• Journal of Climate Change Research
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• v.3 no.2
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• pp.117-128
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• 2012

The Government of South Korea has continued its effort to fixate virtuous circle of economic growth and climate change response to cope with international demands and pressure to commitment for greenhouse gas reduction effectively. Nationally, Korean Government has established "Enforcement of the Framework Act on Low carbon, Green Growth"(2010. 4. 13) to implement national mid-term GHG mitigation goal(30% reduction by 2020 compare to BAU), which established the foundation for phased GHG mitigation by setting up the sectoral and industrial goal, adopting GHG and Energy Target Management System. Also, follow-up measures are taken such as planning and control of mid-term and short-term mitigation target by detailed analysis of potential mitigation of sector and industry, building up the infrastructure for periodic and systematic analysis of target management. Likewise, it is required to establish more accurate, reliable and detailed sectoral GHG inventory for successfully establishment and implement the frame act. In comparison to the $CO_2$ emission, Especially fluorinated greenhouse gases (HFCs, PFCs, $SF_6$) are lacking research to build the greenhouse gas inventories to identify emissions sources and collection of the applicable collection activities data. In this study, with the refrigeration and air conditioning sector being used to fluorine refrigerant(HFCs) as the center, greenhouse gas emission estimation methodology for evaluating the feasibility of using this methodology look over and mobile air conditioning, fixed air conditioning, household refrigeration equipment, commercial refrigeration equipment for the greenhouse gas emissions were calculated. First look at in terms of methodology, refrigeration and air conditioning sector GHG emissions in developing country-specific emission factors and activity data of the industrial sector the construction of the DB is not enough, it's 2006 IPCC Guidelines Tier 2a (emission factor approach) rather than the Tier 2b (mass balance approach) deems appropriate, and each detail by process, sectoral activity data more accurate, if DB is built Tier 2a (emission factor approach) can be applied will also be judged. Refrigeration and air conditioning sector in 2009 due to the use of refrigerant greenhouse gas emissions ($CO_2eq.$) assessment results, portable air conditioner 1,974,646 ton to year, fixed-mount air conditioner 1,011,754 ton to year, household refrigeration unit 4,396 ton to year, commercial refrigeration equipment 1,263 ton to year was estimated to total 2,992,037 tons.

• 한국신재생에너지학회:학술대회논문집
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• 2008.05a
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• pp.602-605
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• 2008

$CO_2$ 분리는 크게 연소전 탈탄소화(pre-combustion capture)와 연소후 포획(post-combustion capture)으로 나누어지는데, post-combustion capture는 연료가 연소하면 $N_2$와 $CO_2$가 남게 되고 흡수나, 흡착, 막분리 등을 이용해서 $CO_2$를 분리하는 것이고, Pre-combustion capture(연소전 회수)는 연소 전에 이산화탄소가 발생되지 않도록 하는 기술로써, 부분 산화나 개질 및 수성가스 변위반응 등이 포함되며 생성된 수소와 이산화탄소를 분리하여 수소를 생산하는 기술($CO_2/H_2$ 분리가 핵심)이다. 우리나라는 대부분 연소 후 포획 위주로 많은 연구가 진행되어 왔지만, 최근 고유가 시장이 형성되면서 석탄화력발전 및 복합가스발전(IGCC)에 필요한 연소전 탈탄소화($H_2/CO_2$ 가스로부터 $CO_2$ 회수) 연구에 산업적 관심이 급상승 되고 있다. 특히, Pre-combustion 과정에서는 높은 자체압력(약 2.5 - 5.0MPa)과 비교적 높은 농도의 $CO_2$(약 40%의)가 발생되기 때문에, 연소전 탈탄소화는 가스하이드레이트 형성/분해 원리가 가장 잘 적용될 수 있는 기술이라 할 수 있다. 본 연구에서는 비교적 저압 조건에서도 하이드레이트를 보다 쉽게 형성시키는 촉진제를 이용하여 $CO_2/H_2$ 혼합 가스 중 $CO_2$를 분리하는 실험을 수행하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.257-257
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• 2010

