• Title/Summary/Keyword: $SiO_X$

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The Design and Fabrication of Conversion Layer for Application of Direct-Detection Type Flat Panel Detector (직접 검출형 평판 검출기 적용을 위한 변환층 설계 및 제작)

  • Noh, Si-Cheol;Kang, Sang-Sik;Jung, Bong-Jae;Choi, Il-Hong;Cho, Chang-Hoon;Heo, Ye-Ji;Yoon, Ju-Seon;Park, Ji-Koon
    • Journal of the Korean Society of Radiology
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    • v.6 no.1
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    • pp.73-77
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    • 2012
  • Recently, Interest to the photoconductor, which is used to flat form X-ray detector such as a-Se, $HgI_2$, PbO, CdTe, $PbI_2$ etc. is increasing. In this study, the film layer by using the photoconductive material with particle sedimentation was fabricated and evaluated. The quantization efficiency of the continuous X-ray with the 70 kVp energy bandwidth was analyzed by using the Monte Carlo simulation. With the results, the thickness of film with 64 % quantization efficiency was 180 ${\mu}m$ which is similar to the efficiency of 500 ${\mu}m$ a-Se film. And $HIg_2$ film has the high quantization efficiency of 74 % on 240 ${\mu}m$ thickness. The electrical characteristics of the 239 ${\mu}m$ $Hgl_2$ films produced by particle sedimentation were shown as very low dark current(under 10 $pA/mm^2$), and high sensitivity(19.8 mC/mR-sec) with 1 $V/{\mu}m$ input voltage. The SNR, which is influence to the contrast of X-ray image, was shown highly as 3,125 in low driving voltage on 0.8 $V/{\mu}m$. With the results of this study, the development of the low-cost, high-performance image detector with film could be possible by replacing the film produced by particle sedimentation instead to a-Se detector.

Fabrication and Characteristics of Micro Platform for Micro Gas Sensor with Low Power Consumption (마이크로 가스센서의 저전력 구동을 위한 마이크로 플랫폼의 제작과 특성)

  • Jang, Woong-Jin;Park, Kwang-Bum;Kim, In-Ho;Park, Soon-Sup;Park, Hyo-Derk;Lee, In-Kyu;Park, Joon-Shik
    • Journal of Sensor Science and Technology
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    • v.20 no.5
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    • pp.317-321
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    • 2011
  • A Micro platform for micro gas sensor consisted of micro heater, insulator, and sensing electrode on 2 ${\mu}m$ thick $SiN_x$ membrane. Three types of micro platforms were designed and fabricated with membrane sizes. Total size of micro platform was 2.6 mm by 2.6 mm. Measured power consumptions were 28 mW, 28 mW, and 32.5 mW for Type 1, Type 2, and Type 3. At this moment, temperatures of membranes on the platforms were $295^{\circ}C$, $297^{\circ}C$, and $296^{\circ}C$, respectively. Fabricated micro platform considered appropriate to apply for low power consumption micro gas sensor. Micro gas sensors were prepared by the sequence that $SnO_2$ nanopowder pastes were dropped on membrane of Type 1 platforms, dried in oven, heat-treated with micro heaters in platforms. One of the micro gas sensors was tested for gas response to 1157 ppm, 578 ppm, and 231 ppm of methane and 1.68 ppm, 0.84 ppm, and 0.42 ppm of $NO_2$.

Stabilization of As in Soil Contaminated with Chromated Copper Arsenate (CCA) Using Calcinated Oyster Shells (목재방부제(CCA) 오염토양의 소성가공 굴껍질을 이용한 비소 안정화)

