• 제목/요약/키워드: $SnO_2$ gas-sensor

검색결과 213건 처리시간 0.027초

CO/HC 가스 인식을 위한 소형 전자코 시스템의 제작 및 특성 (Fabrication and Characterization of Portable Electronic Nose System for Identification of CO/HC Gases)

  • 홍형기;권철한;윤동현;김승렬;이규정;김인수;성영권
    • 센서학회지
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    • 제6권6호
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    • pp.476-482
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    • 1997
  • 주성분 분석 및 역전달 인공 신경망의 패턴 인식 기법과 산화물 반도체 가스센서 어레이를 사용한 소형 전자코 시스템을 제작하여 그 특성을 평가하였다. 센서 어레이로서 Pd가 첨가된 $WO_{3}$, Pt가 첨가된 $SnO_{2}$, $TiO_{2}-Sb_{2}O_{5}-Pd$가 첨가된 $SnO_{2}$, $TiO_{2}-Sb_{2}O_{5}-Pd$가 첨가된 후 Pd 코팅층이 형성된 $SnO_{2}$, $Al_{2}O_{3}$가 첨가된 ZnO 및 $PdCl_{2}$가 첨가된 $SnO_{2}$ 등의 6가지 조성의 감지재료가 사용되었다. 전자코 시스템 하드웨어는 CPU로서 16bit의 Intel 80c196kc, 시스템 동작 프로그램의 저장을 위한 EPROM, 인공 신경망의 최적화된 가중치의 다운로딩을 위한 EEPROM, 가스농도의 결과 표시를 위한 LCD 등으로 구성하였다. 시스템의 성능 평가를 위해 자동차에서 배출되는 환경오염 물질인 CO/HC 가스(CO 0%/HC 0 ppm 에서 CO 7.6%/HC 400 ppm 까지 범위의 26가지 CO/HC 혼합가스 패턴)에 대한 인식 실험 결과 우수한 특성을 얻을 수 있었다.

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Gas Sensing Characteristics of Sb-doped SnO2 Nanofibers

  • Choi, Joong-Ki;Hwang, In-Sung;Kim, Sun-Jung;Park, Joon-Shik;Park, Soon-Sup;Dong, Ki-Young;Ju, Byeong-Kwon;Lee, Jong-Heun
    • 센서학회지
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    • 제20권1호
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    • pp.1-7
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    • 2011
  • Undoped and Sb-doped $SnO_2$ nanofibers were prepared by electrospinning and their responses to $H_2$, CO, $CH_4$, $C_3H_8$, and $C_2H_5OH$ were measured. In the undoped $SnO_2$ nanofibers, the gas response ($R_a/R_g$, $R_a$: resistance in air, $R_g$: resistance in gas) to 100 ppm $C_2H_5OH$ was very high(33.9), while that to the other gases ranged from 1.6 to 2.2. By doping with 2.65 wt% Sb, the response to 100 ppm $C_2H_5OH$ was decreased to 4.5, whereas the response to $H_2$ was increased to 3.0. This demonstrates the possibility of detecting a high $H_2$ concentration with minimum interference from $C_2H_5OH$ and the potential to control the gas selectivity by Sb doping.

Gas sensing properties of polyacrylonitrile/metal oxide nanofibrous mat prepared by electrospinning

  • 이득용;조정은;김예나;오영제
    • 센서학회지
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    • 제17권4호
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    • pp.281-288
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    • 2008
  • Polyacrylonitrile(PAN)/metal oxide(MO) nanocomposite mats with a thickness of 0.12 mm were electrospun by adding 0 to 10 wt% of MO nanoparticles ($Fe_2O_3$, ZnO, $SnO_2$, $Sb_2O_3-SnO_2$) into PAN. Pt electrode was patterned on $Al_2O_3$ substrate by DC sputtering and then the PAN(/MO) mats on the Pt patterned $Al_2O_3$ were electrically wired to investigate the $CO_2$ gas sensing properties. As the MO content rose, the fiber diameter decreased due to the presence of lumps caused by the presence of MOs in the fiber. The PAN/2% ZnO mat revealed a faster response time of 93 s and a relatively short recovery of 54 s with a ${\Delta}R$ of 0.031 M${\Omega}$ at a $CO_2$ concentration of 200 ppm. The difference in sensitivity was not observed significantly for the PAN/MO fiber mats in the $CO_2$ concentration range of 100 to 500 ppm. It can be concluded that an appropriate amount of MO nanoparticles in the PAN backbone leads to improvement of the $CO_2$ gas sensing properties.

