• The Transactions of the Korean Institute of Electrical Engineers C
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• v.54 no.7
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• pp.308-314
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• 2005

The 2 GHz film bulk acoustic wave resonator(FBAR), one of the most necessary device of the next generation mobile communication system, consisted of solidly mounted resonator(SMR) structure using Brags reflector, was researched in this paper The FBAR applied SiO$_{2}$ and W had large difference of the acoustic impedance to reflector Al to electrode and ZnO to piezoelectric layer. Specially, the FBAR applied the two-step deposition method to improve the c-axis orientation and increase reproducibility of the fabrication device had good performance. The electrical properties of plasma such as impedance, resistance, reactance, $V_{pp},\;I{pp}$, VSWR and phase difference of voltage and current, was analyzed and measured by RF sensor with the variable experiment process factors such as gas ratio, RF power and base vacuum level about concerning the thickness, c-axis orientation, adhesion and roughness. The FBAR device about the optimum condition resulted reflection loss(S$_{11}$) of -17 dB, resonance frequency of 1.93 GHz, electric-mechanical coefficient(k$_{eff}$) of 2.38 $\%$ and Qualify factor of 580. It was seen better qualify than the common dielectric filter at present and expected on business to the filter device of 2 GHz bandwidth with the MMIC technology.

• Journal of Sensor Science and Technology
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• v.14 no.3
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• pp.206-210
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• 2005

The SOI structure with buried alumina was fabricated by ALD followed by bonding and etchback process. The interface of alumina and silicon was analyzed by CV measurements and cross section was investigated by SEM analysis. The density of interface state of alumina and silicon was 2.5E11/$cm^{2}$-eV after high temperature annealing for wafer bonding. It was confirmed that the surface silicon layer was completely isolated from substrate by cross section SEM and AES depth profile. The device on this alumina SOI structure would have better thermal properties than that on conventional SOI due to higher thermal conductivity of alumina than that of silicon dioxide.

• Journal of Electrochemical Science and Technology
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• v.9 no.1
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• pp.28-36
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• 2018

Metal-organic frameworks have recently been considered very promising modifiers in electrochemical analysis due to their unique characteristics among which tunable pore sizes, crystalline ordered structures, large surface areas and chemical tenability are worth noting. In the present research, $Cu(btec)_{0.5}DMF$ was electrodeposited on the surface of glassy carbon electrode at room temperature under cathodic potential and was initially used as the active materials for the detection of $H_2O_2$. The cyclic voltammogram of $Cu(btec)_{0.5}DMF$ modified GC electrode shows distinct redox peaks potentials at +0.002 and +0.212 V in 0.1 M phosphate buffer solution (pH 6.5) corresponding to $Cu^{(II)}/Cu^{(I)}$ in $Cu(btec)_{0.5}DMF$. Acting as the electrode materials of a non-enzymatic $H_2O_2$ biosensor, the $Cu(btec)_{0.5}DMF$ brings about a promising electrocatalytic performance. The high electrocatalytic activity of the $Cu(btec)_{0.5}DMF$ modified GC electrode is demonstrated by the amperometric response towards $H_2O_2$ reduction with a wide linear range from $5{\mu}M$ to $8000{\mu}M$, a low detection limit of $0.865{\mu}M$, good stability and high selectivity at an applied potential of -0.2 V, which was higher than some $H_2O_2$ biosensors.

• Journal of Aerospace System Engineering
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• v.13 no.2
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• pp.43-50
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• 2019

Satellite and aircraft components are greatly affected by the possibility for missions and safety due to temperature effects. In the field of fuel cells, research is actively carried out for UAV. For the efficiency and stability of the fuel cells, the temperature for operations must be confirmed. In this paper, a smart paint was fabricated with $BaTiO_3$ and $SrTiO_3$ ceramics in order to take advantage of the rapid characteristics of the PTC thermistor, which is the resistance changes abruptly above the Curie point. A coating agent was prepared to prevent the paint from peeling off the samples and the coated models were checked for resistance changes. Moreover, the resistance change of the $BaTiO_3$ and $SrTiO_3$ with temperature conditions was measured before and after coating.

• Bulletin of the Korean Chemical Society
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• v.27 no.9
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• pp.1439-1444
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• 2006

A $Cu^{2+}$ ion-selective membrane microelectrode has been fabricated from poly vinyl chloride (PVC) matrix membrane containing a new symmetrical hexadentate Schiff,s base 2-{1-(E)-2-((Z)-2-{(E)-2-[(Z)-1-(2-hydroxyphenyl)ethylidene]hydrazono}-1-methylpropylidene)hydrazono]ethyl}phenol (HDNOS) as a neutral carrier, Potassium tetrakis(4-chlorophenyl) borate (KTpClPB) as an anionic excluder and o-nitrophenyloctyl ether (NPOE) as a plasticizing solvent mediator. The microelectrode displays linear potential response in the concentration range of $1.0\;{\times}\;10^{-5}-1.0\;{\times}\;10^{-11}$ M of $Cu^{2+}$. The microelectrode exhibits a nice Nernstian slope of 25.9 ${\pm}$ 0.3 mV $decade^{-1}$ in the pH range of 3.1-8.1. The sensor has a relatively short response time in whole concentration ranges ($\sim$5 s). The detection limit of proposed sensor is $5.0\;{\times}\;10^{-12}$ M (320 pg/L), and it can be used over a period of eight weeks. The practical utility of the sensor has been demonstrated by using it as an indicator electrode in the potentiometric titration of $Cu^{2+}$ with EDTA. The proposed membrane electrode was used for the direct determining of $Cu^{2+}$ content in black and red pepper, and in waste water samples.