  • Moon, Deok-Hyun;Cheong, Kyung-Hoon;Kim, Tae-Sung;Khim, Jee-Hyeong;Choi, Su-Bin;Moon, Ok-Ran;Ok, Yong-Sik
    • Korean Journal of Environmental Agriculture
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    • v.28 no.4
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    • pp.378-385
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    • 2009
  • Arsenic (As) is known to be very toxic and carcinogenic to human beings. Arsenic contaminated soil was collected from a timber mill site at Busan Metropolitan City, Korea, where chromated copper arsenate (CCA) had been used to protect wood from rotting caused by insects and microbial agents. The soil was stabilized using both natural oyster shells (NOS) and calcinated oyster shells (POS). The calcination of natural oyster shells was accomplished at a high temperature in order to activate quicklime from calcite. Two different oyster shell particle sizes (-#10 mesh and -#20 mesh) and curing periods of up to 28 days were investigated. The stabilization effectiveness was evaluated based on the Korean Standard Test (KST) method (1N HCl extraction). The stabilization results showed that the POS treatment was more effective than the NOS treatment at immobilizing the As in the contaminated soils. A significant As reduction (96%) was attained upon a POS treatment at 20 wt% and passed the Korean warning standard of 20 mg/kg ('Na' area). However, an As reduction of only 47% (169 mg/kg) was achieved upon a NOS treatment at 20 wt%. The -#20 mesh oyster shells seem to perform better than the -#10 materials. The scanning electron microscopy (SEM)-energy dispersive X-ray spectroscopy (EDX) results showed that As immobilization was strongly associated with Ca and O in the presence of Al and Si.

Quantitative Analysis of Platycodin D from Platycodon grandiflorum by HPLC-ELSD (HPLC-ELSD법에 의한 길경의 platycodin D 정량분석)

  • Kim, Geum-Soog;Kim, Hyun-Tae;Seong, Jae-Duck;Park, Hee-Saeng;Kim, Soo-Dong
    • Korean Journal of Medicinal Crop Science
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    • v.10 no.3
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    • pp.200-205
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    • 2002
  • Platycodin D was isolated from n-butanol extract of Platycodi radix(Platycodon grandiflorum and identified by the spectroscopic analysis using $^1H$ and $^{13}C$ NMR techniques. A new method of analysis of platycodin D by high performance liquid chromatography(HPLC) was established using a reversed phase system with YMC-Pack ODS-AM( 250 X 4.6 mm) column and 30% acetonitrile as a mobile phase. Evaporative light scattering detector was used as detector. The kinds of extraction solvents and methods were examined to determine the efficient extraction condition and HPLC analysis was carried out to establish the optimum drying condition for the root of Platycodon grandiflorum. The contents of Platycodin D was highest as 0.083% when platycodon roots were dried at $60^{\circ}C$ using dry oven.

Fabrication and magnetic properties of Co-Zn ferrite thin films prepared by a sol-gel process (Sol-gel 법에 의한 Co-Zn Ferrite 박막의 제호와 자기 특성에 관한 연구)

  • 김철성;안성용;이승화;양계준;류연국
    • Journal of the Korean Magnetics Society
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    • v.11 no.4
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    • pp.168-172
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    • 2001
  • Co-Zn ferrite thin films grown on thermally oxidized silicon wafers were fabricated by a sol-gel method. Magnetic and structural properties of Co-Zn thin films were investigated by using x-ray diffractometer (XRD), atomic force microscopy (AFM), auger electron spectroscopy (AES) and a vibrating sample magnetometer (VSM). Co-Zn ferrite thin films annealed at 400 $^{\circ}C$ presented have only a single phase spinel structure without any preferred crystallite orientation. Their surface roughness of Co-Zn ferrite thin films was shown as less than 3 nm and the grain size was about 40 nm for annealing temperatures over 600 $^{\circ}C$. A moderate saturation magnetization of Co-Zn ferrite thin films for recording media was obtained in this study and there is no significant difference of their magnetic property with those external fields of parallel and perpendicular to planes of the films. The maximum value of the coercivity was obtained as 1,900 Oe for Co-Zn ferrite thin film annealed at 600 $^{\circ}C$.

