• Title/Summary/Keyword: $O_2$ Sensor

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Improvement of the carrier transport property and interfacial behavior in InGaAs quantum well Metal-Oxide-Semiconductor Field-Effect-Transistors with sulfur passivation (황화 암모늄을 이용한 Al2O3/HfO2 다층 게이트 절연막 트랜지스터 전기적 및 계면적 특성 향상 연구)

  • Kim, Jun-Gyu;Kim, Dae-Hyun
    • Journal of Sensor Science and Technology
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    • v.29 no.4
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    • pp.266-269
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    • 2020
  • In this study, we investigated the effect of a sulfur passivation (S-passivation) process step on the electrical properties of surface-channel In0.7Ga0.3As quantum-well (QW) metal-oxide-semiconductor field-effect transistors (MOSFETs) with S/D regrowth contacts. We fabricated long-channel In0.7Ga0.3As QW MOSFETs with and without (NH4)2S treatment and then deposited 1/4 nm of Al2O3/HfO2 through atomic layer deposition. The devices with S-passivation exhibited lower values of subthreshold swing (74 mV/decade) and drain-induced barrier lowering (19 mV/V) than the devices without S-passivation. A conductance method was applied, and a low value of interface trap density Dit (2.83×1012 cm-2eV-1) was obtained for the devices with S-passivation. Based on these results, interface traps between InGaAs and high-κ are other defect sources that need to be considered in future studies to improve III-V microsensor sensing platforms.

Fabrication and characteristics of micro-machined thermoelectric flow sensor (실리콘 미세 가공을 이용한 열전형 미소유량센서 제작 및 특성)

  • Lee, Young-Hwa;Roh, Sung-Cheoul;Na, Pil-Sun;Kim, Kook-Jin;Lee, Kwang-Chul;Choi, Yong-Moon;Park, Se-Il;Ihm, Young-Eon
    • Journal of Sensor Science and Technology
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    • v.14 no.1
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    • pp.22-27
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    • 2005
  • A thermoelectric flow sensor for small quantity of gas flow rate was fabricated using silicon wafer semiconductor process and bulk micromachining technology. Evanohm R alloy heater and chromel-constantan thermocouples were used as a generation heat unit and sensing parts, respectively. The heater and thermocouples are thermally isolated on the $Si_{3}N_{4}/SiO_{2}/Si_{3}N_{4}$ laminated membrane. The characteristics of this sensor were observed in the flow rate range from 0.2 slm to 1.0 slm and the heater power from 0.72 mW to 5.63 mW. The results showed that the sensitivities $(({\partial}({\Delta}V)/{\partial}(\dot{q}));{\;}{\Delta}V$ : voltage difference, $\dot{q}$ : flow rate) were increased in accordance with heater power rise and decreasing of flow rate.

Effects of Substrate Temperature on Properties of Sb-doped SnO2 Thin Film

  • Do Kyung, Lee;Young-Soo, Sohn
    • Journal of Sensor Science and Technology
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    • v.31 no.6
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    • pp.371-375
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    • 2022
  • Antimony-doped tin oxide (ATO) thin films, one type of transparent conductive oxide (TCO) films, were prepared on a SiO2-coated glass substrate with different substrate temperatures by a radio-frequency magnetron sputtering system. Structural, optical, and electrical characteristics of the deposited ATO films were analyzed using X-ray diffraction, scanning electron microscopy, alpha-step, ultraviolet-visible spectrometer, and Hall effect measurement. The substrate temperature during deposition did not affect the basic crystal structure of the films but changed the grain size and film thickness. The optical transmittance of the ATO films deposited at different substrate temperatures was over 70%. The lowest sheet resistance and resistivity were 8.43 × 102 Ω/sq, and 0.3991 × 10-2 Ω·cm, respectively, and the highest carrier concentration and mobility were 2.36 × 1021 cm-3 and 6.627 × 10-2 cm2V-1s-1, respectively, at a substrate temperature of 400 ℃.

One-pot 공정으로 합성된 귀금속 나노입자에 의한 SnO2 나노섬유 가스센서의 감응 특성 향상

  • Byeon, Jun-Hyeok;Choe, Seon-U;Seon, Geon-Ju;Akash, Katoch;Kim, Sang-Seop
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.371.2-371.2
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    • 2014
  • 가스 센서분야에서 특정 가스종에 대한 선택성과 감응도 향상을 위해 금속 촉매 등을 센서 물질 표면이나 내부 등에 형성시키는 방안이 많이 연구되고 있다. 1차원 구조 반도성 물질인 나노섬유 내에 금속 촉매를 형성시켜 특정 가스에 대한 선택성과 감응도를 향상시키는 연구가 보고된 바 있다. 선행연구에 의하면 Au와 Pt입자가 형성된 나노섬유의 경우, 각각 CO와 toluene가스에 대하여 선택적인 감응을 나타내는 것으로 확인되었다. 본 연구에서는 전기방사법과 광환원법을 동시에 이용하여 Au와 Pt 입자가 포함된 $SnO_2$ 나노섬유를 합성하고, 이들 나노섬유의 가스감응 특성을 연구하였다.