디스플레이 산업의 발달로 화상 영상폰, 디지털 카메라, MP4, PMP, 네비게이션, LCD TV등의 가전 제품의 수요증가에 따라 이에 장착되는 LCD 패널의 생산력 향상과 원가 절감을 위한 검사 기술이 요구되고 있다. LCD 검사를 위한 Probe unit은 미세전기기계시스템(MEMS) 공정을 이용하여 제작된다. LCD 검사용 Probe unit는 LCD 가장자리 부분에 전기적 신호(영상신호, 등 기신호, 색상신호)가 인가되도록 하는 수 십 내지 수 백개의 접속 단자가 고밀도로 배치되는데, 이러한 LCD는 제품에 장착되기 전에 시험신호를 인가하여 화면의 불량여부를 검사하기 위한 점등용 부품으로 50 um 이하의 Pin간 거리를 유지하면서 정확한 Pin Alignment를 요구하는 초정밀 부품이다. 본 연구에서는 반도체용 Si wafer에 마스크 공정 및 slit etching 공정을 적용하여 목표인 30 um pitch의 Probe unit을 개발하기 위해 Deep Si Etching(DRIE) 장비를 이용하여 식각 공정에 따른 특성을 평가하였다. 마스크 공정은 500 um 두께의 양면 연마된 반도체용 Si wafer를 이용하였으며, thick PR을 사용하여 마스킹하여 식각공정을 수행하였다. Si 깊은 식각은 $SF_6$ 가스와 Passivation용으로 $C_4F_8$ 가스를 교대로 사용하여 수직방향으로 깊은 식각이 이루어지는 원리이다. SEM 측정 결과 30 um pitch의 공정 목표에 도달하였으며, 식각공정 결과 식각율 6.2 um/min, profile angle $89.1^{\circ}$로 측정되었다. 또한 상부 에칭공정과 이면 에칭공정에서 폭과 wall의 간격이 동일하였으며, 완전히 관통된 양면식각이 이루어졌음을 확인하였다. 또한 실제 사용되는 probe unit의 조립에 적합한 slit 공정을 위한 에칭특성을 조사하였다.

• Proceedings of the SAREK Conference
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• 2006.06a
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• pp.944-949
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• 2006

An infiltration was realized as an important part of ventilation to change fresh air with contaminated air in a house. In this study, it was measured the infiltration in new apartment buildings according to Seasons, height etc. We measured the infiltration by using tracer gas method and did for 24hours. To quantify the infiltration, Sulfur Hexafluoride($SF_6$) gas was used. The Constant Concentration was conducted during experimental process and the concentration of the gas was measured with a gas monitor. In the results of the measurement, the infiltration were appeared over 0.6 ACH in winter and about 0.2 ACH in summer and autumn. Also the infiltration were measured more highly at high and low stories than middle stories in winter.

• Journal of the Korean Vacuum Society
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• v.20 no.6
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• pp.422-429
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• 2011

Dependence of radical and ion density on electron density and temperature is numerically investigated for $Cl_2$/Ar, $CF_4$, $CF_4/O_2$, $CF_4/H_2$, $C_2F_6$, $C_4F_8$ and $SF_6$ discharges which are widely used for etching process. We derived a governing equation set for radical and ion densities as functions of the electron density and temperature, which are easier to measure relatively, from continuity equations by assuming steady state condition. Used rate coefficients of reactions in numerical calculations are directly produced from collisional cross sections or collected from various papers. If the rate coefficients have different values for a same reaction, calculation results were compared with experimental results. Then, we selected rate coefficients which show better agreement with the experimental results.

• Journal of the Korean Vacuum Society
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• v.19 no.2
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• pp.114-120
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• 2010

Conventional surface texturing in crystalline silicon solar cell have been use wet texturing by Alkali or Acid solution. But conventional wet texturing has the serious issue of wafer breakage by large consumption of wafer in wet solution and can not obtain the reflectance below 10% in multi crystalline silicon. Therefore it is focusing on RIE texturing, one method of dry etching. We developed large scale plasma RIE (Reactive Ion Etching) equipment which can accommodate 144 wafers (125 mm) in tray in order to provide surface texturing on the silicon wafer surface. Reflectance was controllable from 3% to 20% in crystalline silicon depending on the texture shape and height. We have achieved excellent reflectance below 4% on the weighted average (300~1,100 nm) in multi crystalline silicon using plasma texturing with gas mixture ratio such as $SF_6$, $Cl_2$, and $O_2$. The texture shape and height on the silicon wafer surface have an effect on gas chemistry, etching time, RF frequency, and so on. Excellent conversion efficiency of 16.1% is obtained in multi crystalline silicon by RIE process. In order to know the influence of RF frequency with 2 MHz and 13.56 MHz, texturing shape and conversion efficiency are compared and discussed mutually using RIE technology.