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Photoluminescent Properties of YAG:Ce3+ Phosphors for the application of white LED (백색 LED 응용을 위한 YAG:Ce3+ 형광체의 광학특성)

  • Jang, Bum-Sik;Park, Joo-Seok;Yoo, Soon-Jae;Ahn, Young-Soo;Kim, Hong-Soo;Kim, Joon-Soo;Han, Seong-Ok;Cho, Chul-Hee;Yoo, Yoon-Jong;Kim, Si-Kyung;Han, Moon-Hee
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.04a
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    • pp.181-184
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    • 2003
  • GaN계 청색 여기용 광원으로 최적인 $Y_{3}AI_{5}O_{12}:Ce$계 phosphor를 고상반응으로 제조하여 white LED용 yellow 형광체로 신뢰성을 검토하였다. 출발시료는 metal hydrous oxide로 합성한 분말에 활성제로서 $Ce^{3+}$ 이온의 농도를 변화시키면서 로내의 온도와 시간을 변수로 하여 형광체를 제조하였다. 그 결과 $1650^{\circ}C$에서 2시간 소성시킨 분말의 경우, 입자 크기가 $3{\mu}m$이하인 순수 YAG 형광체를 얻을 수 있었으며 $Ce^{3+}$이온농도를 변화시킨 결과 0.03~0.05mol% 일 때가 가장 우수하여 해외제품수준을 능가하는 우수한 발광특성을 나타내었다. 이때 CIE1931 색좌표 값은 x=0.385, y=0.433으로서 green yellow 색을 나타내었다.

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A Study on the Surface of the Dry Etched TaN Thin Film by Adding The CH4 Gas in BCl3/Ar Inductively Coupled Plasma (BCl3/Ar 유도결합 플라즈마 안에 CH4 가스 첨가에 따른 건식 식각된 TaN 박막 표면의 연구)

  • Woo, Jong-Chang;Choi, Chang-Auck;Yang, Woo-Seok;Joo, Young-Hee;Kang, Pil-Seung;Chun, Yoon-Soo;Kim, Chang-Il
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.26 no.5
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    • pp.335-340
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    • 2013
  • In this study, the plasma etching of the TaN thin film with $CH_4/BCl_3/Ar$ gas chemistries was investigated. The etch rate of the TaN thin film and the etch selectivity of TaN to $SiO_2$ was studied as a function of the process parameters, including the amount of $CH_4$. X-ray photoelectron spectroscopy (XPS) and Field-emission scanning electron microscopy (FE-SEM) was used to investigate the chemical states of the surface of the TaN thin film.

The electronic structure of the ion-beam-mixed Pt-Cu alloys by XPS and XANES

  • Lim, K.Y.;Lee, Y.S.;Chung, Y.D.;Lee, K.M.;Jeon, Y.;Whang, C.N.
    • Proceedings of the Korean Vacuum Society Conference
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    • 1998.02a
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    • pp.133-133
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    • 1998
  • In the thin film alloy formation of the transition metals ion-beam-mixing technique forms a metastable structure which cannot be found in the arc-melted metal alloys. Sppecifically it is well known that the studies about the electronic structure of ion-beam-mixed alloys pprovide the useful information in understanding the metastable structures in the metal alloy. We studied the electronic change in the ion-beam-mixed ppt-Ct alloys by XppS and XANES. These analysis tools pprovide us information about the charge transfer in the valence band of intermetallic bonding. The multi-layered films were depposited on the SiO2 substrate by the sequential electron beam evapporation at a ppressure of less than 5$\times$10-7 Torr. These compprise of 4 ppairs of ppt and Cu layers where thicknesses of each layer were varied in order to change the alloy compposition. Ion-beam-mixing pprocess was carried out with 80 keV Ae+ ions with a dose of $1.5\times$ 1016 Ar+/cm2 at room tempperature. The core and valence level energy shift in these system were investigated by x-ray pphotoelectron sppectroscoppy(XppS) pphotoelectrons were excited by monochromatized Al K a(1486.6 eV) The ppass energy of the hemisppherical analyzer was 23.5 eV. Core-level binding energies were calibrated with the Fermi level edge. ppt L3-edge and Cu K-edge XANES sppectra were measured with the flourescence mode detector at the 3C1 beam line of the ppLS (ppohang light source). By using the change of White line(WL) area of the each metal sites and the core level shift we can obtain the information about the electrons pparticippating in the intermetallic bonding of the ion-beam-mixed alloys.

