• 한국결정성장학회지
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• 제17권3호
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• pp.91-94
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• 2007

Vapor liquid solid 기구에 의한 열화학기상증착법을 이용하여 Si (001) 기판 위에 $SnO_2$ 나노와이어를 성장시켰다. Au 박막 (3 nm)을 성장을 위한 촉매로 사용하여 Si(001) 기판 이에 순수 SnO powder (purity, 99.9%)를 반응 원료로 대기압 하 $950{\sim}100^{\circ}C$ 온도 범위, $750{\sim}800\;sccm$ 아르곤 분위기에서 $SnO_2$ 나노와이어를 성장시켰다. X-ray diffraction 분석을 통해 성장한 $SnO_2$ 나노와이어가 tetragonal rutile 구조임을 확인하였고, transmission electron microscopy 분석을 통해 단일 나노와이어의 결정 특성을 분석하였다. 또한, 상온 photoluminescence 분석을 통해 나노와이어 샘플로부터 600 nm 부근에서 나타나는 defect level 천이에 의한 넓은 emission band를 확인함으로써 성장한 나노와이어 $SnO_2$임을 확인하였다.

• 마이크로전자및패키징학회지
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• 제27권2호
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• pp.11-17
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• 2020

본 연구에서는 Ag 금속입자가 기능화된 SnO₂ 나노선을 제작 및 저온 NO₂ 가스 센싱 특성을 평가하였다. Vapor-liquid-solid 공법을 이용하여 SnO₂ 나노선을 합성하였고, flame chemical vapour deposition 공법을 이용하여 Ag 금속입자를 SnO₂ 나노선 표면에 기능화하였다. 합성된 Ag 금속입자가 기능화된 SnO₂ 나노선을 이용하여 50℃에서 NO₂ 10 ppm에 대한 가스 센싱 테스트를 진행한 결과, 감응도(R_g/R_a) 1.252를 얻었다. 본 연구를 통하여, 금속입자가 기능화된 나노선을 이용한 저온동작 반도체식 가스센서의 산업 적용을 현실화 할 수 있을 것으로 기대된다.

• 한국재료학회지
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• 제20권4호
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• pp.223-227
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• 2010

Recently, one-dimensional semiconducting nanomaterials have attracted considerable interest for their potential as building blocks for fabricating various nanodevices. Among these semiconducting nanomaterials,, $SnO_2$ nanostructures including nanowires, nanorods, nanobelts, and nanotubes were successfully synthesized and their electrochemical properties were evaluated. Although $SnO_2$ nanowires and nanobelts exhibit fascinating gas sensing characteristics, there are still significant difficulties in using them for device applications. The crucial problem is the alignment of the nanowires. Each nanowire should be attached on each die using arduous e-beam or photolithography, which is quite an undesirable process in terms of mass production in the current semiconductor industry. In this study, a simple process for making sensitive $SnO_2$ nanowire-based gas sensors by using a standard semiconducting fabrication process was studied. The nanowires were aligned in-situ during nanowire synthesis by thermal CVD process and a nanowire network structure between the electrodes was obtained. The $SnO_2$ nanowire network was floated upon the Si substrate by separating an Au catalyst between the electrodes. As the electric current is transported along the networks of the nanowires, not along the surface layer on the substrate, the gas sensitivities could be maximized in this networked and floated structure. By varying the nanowire density and the distance between the electrodes, several types of nanowire network were fabricated. The $NO_2$ gas sensitivity was 30~200 when the $NO_2$ concentration was 5~20ppm. The response time was ca. 30~110 sec.

• 센서학회지
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• 제20권5호
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• pp.289-293
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• 2011

Networked $SnO_2$ nanowires were uniformly functionalized with Pd nanoparticles via ${\gamma}$-ray radiolysis. The Networked $SnO_2$ nanowires were fabricated through a selective growth method. The sensing properties of the Pd-functionalized $SnO_2$ nanowires were analyzed in terms of their response to $NO_2$ and CO gases. The response time and sensitivity of the sensors were significantly improved for $NO_2$ at lower temperatures by the Pd functionalization. The enhancement in the sensing properties is likely to be due to the spillover effect of the Pd nanoparticles.

• 센서학회지
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• 제21권3호
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• pp.167-171
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• 2012

Ag- and Pd-loaded $SnO_2$ nanowire network sensors were prepared by the growth of $SnO_2$ nanowires via thermal evaporation, the coating of slurry containing $SnO_2$ nanowires, and dropping of a droplet containing Ag or Pd nanoparticles, and subsequent heat treatment. All the pristine, Pd-loaded and Ag-loaded $SnO_2$ nanowire networks showed the selective detection of $C_2H_5OH$ with low cross-responses to CO, $H_2$, $C_3H_8$, and $NH_3$. However, the relative gas responses and gas selectivity depended closely on the catalyst loading. The loading of Pd enhanced the responses($R_a/R_g$: $R_a$: resistance in air, $R_g$: resistance in gas) to CO and $H_2$ significantly, while it slightly deteriorated the response to $C_2H_5OH$. In contrast, a 3.1-fold enhancement was observed in the response to 100 ppm $C_2H_5OH$ by loading of Ag onto $SnO_2$ nanowire networks. The role of Ag catalysts in the highly sensitive and selective detection of $C_2H_5OH$ is discussed.