Semiconducting ZnO Nanofibers as Gas Sensors and Gas Response Improvement by $SnO_2$ Coating

  • Moon, Jae-Hyun;Park, Jin-Ah;Lee, Su-Jae;Zyung, Tae-Hyoung
    • ETRI Journal
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    • 제31권6호
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    • pp.636-641
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    • 2009
  • ZnO nanofibers were electro-spun from a solution containing poly 4-vinyl phenol and Zn acetate dihydrate. The calcination process of the ZnO/PVP composite nanofibers brought forth a random network of polycrystalline wurtzite ZnO nanofibers of 30 nm to 70 nm in diameter. The electrical properties of the ZnO nanofibers were governed by the grain boundaries. To investigate possible applications of the ZnO nanofibers, their CO and $NO_2$ gas sensing responses are demonstrated. In particular, the $SnO_2$-deposited ZnO nanofibers exhibit a remarkable gas sensing response to $NO_2$ gas as low as 400 ppb. Oxide nanofibers emerge as a new proposition for oxide-based gas sensors.

어닐링처리시킨 SnO2 가스센서의 박막성장특성 (Growth Characteristics of SnO2 Thin Film for Gas Sensor with Annealing Treatment)

  • 강계명;최종운
    • 한국표면공학회지
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    • 제40권6호
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    • pp.258-261
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    • 2007
  • Relationships between the electrical resistivity and the growth characteristic of $SnO_2$ thin films were investigated. $SnO_2$ thin films with thickness from 64 nm to 91 nm were made by controlling the RF deposition energy from 80 to 150 W. These $SnO_2$ thin films were annealed at $200^{\circ}C{\sim}700^{\circ}C$ temperature range of $100^{\circ}C$ interval in the $O_2$ gas condition. After annealing treatments, the microstructures of the $SnO_2$ thin films were changed mixed structure(amorphous & crystalline) to lamina columnar crystalline structure. Both the film thickness and the grain size were increased with increasing the local crystallization of $SnO_2$ microstructure of thin films by annealing treatment. Their electrical resistivity increased up to the annealing temperature of $400^{\circ}C$, and then slowly decreased.

Pd 도핑에 따른 $SnO_2$ 나노선 가스센서의 감도 특성 개선 (The Improvement of Sensitivity Characteristics of Pd doped $SnO_2$ Nanowire Gas Sensor)

  • 김연우;권순일;박승범;이석진;정태환;양계준;임동건;박재환;김홍오
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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    • pp.160-161
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    • 2008
  • $SnO_2$는 n형 반도체로써 3.6 eV의 큰 밴드갭을 가지는 물질로 CO와 NOx 가스에 좋은 감도를 나타내는 것으로 보고되고 있다. 문헌에 따른 일반적인 $SnO_2$ 가스센서는 후막이나 벌크형태로 제작되었다. 근래에는 가스감응체가 $SnO_2$ 나노선 형태인 가스센서가 활발한 연구 중에 있다. 본 논문에서는 기판 위에 서로 분리된 전극 패턴에 Au를 촉매로 하여 네트워크 구조로 된 $SnO_2$ 나노선이 합성되었다. 제작된 가스센서에 Pd 도핑에 따른 영향을 알아보기 위하여 1.8 mM의 Pd 용액 ($PdCl_2{\cdot}xH_2O$ 3 mg + $H_2O$ 10 ml)을 이용하여 센서에 도핑하였다. 측정 시스템에서 $NO_2$ 가스에 대한 센서의 특성을 분석한 결과 도핑하지 않은 $SnO_2$ 센서보다 20%정도의 감도가 개선되었다.