• Journal of the Korean Institute of Gas
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• v.5 no.1
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• pp.7-14
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• 2001

In this work, the chemical composition of the exhaust gas from domestic gas boiler has been analysed in the point of thermodynamics and CO sensor has been characterized. We proposed that the combustion condition can be estimated by the exhaust gas composition, i.e., the excess air ratio and combustion temperature can be calculated simply by the measurement of the $O_{2}$ fraction and $H_{2}/CO$ in the exhaust gas. By analyse the on site situation domestic boiler, the excess air ratio is about $55\~110\%$. Therefore, the CO may be produced in domestic gas boiler by luminous(yellow) flames rapidly lose heat by radiation, turbulent flames may be partially quenched by the action of steep velocity gradients, and flames burning very close to a cold wall may be partial1y quenched by heat conductivity to the wall. The output voltage of CO sensor is lineally depend on the CO and $H_{2}$concentration. And the exhaust CO from boiler can be reduced by closed loop control with CO sensor

• Korean Journal of Optics and Photonics
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• v.16 no.4
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• pp.354-360
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• 2005

A high performance LWIR(long wavelength infra red) zoom thermal imaging sensor using $480{\times}6$ HgCdTe(MCT) linear detector has been developed by ADD Korea. The optical system consists of zoom telescope having large objective about 190 mm diameter and optically well corrected scanning system. The zoom ratio of the telescope is 3: 1 and its magnification change is performed by moving two lens groups. And also these moving groups are used for athermalization of the system. It is certain that the zoom sensor can be used in wide operating temperature range without any degradation of the system performance. Especially, the sensor image can be displayed with the HDTV(high definition television) format of which aspect ratio is 16:9. In case of HDTV format, the scanning system is able to display 620,000 pixels. This function can make wider horizontal field of view without any loss of performance than the normal TV format image. The MRTD(minimum resolvable temperature difference) of the LWIR thermal imaging sensor shows good results below 0.04 K at spatial frequency 2 cycles/mrad and 0.23 K at spatial frequency 8 cycles/mrad at the narrow field of view.

• Journal of Sensor Science and Technology
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• v.4 no.3
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• pp.80-88
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• 1995

This paper presents the fabrication of a metal-insulator-metal(MIM) antifuse structure consisting of insulators sandwiched between top electrode, Al, and bottom electrode, TiW and additionally studies on antifuse properties depending on the condition of insulator. The intermetallic insulators, prepared by means of sputter, comprised of silicon oxide and tantalum oxide. In such an antifuse structure, silicon oxide layer is utilized to decrease the leakage current and tantalum oxide layer, of which the dielectric strength is lower than that of silicon oxide, is also utilized to lower the breakdown voltage near 10V. Finally sufficient low leakage current, below 1nA, and low programming voltage, about 9V, could be obtained in antifuse device comprising $Al/Ta_{2}O_{5}(10nm)/SiO_{2}(10nm)/TiW$ structure and OFF resistance of 3$3.65M{\Omega}$ and ON resistance of $7.26{\Omega}$ could be also obtained. This $Ta_{2}O_{5}/SiO_{2}$ based antifuse structures will be promising for highly reliable programmable device.

• Journal of the Korea Organic Resources Recycling Association
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• v.32 no.1
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• pp.39-47
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• 2024

In this study, LiDAR-detective black material is synthesized by recycling silicon sludge (SS) that is generated from semiconductor manufacturing process, and its recognition is confirmed using two types of LiDAR sensors (MEMS and Rotating LiDAR). In detail, metal impurities on the surface of SS is removed, followed by coating of titanium dioxide (TiO₂) and subsequent chemical reduction to obtain SS-derived black TiO₂ (SS/bTiO₂) material. As-prepared SS/bTiO₂ is mixed with transparent paint to prepare hydrophilic black paints and applied to a glass substrate using a spray gun. SS/bTiO₂-based paint shows similar blackness (L^*=15.7) compared to commercial carbon black-based paint, and remarkable NIR reflectance (26.5R%, 905nm). Furthermore, MEMS and Rotating LiDAR have successfully detected the SS/bTiO₂-based paint. This is attributed to the occurrence of high reflection of light at the interface between the black TiO₂ and the silicon sludge according to the Fresnel's reflection principle. Hence, the new application field to effectively recycle silicon sludge generated in the semiconductor manufacturing process has been presented.

• Proceedings of the KIEE Conference
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• 1995.07c
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• pp.1162-1164
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• 1995

In this paper, $TiO_2$-xmol%$V_2O_5$, x=0.0, 1.0, 2.0, 3.0 specimens are fabricated by Sol-Gel method. For the improvement of humidity sensitive characteristics for specimens, their microstructures are analysed and the optimum processing condition is established. Grain size increases with substitution rate of $V^{5+}$, on $Ti^{4+}$ site. Their humidity sensitive characteristics is good at 1mol% of $V_2O_5$ rate and heat-treated at $700^{\circ}C$. The capacitance of specimens decreases with frequency.