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Amperometric Detection of Some Catechol Derivatives and o-aminophenol Derivative with Laccase Immobilized Electrode: Effect of Substrate Structure

  • Quan De;Shin Woonsup
    • Journal of the Korean Electrochemical Society
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    • v.7 no.2
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    • pp.83-88
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    • 2004
  • [ $DeniLite^{TM}$ ] laccase immobilized Pt electrode was used for amperometric detection of some catechol derivatives and o-aminophenol (OAP) derivative by means of substrate recycling. In case of catechol derivatives, the obtained sensitivities are 85, 79 and $57 nA/{\mu}M$ with linear ranges of $0.6\~30,\;0.6\~30\;and\; 1\~25 {\mu}M$ and detection limits (S/N=3) of 0.2, 0.2 and $0.3{\mu}M$ for 3,4-dihydroxycinnaminic acid (3,4-DHCA), 3,4-dihydroxybenzoic acid (3,4-DHBA) and 3,4-dihydroxyphenylacetic acid (3,4-DHPAA), respectively. In case of OAP derivative, the obtained sensitivity is $237 nA/{\mu}M$ with linear range of $0.2\~15{\mu}M$ and detection limit of 70 nM for 2-amino-4-chlorophenol (2-A-4-CP). The response time $(t_{90\%})$ is about 2 seconds for each substrate and the long-term stability is around 40-50days for catechol derivatives and 30 days for 2-A-4-CP with retaining $80\%$ of initial activity. The optimal pHs of the sensor for these substrates are in the range of 4.5-5.0, which indicates that stability of the enzymatically oxidized product plays a very important role in substrate recycling. The different sensitivity of the sensor for each substrate can be explained by the electronic effect of the sugstituent on the enzymatically oxidized form.

Rectifying and Nitrogen Monoxide Gas Sensing Properties of a Spin-Coated ZnO/CuO Heterojunction (스핀코팅법으로 제작한 산화아연/산화구리 이종접합의 정류 및 일산화질소 가스 감지 특성)

  • Hwang, Hyeonjeong;Kim, Hyojin
    • Korean Journal of Materials Research
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    • v.26 no.2
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    • pp.84-89
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    • 2016
  • We present the rectifying and nitrogen monoxide (NO) gas sensing properties of an oxide semiconductor heterostructure composed of n-type zinc oxide (ZnO) and p-type copper oxide thin layers. A CuO thin layer was first formed on an indium-tin-oxide-coated glass substrate by sol-gel spin coating method using copper acetate monohydrate and diethanolamine as precursors; then, to form a p-n oxide heterostructure, a ZnO thin layer was spin-coated on the CuO layer using copper zinc dihydrate and diethanolamine. The crystalline structures and microstructures of the heterojunction materials were examined using X-ray diffraction and scanning electron microscopy. The observed current-voltage characteristics of the p-n oxide heterostructure showed a non-linear diode-like rectifying behavior at various temperatures ranging from room temperature to $200^{\circ}C$. When the spin-coated ZnO/CuO heterojunction was exposed to the acceptor gas NO in dry air, a significant increase in the forward diode current of the p-n junction was observed. It was found that the NO gas response of the ZnO/CuO heterostructure exhibited a maximum value at an operating temperature as low as $100^{\circ}C$ and increased gradually with increasing of the NO gas concentration up to 30 ppm. The experimental results indicate that the spin-coated ZnO/CuO heterojunction structure has significant potential applications for gas sensors and other oxide electronics.

Realization of Triple Point of Ne, $O_2$, Ar, Hg and $H_2O$ for International Comparison of Capsule-type Platinum Resistance Thermometer (캡슐형 백금저항온도계 국제비교를 위한 네온, 산소, 아르곤, 수은 및 물의 삼중점 실현)

  • Kang, Kee-Hoon;Kim, Yong-Gyoo;Gam, Kee-Sool
    • Journal of Sensor Science and Technology
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    • v.9 no.3
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    • pp.153-162
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    • 2000
  • Triple points of high purity materials have been used to calibrate primarily the capsule-type platinum resistance thermometer (PRT) in the temperature range of the triple point of equilibrium hydrogen (13.8033 K) and water (273.16 K). In this work, triple points of Ne, $O_2$, Ar, Hg and $H_2O$ except for the triple point of equilibrium hydrogen were realized to establish the International Temperature Scale of 1990 (ITS-90). At each fixed point, two capsule-type PRTs, which were selected for the international comparison, were tested two times. The combined uncertainties of the realization of each triple point were calculated considering the type A and type B evaluation. In Korea Research Institute of Standards and Science, the combined standard uncertainties of the defining triple Points by the ITS-90 were estimated to about 0.18 mK for Ne, 0.14 mK for $O_2$, 0.14 mK for Ar, 0.24 mK for Hg and 0.11 mK for $H_2O$, respectively.

