Selective chemical vapor deposition of $\beta$ -SiC on Si substrate using hexamethyldisilane/HCl/$H_{2}$ gas system
(Hexamethyldisilane/HCl/$H_{2}$ gas system을 이용한 Si 기판에서 $\beta$ -SiC의 선택적 화학기상증착)
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- Journal of the Korean Crystal Growth and Crystal Technology
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- v.9 no.1
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- pp.14-19
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- 1999