• 제목/요약/키워드: $Al_2O_3$ coating

Search Result 448, Processing Time 0.025 seconds

Study of Deposition Mechanism of Al2O3 Films According to Al2O3 Particle Size via Aerosol Deposition Process (에어로졸 증착 공정을 통해 제작한 Al2O3 코팅층의 Al2O3 입자 크기에 따른 성막 메커니즘 연구)

  • Kim, Ik-Soo;Cho, Myung-Yeon;Koo, Sang-Mo;Lee, Dong-Won;Oh, Jong-Min
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.33 no.3
    • /
    • pp.219-224
    • /
    • 2020
  • Al2O3 powders with particle sizes of 0.35 ㎛, 0.5 ㎛, 1.5 ㎛, and 2.5 ㎛ are deposited onto glass and Cu substrates using the aerosol deposition (AD) process. The deposition characteristics of Al2O3 films using those four types of Al2O3 powders are investigated to determine the influence of the particle size on the films. To observe detailed micro-structures of the films, the cross-section and surface morphology are observed. Then, the crystalline size and internal strain are calculated from X-ray diffraction peaks in order to confirm the hammering effect as well as the micro-strain during the AD deposition. From the above results, deposition mechanisms related to the particle size are studied. The results of this study indicate the optimal particle size and formation mechanisms for dense Al2O3 film with a smooth surface roughness as well as for a porous Al2O3 film with a rough surface roughness.

Fabrication and Characterization of Porous TCP coated Al2O3 Scaffold by Polymeric Sponge Method

  • Sarkar, Swapan Kumar;Kim, Young-Hee;Kim, Min-Sung;Min, Young-Ki;Yang, Hun-Mo;Song, Ho-Yeon;Lee, Byong-Taek
    • Journal of the Korean Ceramic Society
    • /
    • v.45 no.10
    • /
    • pp.579-583
    • /
    • 2008
  • A porous $Al_2O_3$, scaffold coated with tricalcium phosphate(TCP) was fabricated by replica method using polyurethane(PU) foam as a fugitive material. Successive coatings of $Al_2O_3$ and hydroxyapatite(HAp) were applied via dip coating onto polyurethane foam, which has a slender and well interconnected network. A porous structure was obtained after sequentially burning out the foam and then sintering at $1500^{\circ}C$. The HAp phase was changed to TCP phase at high temperature. The scaffold showed excellent interconnected porosity with pore sizes ranging from $300{\sim}700{\mu}m$ in diameter. The inherent well interconnected structural feature of PU foam remained intact in the fabricated porous scaffold, where the PU foam material was entirely replaced by $Al_2O_3$ and TCP through a consecutive layering process. Thickness of the $Al_2O_3$ base and the TCP coating was about $7{\sim}10{\mu}m$ each. The TCP coating was homogeneously dispersed on the surface of the $Al_2O_3$ scaffold.

ALD-assisted Hybrid Processes for improved Corrosion Resistance of Hard coatings

  • Wan, Zhixin;Kwon, Se-Hun
    • Proceedings of the Korean Institute of Surface Engineering Conference
    • /
    • 2016.11a
    • /
    • pp.105-105
    • /
    • 2016
  • Recently, high power impulse magnetron sputtering (HIPIMS) has attracted considerable attentions due to its high potential for industrial applications. By pulsing the sputtering target with high power density and short duration pulses, a high plasma density and high ionization of the sputtered species can be obtained. HIPIMS has exhibited several merits such as increased coating density, good adhesion, microparticle-free and smooth surface, which make the HIPIMS technique desirable for synthesizing hard coatings. However, hard coatings present intrinsic defects (columnar structures, pinholes, pores, discontinuities) which can affect the corrosion behavior, especially when substrates are active alloys like steel or in a wear-corrosion process. Atomic layer deposition (ALD), a CVD derived method with a broad spectrum of applications, has shown great potential for corrosion protection of high-precision metallic parts or systems. In ALD deposition, the growth proceeds through cyclic repetition of self-limiting surface reactions, which leads to the thin films possess high quality, low defect density, uniformity, low-temperature processing and exquisite thickness control. These merits make ALD an ideal candidate for the fabrication of excellent oxide barrier layer which can block the pinhole and other defects left in the coating structure to improve the corrosion protection of hard coatings. In this work, CrN/Al2O3/CrN multilayered coatings were synthesized by a hybrid process of HIPIMS and ALD techniques, aiming to improve the CrN hard coating properties. The influence of the Al2O3 interlayer addition, the thickness and intercalation position of the Al2O3 layer in the coatings on the microstructure, surface roughness, mechanical properties and corrosion behaviors were investigated. The results indicated that the dense Al2O3 interlayer addition by ALD lead to a significant decrease of the average grain size and surface roughness and greatly improved the mechanical properties and corrosion resistance of the CrN coatings. The thickness increase of the Al2O3 layer and intercalation position change to near the coating surface resulted in improved mechanical properties and corrosion resistance. The mechanism can be explained by that the dense Al2O3 interlayer acted as an excellent barrier for dislocation motion and diffusion of the corrosive substance.

