• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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• v.18 no.3
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• pp.407-414
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• 2020

Thermal decomposition of the uranyl phosphate mineral phase meta-ankoleite (KUO₂PO₄·3H₂O) has been considered in relation to high temperature thermal sintering for the immobilisation of a uranyl phosphate containing waste. Meta-ankoleite thermal decomposition was studied across the temperature range 25 - 1200℃ under an inert N₂ atmosphere at 1 atm. It is shown that the meta-ankoleite mineral phase undergoes a double de-hydration event at 56.90 and 125.85℃. Subsequently, synthetically produced pure meta-ankoleite remains stable until at least 1150℃ exhibiting no apparent phase changes. In contrast, when present in a mixed waste the meta-ankoleite phase is not identifiable after thermal treatment indicating incorporation within the bulk waste either as an amorphous phase and/or as uranium oxide. Visual inspection of the waste post thermal treatment showed evidence of self-sintering owing to the presence of glass former materials, namely, silica (SiO₂) and antimony(V) oxide (Sb₂O₅). Therefore, incorporation of the uranium phase into the waste as part of waste sentencing and immobilisation via high temperature sintering for the purpose of long-term disposal is deemed feasible.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.6 no.2
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• pp.263-274
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• 1996

Titanium dioxide ($TiO_{2}$) film has been widely used as anti-reflection coating for solar cells but not as masking oxide for metallisation and diffusion of impurities. In this paper we have investigated the properties of $TiO_{2}$ for possible incorporation into solar cell processing sequence. Thus the use of a spray deposition system to form the $TiO_{2}$ film and the characterisation of this film to ascertain its suitability to solar cell processing. The spray-on $TiO_{2}$ film was found to be resistant to all the chemicals used in conjunction with solar cell processing. The high temperature anealing (in oxygen ambient) of the spray-on $TiO_{2}$ film resulted in an increased refractive index, which indicated the growth of an underlying thin film of $SiO_{2}$ film for the passivation of silicon surface which would reduce the recombination activities of the fabricated device. Most importantly, the successful incorporation of the $TiO{2}$ film will lead to the reduction of the many high temperature processing steps of solar cell to only one.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.553-553
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• 2012

The artificial shells of hard inorganic nanocomposites on individual cells would protect the cells physically and chemically, and control cell division. These emerging properties could be combined with cell-surface functionalizations for applications to cell-based sensors and assays as well as for fundamental studies on single-cell biology. In this work, individual Chlorella cells were encapsulated within a silica/titania nanocomposite shell in a biocompatible fashion that utilized a designed peptide, RKKRKKRKKRKKDDDDDDDD, as a catalytic template for formation of both $SiO_2$ and $TiO_2$ on the cell surface. The cell viability was maintained, and the division of the encapsulated Chlorella cells was controlled. The cell viability was enhanced compared with the $TiO_2$-shell formation. In addition, the incorporation of $TiO_2$ to the shell made it possible to anchor the ligands of interest to the shell via catechol chemistry. All in all, the combination of biological $SiO_2$ and abiolgical $TiO_2$ for the shell formation gave more tunability of the artificial shells compared with the $SiO_2$ or $TiO_2$ shells only.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.1
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• pp.112-117
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• 2004

$Y_2$$_{-x}$G $d_{x}$ $O_3$:E $u^{3+}$(x=0.0, 0.3, 0.6, 1.0, 1.4) luminescent thin films have been grown on Si (100) substrates using pulsed laser deposition. The films grown under different deposition conditions have been characterized using microstructural and luminescent measurements. The crystallinity, the surface morphology and photoluminescence (PL) of the films are highly dependent on the amount of Gd. The photoluminescence (PL) brightness data obtained from $Y_2$$_{-x}$G $d_{x}$ $O_3$:E $u^{3+}$ films grown under optimized conditions have indicated that Si (100) is one of promised substrates for the growth of high quality $Y_2$$_{-x}$G $d_{x}$ $O_3$:E $u^{3+}$ thin film red phosphor. In particular, the incorporation of Gd into $Y_2$ $O_3$ lattice could induce a remarkable increase of PL. The highest emission intensity was observed with $Y_{1.35}$G $d_{0.60}$ $O_3$: $E^{3+}$, whose brightness was increased by a factor of 1.95 in comparison with that of $Y_2$ $O_3$:E $u^{3+}$ films.3+/ films.films.lms.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.8
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• pp.657-662
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• 2003

This paper presents a new fabrication method of selective SiGe epitaxial growth at 650 $^{\circ}C$ on (100) silicon wafer with oxide patterns by reduced pressure chemical vapor deposition. The new method is characterized by a cyclic process, which is composed of two parts: initially, selective SiGe epitaxy layer is grown on exposed bare silicon during a short incubation time by SiH$_4$/GeH$_4$/HCl/H$_2$system and followed etching step is achieved to remove the SiGe nuclei on oxide by HCl/H$_2$system without source gas flow. As a result, we noted that the addition of HCl serves not only to reduce the growth rate on bare Si, but also to suppress the nucleation on SiO$_2$. In addition, we confirmed that the incubation period is regenerated after etching step, so it is possible to grow thick SiGe epitaxial layer sustaining the selectivity. The effect of the addition of HCl and dopants incorporation was investigated.

