organic chemical vapor deposition (MOCVD를 이용한 금속 촉매 종류에 따른 β-Ga2O3 나노 와이어의 제작과 특성)

  • Lee, Seunghyun;Lee, Seoyoung;Jeong, Yongho;Lee, Hyojong;Ahn, Hyungsoo;Yang, Min
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.27 no.1
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    • pp.1-8
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    • 2017
  • Catalytic synthesis and properties of ${\beta}-Ga_2O_3$ nanowires grown by metal organic chemical vapor deposition are reported. Au, Ni and Cu catalysts were suitable for the growth of $Ga_2O_3$ nanowires under our experimental conditions. The $Ga_2O_3$ nanowires grown by using Au, Ni and Cu catalysts showed different growth rates and morphologies in each case. We found the $Ga_2O_3$ nanowires were grown by the Vapor-Solid (VS) process when Ni was used as a catalyst while the Vapor-Liquid-Solid (VLS) was a dominant process in case of Au and Cu catalysts. Also, we found nanowires showed different optical properties depend on catalytic metals. On the other hand, for the cases of Ti, Sn and Ag catalysts, nanowires could not be obtained under the same condition of Au, Cu and Ni catalytic synthesis. We found that these results are related to the different characteristics of each catalyst, such as, melting points and phase diagrams with gallium metal.

A Study on Pyroelectric Characteristics of PZT/Polymer Composite Material (PZT/Polymer 복합재료의 초전 특성에 관한 연구)

  • 이응상;안성훈
    • Journal of the Korean Ceramic Society
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    • v.27 no.1
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    • pp.35-42
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    • 1990
  • In the present investigation, ceramic PZT and Polymer were prepared. The former is Pb[(Sn1/2Sb1/2)0.1 Ti0.27Zr0.63]O3 including Pb(Sn1/2Sb1/2)O3 with good pyroelectric effect, and the latter PVA(Poly Vinyl Alcohol) with good plasticity. Then, they were fabricated to be flat by using 0-3 connectivity which is rather easily fabricated and capable of making thin film, extending surface area among the connectivities. Such were applied to the sample as variation of intensity of poling field, poling temperature, volume fraction between ceramic and polymer. Then dielectric constant, pyroelectric current, pyroelectric coefficient and the figure of merit were measured. And then their effects on pyroelectric characteristics were observed.

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A study on the velocity characteristics of surface acoustic wave in PSS-PZT ceramics (PSS-PZT계 세라믹스의 탄성표면파 속도특성에 관한 연구)

  • 강진규;백동수;김준한;홍재일;박창엽
    • Electrical & Electronic Materials
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    • v.6 no.2
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    • pp.109-114
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    • 1993
  • 본 논문에서는 0.05Pb(Sn$_{1}$2/Sb$_{1}$2/)-0.35PbTiO$_{3}$-0.60PbZrO $_{3}$+0.4[wt%] MnO$_{2}$ 조성을 갖는 3성분계 압전세라믹스에 Cr$_{2}$O$_{3}$ 의 첨가량을 변화시켜서 지연선을 제작하고 탄성표면파를 여기시켜 전파속도를 측정하였으며 EMMAS 기준에 따라 각 시편의 재료정수를 측정하고 이를 압전방정식에 적용하여 매질에 따라 여기되는 탄성표면파의 계산속도를 이론적으로 산출한 후 이를 지연선에서 측정된 실험속도와 비교하여 재료의 특성이 탄성표면파의 전파특성에 미치는 영향을 조사하였다. 그 결과 SAW 지연선에서 측정된 탄성표면파는 Generalized Rayleigh Wave였으며 재료의 특성이 우수한 시편일 수록 계산속도와 측정속도와의 차가 적었던 것으로 나타났고 오차한도는 평균 99.39[%]였으므로 실험속도 측정방법이 feed through 현상없이 우수한 측정방법이었음을 알 수 있었다.

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