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Improvement of Carbon Dioxide Reduction Efficiency of Titanium Dioxide Photocatalyst Using 1-propanol (1-propanol 첨가에 따른 이산화타이타늄(TiO2) 광 촉매의 비표면적 향상 및 이산화탄소 환원 효율 향상)

  • Ha, Yuntae;Kwon, JinBeom;An, Heekyung;Jung, Daewoong
    • Journal of Sensor Science and Technology
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    • v.31 no.5
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    • pp.343-347
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    • 2022
  • Recently, the problem of global warming caused by greenhouse gases is getting serious due to the development of industry and the increase in transportation means. Accordingly, the need for a technology to reduce carbon dioxide, which accounts for most of the greenhouse gas, is increasing. Among them, a catalyst for converting carbon dioxide into fuel is being actively studied. Catalysts for reducing carbon dioxide are classified into thermal catalysts and photocatalysts. In particular, the photocatalyst has the advantage that carbon dioxide can be reduced only by irradiating ultraviolet rays at room temperature without high temperature or additional gas. TiO2 is widely used as a photocatalyst because it is non-toxic and has high stability, but has a disadvantage of low carbon dioxide reduction efficiency. To increase the reduction efficiency, 1-propanol was used in the synthesis process. This prevents agglomeration of the catalyst and increases the specific surface area and pores of TiO2, thereby increasing the surface area in contact with carbon dioxide. As a result of measuring the CO2 reduction efficiency, it was confirmed that the efficiency of TiO2 with 1-propanol and TiO2 without 1-propanol was 19% and 12.3%, respectively, and the former showed a 1.5 times improved efficiency.

The Sensor Kinase GacS Negatively Regulates Flagellar Formation and Motility in a Biocontrol Bacterium, Pseudomonas chlororaphis O6

  • Kim, Ji Soo;Kim, Yong Hwan;Anderson, Anne J.;Kim, Young Cheol
    • The Plant Pathology Journal
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    • v.30 no.2
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    • pp.215-219
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    • 2014
  • The GacS/GacA two component system regulates various traits related to the biocontrol potential of plant-associated pseudomonads. The role of the sensor kinase, GacS, differs between strains in regulation of motility. In this study, we determined how a gacS mutation changed cell morphology and motility in Pseudomonas chlororaphis O6. The gacS mutant cells were elongated in stationary-phase compared to the wild type and the complemented gacS mutant, but cells did not differ in length in logarithmic phase. The gacS mutant had a two-fold increase in the number of flagella compared with the wild type strain; flagella number was restored to that of the wild type in the complemented gacS mutant. The more highly flagellated gacS mutant cells had greater swimming motilities than that of the wild type strain. Enhanced flagella formation in the gacS mutant correlated with increased expression of three genes, fleQ, fliQ and flhF, involved in flagellar formation. Expression of these genes in the complemented gacS mutant was similar to that of the wild type. These findings show that this root-colonizing pseudomonad adjusts flagella formation and cell morphology in stationary-phase using GacS as a major regulator.

Evaluation of image acquisition using synchrotron radiation in CMOS sensor. (Synchrotron Radiation을 이용한 CMOS sensor image 획득평가)

  • Kim, D.H.;Park, J.K.;Choi, J.Y.;Chang, G.W.;Youn, G.J.;Moon, C.W.;Nam, S.H.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.11a
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    • pp.396-399
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    • 2003
  • In this paper, the purpose is to develop imaging technique of synchrotron radiation using CMOS image sensor. The detector using hybrid method to be research in this lab was used, in order to increase image signal. We made experiments with 1B2 Whitebeam/microprobe beamline in PAL (Pohang Accelerator Laboratory). Phosphor materials such as ZnS:(Ag,Li), ZnS:(Cu,Al), $Y_2O_2S:Eu$ were produced by spin coating on glass. Synchrotron radiation images were acquired and evaluated from monochromatic light from monochromoator in PAL 1B2line. From obtained object and phantom, MTF was 0.15 in ZnS:(Ag,Li) phosphor, and 0.178 in ZnS:( Cu,Al) at 151p/mm. MTFs were unsystematic because thickness of phosphor and uniformity of surface were not optimized. It's expected to improve MTF and the qualify of images as uniformity's optimized.

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