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Correlation between terahertz characteristics and defect states in LTG-InGaAs

  • Park, Dong-U;Kim, Jun-O;Lee, Sang-Jun;Kim, Chang-Su;Lee, Dae-Su;No, Sam-Gyu;Gang, Cheol;Gi, Cheol-Sik;Kim, Jin-Su
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.243-243
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    • 2010
  • Low-temperature grown (LTG) InGaAs epilayers were grown by MBE technique for studying a correlation between terahertz (THz) emission and the intrinsic defects. The 1.2-um-thick Be-compensated LTG-InGaAs epilayers were prepared on SI-InP:Fe substrate at $200-250^{\circ}C$, and subsequently in-situ annealed under As environment at $550^{\circ}C$ for 5-30 minutes. The carrier concentration/mobility and the crystalline structure were analyzed by the Hall effect and the x-ray diffraction (XRD), respectively, and the carrier lifetime were determined by the fs time-resolved pump-probe spectroscopy. THz generation from LTG-InGaAs was carried out by a Ti-sapphire laser (800 nm) of a pulse width of 190 fs at a repetition of 76 MHz. Figure shows the spectral amplitude of generated waves in the THz region. As the growth temperature of epilayer increases, the amplitude is enhanced. However, two samples grown at $200^{\circ}C$, as-grown and annealed, show almost no difference in the spectral amplitude. This suggests that the growth temperature is critical in the formation of defect states involved in THz emission. We are now investigating the correlations between the XRD band attributed to defects, the Hall parameter, and the spectral amplitude of generated THz wave.

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EFFECT OF ELECTROLYTE CONCENTRATION ON THE SURFACE CHARACTERISTICS OF ANODIZED AND HYDROTHERMALLY-TREATED TI-6AL-7NB ALLOY (전해질 농도가 양극산화와 열수처리한 Ti-6Al-7Nb 합금의 표면 특성에 미치는 영향)

  • Jang Tae-Yeob;Song Kwang-Yeob;Bae Tae-Sung
    • The Journal of Korean Academy of Prosthodontics
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    • v.43 no.5
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    • pp.684-693
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    • 2005
  • Statement of problem: Ti-6Al-7Nb alloy is used instead of Ti-6Al-4V alloy that was known to have toxicity. Purpose: This study was performed to investigate the effect of electrolyte concentration on the surface characteristics of anodized and hydrothermally-treated Ti-6Al-7Nb alloy Materials and methods: Discs of Ti-6Al-7Nb alloy of 20 mm in diameter and 2 mm in thickness were polished sequentially from #300 to 1,000 SiC paper ultrasonically washed with acetone and distilled water for 5 min, and dried in an oven at $50^{\circ}C$ for 24 hours. Anodizing was performed at current density $30mA/cm^2$ up to 300 V in electrolyte solutions containing $\beta-glycerophosphate$ disodium salt hydrate $(\beta-GP)$ and calcium acetate (CA). Hydrothermal treatment was conducted by high pressure steam at $300^{\circ}C$ for 2 hours using a autoclave. All samples were soaked in the Hanks' solution with pH 7.4 at $36.5^{\circ}C$ for 30 days. Results and conclusion: The results obtained were summarized as follows: 1. After hydrothermal treatment, the precipitated HA crystals showed the dense fine needle shape. However, with increasing the concentration of electrolyte they showed the shape of thick and short rod. 2. When the dense fine needle shape crystals was appeared after hydrothermal treatment, the precipitation of HA crystals in Hanks' solution was highly accelerated. 3. The crystal structures of $TiO_2$ in anodic oxide film were composed of strong anatase peak and weak rutile peak as analyzed with thin-film X-ray diffractometery. 4. The Ca/P ratio of the precipitated HA layer was equivalent to that of HA crystal in Hanks' solution.