Plasmonic lithography is the latest technique to overcome diffraction limit of previous optical lithography. In the plasmonic lithography, the nano gap between nano metal wave guide and photoresist should be in sub-wavelength region. SIL-based plasmonic lithography is the one of the solutions to maintain small air gap. However, the nano gap control is so sensitive that a little disturbance is able to have a large effect on the nano gap control. So, we analyzed the characteristics of disturbance, and then modified the previous controller to suppress the disturbance. We applied two peak filters which were fixed one and adaptively changeable one. We experimentally confirmed the improvement of the nano gap control, which reduced nano gap error by 30 %. The proposed control will improve the quality of lithography pattern.

The Blu-ray Disc Recordable(BD-R) is one of strong candidates for archival application among optical media formats, because of its large capability. However, the well-defined accelerated aging test conditions and evaluation criteria have not yet been fully confirmed for BD-R. In this study, the data stability and degradation aspect of BD-R were analyzed by the random-symbol error rate(R-SER) measurement after the accelerated aging test. And a reasonable test condition of accelerated aging for BD-R and the appropriate evaluation criterion using R-SER measurement were discussed.

Adhesion between carbon nanotube (CNT) arrays is measured and characterized for number of different contact areas. The CNT arrays are directly grown on an electrostatic microactuator, and they make contact with each other during the growth process. The pull-out force is precisely applied by the microactuator while the contact status is identified by measuring electrical resistance between the CNT arrays. We have designed different contact areas of 1000, 6000, and 8500 ${\mu}m^2$ between the CNT arrays, and the corresponding adhesion increases from 0.9 to 3.7 ${\mu}N$ as the contact area increases.

Optical nonlinear property is utilized to the wave generation, generating the beam at intended wavelength, and optical computing systems. The genetic material, which is the DNA with helical structure in nano-scale, is fascinating for optics communities due to artificially controllable sequence that determines the physical and chemical property. Nonlinearity of DNA was investigated by the four wave mixing experiment, which is with two incident beams located at 1550nm and 1650nm. The four output beams including incident beams are emitted from genetic material such as 1461nm and 1763nm by nonlinear characteristic. The 1461nm beam which is generated by four wave mixing phenomena was observed by optical spectrum analyzer.

In this paper, we present a novel approach for tuning the resonant frequency of torsionally driven vertical comb actuators. The tuning unit composed of thermal actuator, scissor mechanism and V-shape shaft enables continuous and reversible resonant frequency tuning. The proposed method is based on the stiffness alteration of the V-shape shaft. It is experimentally verified that the resonant frequency of the torsional microscanner is shifted up to 1.59 kHz from 1.51 kHz showing the maximum tuning ratio of 5.29%.

Optical Archive system consists of cartridge, drive and transfer robot. Transfer robot moves disc in cartridge to drive that reads data of disc. Distance between disc in cartridge and transfer robot very short, about 4mm. When disc projects, there is a danger of collision. Collision can cause breakage of disc and breakdown of system. To prevent collision of disc and transfer robot, projection of disc should be detected. In this paper, we proposed error monitoring method of projecting disc in archive data storage using camera. Proposed algorithm is evaluated by experiments with archive system.