• The Transactions of the Korean Institute of Electrical Engineers B
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• v.51 no.6
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• pp.273-284
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• 2002

In this paper, computer simulations of the physical Phenomena occurring in the arc region before and after current zero were carried out to evaluate the dielectric recovery characteristics of two types of double-flow nozzles. A commercial CFD Program "PHOENICS" is used for the simulation and the user-coded subroutines to consider the arcing phenomena were added to this program by the authors. The computed results were verified by the comparison with the test results presented by the research group of BBC. In order to investigate the state of the arc region after current zero, the simulation was carried out with four steps. They are cold gas flow analysis, steady state arc simulation, transient arc simulation before current zero, transient hot gas flow simulation after current zero. The semi-experimental arc radiation model is adapted to consider the radiation energy transport and Prandtl′s mixing length model is employed as the turbulence model. The electric field and the magnetic field were calculated with the same grid structure used for the simulation of the flow field. The streamer criterion was introduced to evaluate the dielectric recovery characteristics after current zero. Compared with the results obtained by assuming the current zero state in the former studies, it has been found that the results obtained by considering the state before current zerowere more accurate.

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.2007_2008
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• 2009

본 논문은 $SF_6$ 가스졀연차단기를 대체할 고체절연차단기(Solid Insulated Switchgear:SIS)의 기계적 신뢰성 평가에 대한 연구 결과이다. 최근 제정된 "25.8kV 가스 및 고체절연 친환경 개폐장치" 한전 구매규격에는 "Epoxy 고체절연물에 대한 기계적 신뢰성(수명)이 25년 이상"임을 보증할 수 있는 신뢰성 데이터를 제출해야 한다는 조항이 포함되어있다. 이에 개발된 고제절연차단기의 Epoxy 고체절연물에 대한 기계적 신뢰성(수명)이 25년 이상임을 보증할 수 있는 신뢰성 시험과 분석 기법에 대한 연구가 진행되었다.

• Proceedings of the KIEE Conference
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• 2015.07a
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• pp.447-448
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• 2015

In order to looking for method of detecting inner fault of a 154kV GIT(Gas Insulated Transformer), it was considered that diagnosis partial discharge(PD) in UHF band and that analyze the ingredients of SF6 insulating gas. UHF PD diagnosis that is optimized to GIS was considered unsuitable through checking of inner part of a transformers which PD is detected excessively. The method analyzing the content of six kinds of gas(SOF2, SO2F2, etc)was decided through analysis of chemical degradation and combination process and discharge experiment. With the result applying this method to analyze the content of insulated gas of eighty five Gas Insulated Transformers.

• Korean Institute of Interior Design Journal
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• v.18 no.3
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• pp.102-113
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• 2009

The SARS virus began to appear and spread in North America and Southeast Asia in the early 2000' s, infecting and harming many people. In the process of examining the causes for the virus, studies on the airborne SARS virus and the way it spread were carried out mainly in the medical field. In the field of architecture, studies were done on the diffusion of air pollutants in buildings using gases such as $CO_2$, $N_2O$, or $SF_6$, but research on virus diffusion was limited. There were also explanations of only the diffusion process without accurate information and discussion on virus characteristics. The aim of this study is to analyze the physical characteristics of airborne virus, consider the possibility of using coupled analysis model and tracer gas for analyzing virus diffusion in building space and, based on reports of how the infection spread in a hospital where SARS patients were discovered, analyze infection risk using tracer gas density and also diffusion patterns according to the location, shape, and volume of supply diffusers and exhaust grilles. This paper can provide standards and logical principles for evaluating various alternatives for making decisions on vertical or horizontal ward placement, air supply and exhaust installation and air volumes in medium or high story medical facilities.