  • PDF

Coating and Characterization of Al2O3-CoO Thin Films by the sol-gel Process (졸-겔법을 이용한 Al2O3-CoO계 박막의 제조와 특성에 관한 연구)

  • Shim, Moonsik;Lim, Yongmu
    • Journal of Korean Ophthalmic Optics Society
    • /
    • v.4 no.2
    • /
    • pp.123-128
    • /
    • 1999
  • This paper reports the preparation and characterization of colored coatings of $Al_2O_3$-CoO. Films of 25mol% CoO doped $Al_2O_3$, have been prepared on soda-lime-silica slide glasses by the sol-gel process from Al-alkoxide and Co-nitrate. The films have been characterized by a photospectroscopy and hardness tester. The color, spectral reflectance and spectral transmittance of the films was expressed in Lab color chart and on spectra plot. Microhardness of the films increased with increasing of the heating temperature. Transmittance and reflectance of the films decreased with increase of the heating temperature and coating times. The coating films showed various light-yellow, deep-yellow, greenish-yellow color as a function of the coating times and heating temperature.

  • PDF

Comparison of plasma resistance between spray coating films and bulk of CaO-Al2O3-SiO2 glasses under CF4/O2/Ar plasma etching (CaO-Al2O3-SiO2 계 벌크 유리와 스프레이 코팅막의 CF4/O2/Ar 플라즈마 식각 시 내식성 비교)

  • Na, Hyein;Park, Jewon;Park, Jae-Hyuk;Kim, Dae-Gun;Choi, Sung-Churl;Kim, Hyeong-Jun
    • Journal of the Korean Crystal Growth and Crystal Technology
    • /
    • v.30 no.2
    • /
    • pp.66-72
    • /
    • 2020
  • The difference of plasma resistance between the CAS glass bulk and coating films were compared. Plasma resistance was confirmed by analyzing the etch rate and the microstructure of the surface when the CAS glass bulk and the glass coating film were etched with CF4/O2/Ar plasma gas. CAS glass coating film was etched up to 25 times faster than the glass bulk. A statistically high correlation between the surface roughness and the etching rate of the coating film was derived, and thus, the high surface roughness of the coating film was determined to cause rapid etching. In addition, cristobalite crystals that has a low Ca content and a high Si content, was foamed on the glass coating film. Therefore, the CAS glass coating film is considered to have low plasma resistance compared to the glass bulk.

Property and formation behavior of TiAlSiWN nanocomposite coating layer by the AIP process (AIP 공정 적용 TiAlSiWN 나노 복합체 코팅층의 형성 거동 및 특성 평가)

  • Lee, Jeong-Han;Park, Hyeon-Guk;Jang, Jun-Ho;Hong, Seong-Gil;O, Ik-Hyeon
    • Proceedings of the Korean Institute of Surface Engineering Conference
    • /
    • 2018.06a
    • /
    • pp.97.2-97.2
    • /
    • 2018
  • This study formed a hard TiAlSiWN coating layer using Ti, Al, Si and W raw powders that were mechanically alloyed and refined. The TiAlSi and TiAlSiW coating targets were fabricated using a single PCAS process in a short time with the optimal sintering conditions. The coating targets were deposited on the WC substrate by forming coating layers using TiAlSiN and TiAlSiWN nitride nano-composite structures with an AIP process. The properties of the nitride nano-composite coating layers were compared according to the addition of W. The microstructure of the nitride nano-composite coating layer was analyzed, focusing on the distribution of the crystalline phases, amorphous phases ($Si_3N_4$), and growth orientation of the columnar crystal depending on the addition of W. The mechanical properties of the coating layers were exhibited a hardness of approximately $3,000kg/mm^2$ and adhesion of about 117.77N in the TiAlSiN. In particular, the TiAlSiWN showed excellent properties with a hardness of more than $4,300kg/mm^2$ and an adhesion of about 181.47N.