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The Applications of Sol-Gel Derived Tin Oxide Thin Films

  • Park, Sung-Soon;John D. Mackenzie
    • The Korean Journal of Ceramics
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    • 제2권1호
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    • pp.1-10
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    • 1996
  • Transparent conducting $SnO_2$-based thin films have been coated on float substrates such as fused quartz, and ceramic fiber cloths such as the Nexel and E-glass cloth from tin alkoxides by the sol-gel technique. Also, thin films of alternating layers of $SnO_2$ and $SiO_2$ have been fabricated by dip coating. The sheet resistance and average visible transmittance of the films were investigated in the aspect of the applications as transparent electrodes such as liquid crystal displays, photo-detectors and solar cells. The Nextel and E-glass cloths coated with antimony-doped tin oxide (ATO) had sheet resistance of as low as $20 \;ohm/{\Box}$ and $120ohm/\;{\Box}$, respectively. The promotion effects of additives as $La_2O_3$ and Pt on the ethanol gas sensing properties of the films were investigated in the aspects of the applications as an alcohol sensor and a breath alcohol checker. Possible evidence of quantum well effects in the oxide multilayers of $SnO_2$ and $SiO_2$ was investigated.

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화염 분무 열분해법에 의해 합성된 SnO2 나노입자의 가스 감응 특성 (Gas Sensing Property of SnO2 Nanoparticles Synthesized by Flame Spray Pyrolysis)

  • 김홍찬;신동욱;홍성현
    • 한국전기전자재료학회논문지
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    • 제25권8호
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    • pp.626-631
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    • 2012
  • $SnO_2$ nanoparticles were synthesized by flame spray pyrolysis, which were directly deposited on Pt interdigitated substrates. Gas sensing performance was evaluated for various gases such as $H_2$, CO, $H_2S$, and $NH_3$, and it was compared with that of commercial $SnO_2$ nanopowder. The synthesis of $SnO_2$ nanoparticles was also conducted in various solvents. As a result, the primary particle size was changed with the solvent of precursor solution, and their $H_2$ sensing properties were significantly affected.

금속 산화물 나노구조형 마이크로 박막 센서의 제작 및 가스 응답 특성 (Microfabrication of Thin Film Sensor with Metal Oxide Nanostructure and Their Gas Sensing Properties)

  • 강봉휘;이상록;송갑득;주병수;이덕동
    • 대한전자공학회논문지SD
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    • 제43권8호
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    • pp.13-18
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    • 2006
  • Sn과 Zn 금속을 이용해 각각 산소와 아르곤 가스를 주입한 대기압 분위기에서 열처리를 통해 $SnO_2$와 ZnO 나노박막을 형성시켰다. 나노구조로 형성된 $SnO_2$ 박막의 경우 CO 가스(5,000 ppm)에 대해 $200^{\circ}C$의 동작온도에서 약 50 %의 감도를 나타내었으며, $SnO_2$ 나노 금속산화물에 Pt 금속을 이온 코팅법에 의해 첨가한 박막의 경우에는 동작온도 $150^{\circ}C$에서 73 %의 높은 감도를 얻을 수 있었다. 순수 ZnO 나노 박막의 경우 NOx(20 ppm) 가스에 대해 낮은 감도를 나타내었으나, Cu를 이온 코팅법에 의해 첨가한 박막의 경우에는 동작온도 $200^{\circ}C$에서 90 %의 높은 감도를 나타내었다. 나노 구조가 아닌 $SnO_2$와 ZnO 박막이 가지는 CO와 NOx에 대한 가스 감도에 비해 매우 높은 감도를 가짐을 알 수 있었다.