• Korean Journal of Materials Research
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• v.8 no.12
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• pp.1152-1157
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• 1998

The PZT films were deposited on the Pt/Ti/$SiO_2$/Si substrates using multi- target DC magnetron reactive sputtering. The perovskite single phase with the composition close to the stoichiometric one, was obtained even at high substrate temperature of $540^{\circ}C$ by 2-step method, which is that PZT film was deposited for a short time at low substrate temperature ($480^{\circ}C$) to promote the nucleation of perovskite phase by reducing the volatility of Pb oxide molecules, followed by the deposition at the elevated temperature to suppress the excess incorporation of Pb component in the PZT film. This two-step method, in combination with the RTA treatment, gives rise to good electrical properties of the deposited PZT films: remanent polarifaion,$18\mu$C/$\textrm{cm}^2$; coercive field, 45kV/cm; leakage current of 10$^{-4}$ A/$\textrm{cm}^2$ at high electric field of -500kV/cm.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.402-402
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• 2012

Bundles of single-walled carbon nanotube (SWCNTs) were grown using catalytic layer supported by self-assembled monolayers (SAMs). Amine-SAMs were introduced on SiO2/Si substrate (SAMs/Si) there then iron nanoclusters solution was dropped on it through spin-coating (Fe/SAMs/Si). This catalytic template was used to grow CNTs and the synthesized carbon material was confirmed the bundles of dense SWCNTs with incorporation of ca.1% nitrogen. The SAMs has played an active role to support catalytic layer and also acted as a source of N-dope onto SWCNTs in CVD.

• Journal of Electrical Engineering and Technology
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• v.10 no.4
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• pp.1720-1725
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• 2015

The performance of the AlGaN/GaN MSM-2DEG varactor with different dielectric films deposited by the E-beam deposition is investigated in detail. The capacitance swing and the capacitance ratio of the varactor without dielectric film as well as with, SiO₂, Gd₂O₃, and Si₃N₄ films, respectively, are determined by electrodes of varying areas. The maximum capacitance, the minimum capacitance and the capacitance ratios are proportional to the increasing of the electrode areas. The capacitance ratio determined by the maximum and the minimum capacitance is found to be 18.35 (with Si₃N₄ dielectric film) and 149.51 (without dielectric film), respectively. The transition voltages of the fabricated varactors are almost the same for a bias voltage of about ±5 V and leakage current can be lower three orders of magnitude while the varactors with dielectric films. The tunability of the capacitance ratio makes the AlGaN/GaN MSM-2DEG varactor with a dielectric film highly useful in multirange applications of a surge free preamplier.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.11a
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• pp.11-14
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• 2003

[ $HfO_2$ ] thin films were deposited at $300^{\circ}C$ on p-type Si (100) substrates using $HfO_2(HfO_xN_y)$ as the precursor by plasma-enhanced chemical vapor deposition and were annealed at $300^{\circ}C$ in nitrogen plasma ambient. Compared with $HfO_2$, nitrogen plasma annealed $HfO_2$ show good chemical stability, higher crystallization temperature, lower leakage current and thermal stability. Leakage current density of nitrogen plasma annealed $HfO_2$ is approximately one order of magnitude lower than that of $HfO_2$ for the same EOT. The improvement in electrical characteristics of nitrogen plasma annealed $HfO_2$ can be explained by the better thermal stability due to nitrogen incorporation.

• Journal of Industrial Technology
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• v.23 no.A
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• pp.199-206
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• 2003

The charcoal-encapsulated methyl silica microcapsules were prepared by a O/W microemulsion sol-gel method, and the adsorption properties on aquatic humic acid were investigated. The capsules prepared were spherical, $100{\sim}1000{\mu}m$ in size. The size distribution was controllable by adjusting the size of charcoal powder, charcoal/methyl silica ratio, and agitating speed in O/W sol-gel process. Adsorption efficiency of charcoal for aquatic humic acid was decreased after encapsulation by methyl silica shell. The decreased adsorption efficiency can be dependent on the decrease of the BET surface area and pore volume after encapsulation. Diffusion properties of humic acid through the capsule shell also played an important role on adsorption efficiency. Therefore, the reasonable target pollutants for the capsules can be VOC or odor molecules which can overcome diffusion barrier through shell of capsules in air condition. Functionalization methods for the charcoal-encapsulated $CH_3(SiO)_n$ microcapsules by incorporation of $TiO_3$ as a phtocatalytic function and by incorporation of inorganic pigment as a color function were also investigated. $TiO_2$ coating properties were controllable by adjusting pH, temperature, and the concentration of $TiOSO_4$. In XRD measurement, the crystal form of the coated $TiO_2$ was anatase. For the colorization of the capsules, inorganic pigments were more efficient than organic dyes, and various color was introduced to the capsules using inorganic pigments.