  • PDF

Plasma-sprayed Coatings of Aluminium Oxide and Mulite

  • Soh, Dea-Wha;Korobova, N.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2003.11a
    • /
    • pp.336-339
    • /
    • 2003
  • The present report is the investigation of the effects of the HIP treatment on plasma-sprayed ceramic coating of $Al_2O_3$, $Al_2O_3-SiO_2$ on the metal substrate. These effects were characterized by phase identification, Vickers hardness measurement, and tensile test before and after HIPing.

  • PDF

Enhanced $Al_2O_3/Ti$ Interfacial Properties Using $NbC_xC_{1-x}/Y_2O_3$ Interlayers - (1) Sputtering and Thermal Stability ($NbC_xC_{1-x}/Y_2O_3$ 박막코팅을 이용한 $Al_2O_3/Ti$ 계면특성향상 - (1) 스퍼터링 및 열안정성)

  • 문철희
    • Journal of the Korean Ceramic Society
    • /
    • v.34 no.8
    • /
    • pp.908-913
    • /
    • 1997
  • Multilayer NbCxC1-x/Y2O3/Ti were sputter-coated on the alumina substrate, starting with a 0.7 ㎛ thick NbCxC1-x layer grown on substrate, followed by 0.7 ㎛ thick Y2O3 layer and 1 ㎛ thick Ti layer. To find out the optimum conditions for thickness uniformity and adhesion, sputtering works have been done with the variation of sputtering power and Ar pressure. After vacuum annealing at 950℃ and 1000℃, the thermal stability of the NbCxC1-x/Y2O3/Ti coated alumina substrates has been investigated by peel off test. The coating scheme didn't cause any debonded layer after an annealing at 950℃ for 3hrs. However, it was peeled off after annealing at 1000℃ for 3hr. It was found that the thermal stability of Al2O3/NbCxC1-x/Y2O3/Ti coating scheme changed with the NbCxC1-x composition.

  • PDF

Fabrication and Mechanical Property of $Al_2$O$_.3$/Al Composite by Pressureless Infiltration (무가압 침윤법에 의한 $Al_2$O$_.3$/Al 복합재료 제조와 기계적 특성)

  • 이동윤;박상환;이동복
    • Journal of the Korean Ceramic Society
    • /
    • v.35 no.3
    • /
    • pp.303-309
    • /
    • 1998
  • The fabrication of Al2O3/Al composite by pressureless infiltration was investigated by the change of Mg and Si content in Al alloy infiltration process and infiltration atmosphere. The effect of alloying elements infiltration atmosphere and interfacial reactants between Al alloy matrix and Al2O3 particles were in-vestigated in terms of bendingstrength and harness test,. The fabrication of Al2O3/Al composite by the vestigated in terms of bending strength and hardness test. The fabrication of Al2O3/Al composite by the pressureless infiltration was done in nitrogen atmosphere with Mg in Al alloy. It was successfully fabricated at $700^{\circ}C$ according to Mg contents in Al alloy and infiltration condition. Because Mg in the Al alloy and ni-trogen atmosphere of infiltratio condition produced Mg-N compound(Mg3N2) it decreased the wetting an-gle between molten Al alloy and Al2O3 particles by coating on surface of Al2O3 particles. The fracture strength of Al2O3/Al-Mg composite was 800MPa and Al2O3/Al-Si-Mg composite was 400MPa. Si in Al alloy decreased the interfacial strength between Al alloy matrix and Al2O3 particles.

  • PDF

Microstructural Changes of NiCrAlY/ZrO$_2$-Y$_2$O$_3$ Composite Coatings By Oxidation (NiCrAlY/ZrO$_2$-Y$_2$O$_3$ 복합코팅의 산화에 따른 조직관찰)

  • 박기범;박진오;이동복
    • Journal of the Korean institute of surface engineering
    • /
    • v.35 no.2
    • /
    • pp.101-106
    • /
    • 2002
  • The microstructural changes of $NiCrAlY/ZrO_2$-$Y_2$$O_3$ composite coatings that were manufactured by air-plasma-spraying were investigated using XRD and SEM/EDS. The as-sprayed microstructure consisted of (Ni,Cr)-rich regions, ($ZrO_2$-$Y_2$$O_3$)-rich regions, and $Al_2$$O_3$-rich layers that were formed during spraying owing to the oxidation of Al in NiCrAlY. During oxidation between 900 and $1100^{\circ}C$ in air, Cr in the (Ni,Cr)-rich regions diffused toward the $Al_2$$O_3$-rich layers, and oxidized to be dissolved in $A1_2$$O_3$-rich layers. The oxidation of Ni in the (Ni,Cr)-rich regions was less distinct, except at the outer surface of the coating.