• Transactions on Electrical and Electronic Materials
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• 제5권3호
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• pp.93-97
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• 2004

Structural and optoelectronic properties of as-synthesized SnO$_2$ nanowires were examined in this study. The SnO$_2$ nanowires were first synthesized by thermal evaporation of ball-milled SnO$_2$ powders in argon atmosphere without the presence of any catalysts, arid their structural properties are then investigated by X-ray diffraction, Raman scattering, scanning electron microscopy, and transmission electron microscopy. This investigation revealed that the synthesized SnO$_2$ nanowires are single-crystalline and that their growth direction is parallel to the [100] direction. In addition, photoresponse of a single SnO$_2$ nanowire was performed with light with above-gap energy, and different characteristics of photoresponses were obtained for the nanowire at ambient atmosphere and in vacuum. The photoresponse mechanism is briefly discussed in this paper.

• Applied Science and Convergence Technology
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• 제23권5호
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• pp.301-307
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• 2014

We have fabricated $SnO_2$/Zn core-shell nanowires by employing a sputtering technique with a Zn target. Scanning electron microscopy indicated that the surface of the nanowires became rougher by the coating. X-ray diffraction of the coated nanowires exhibited the hexagonal Zn diffraction peaks. TEM image of coated structures showed that shell layer was mainly comprised of hexagonal Zn phase. EDX spectra suggested that the shell layer consisted of Zn elements. The photoluminescence spectrum of the coated nanowires in conjunction with Gaussian fitting analysis revealed that the emission was disconvoluted with three Gaussian functions, which are centered at 2.1 eV in the yellow region, 2.4 eV in the green region, and 3.3 eV in the ultraviolet region. We speculated the possible mechanisms of these emission peaks.

• 한국결정성장학회지
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• 제22권1호
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• pp.25-28
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• 2012

Tin-oxide ($SnO_2$) nanowires have been synthesized on one-dimensional (1D) carbonization cotton fabric using chemical vapour deposition method. One-dimensional (1D) carbonization cotton fabric has been synthesized from cotton fabric using annealing process in nitrogen gas at $1000^{\circ}C$. The $SnO_2$ nanowires are single-crystalline rutile structures with 20 nm in diameter and 10 ${\mu}m$ in length. Scanning electron microscopy (SEM), x-ray photoelectron spectroscopy, Raman spectroscopy, transmission electron microscopy and photoluminescence (PL) spectroscopy were utilized to characterize the as-synthesized products.

• 한국결정성장학회지
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• 제29권6호
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• pp.245-250
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• 2019

라디오주파수 분말 스퍼터링 방법으로 sapphire (0001) 기판 위에 Sn을 함유한 β-Ga₂O₃(β-Ga₂O₃ : Sn) 나노와이어를 증착하였다. 후열처리 공정의 가스 분위기가 나노와이어 형상의 변화에 미치는 영향을 연구하였다. 800℃에서 진공 중 열처리 과정에서, as-grown 나노와이어는 다공성 구조로 전이하였다. 비화학양론 Ga₂O_3-x는 화학양론 Ga₂O₃로 바뀌고, Sn원자는 응집하여 나노클러스터를 형성한다. Sn 나노클러스터는 증발하여 Sn 원자의 함량은 1.31에서 0.27 at%로 감소하였다. Sn원자의 증발로 인하여 나노와이어 표면에 다수의 기공이 형성되고, 이는 β-Ga₂O₃ : Sn 나노와이어의 체적대비 표면적 비율을 증가시킨다.

• 한국진공학회지
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• 제22권4호
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• pp.204-210
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• 2013

임플란트와의 골융합을 향상시키기 위해서 세포와 임플란트 표면의 나노구조의 상호작용에 대한 이해가 중요하다. 본 연구에서는 Sn를 촉매로 이용하여 Vapor-Liquid-Solid 법을 이용하여 $TiO_2$ 나노와이어를 튜브 전기로 안에서 질소기체 조건하에서 합성하였다. 이 때 촉매로 사용된 Sn 박막의 두께에 따라 응집된 나노스피어를 이용하여 $TiO_2$ 나노와이어의 크기를 조절하였다. 골융합을 위한 예비 실험으로써, 만들어진 $TiO_2$ 나노와이어 샘플 위에서 조골전구세포(pre-osteoblast)를 1주일간 배양하였고, 세포가 $TiO_2$ 나노와이어에 잘 결합함을 볼 수 있었다.