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Resonant Frequency Tuning of Torsional Microscanner using MEMS actuator

MEMS 구동기를 이용한 마이크로 주사거울의 고유주파수 튜닝

  • Lee, Jae-Ik (School of Mechanical Engineering, Yonsei Univ.) ;
  • Park, Sunwoo (School of Mechanical Engineering, Yonsei Univ.) ;
  • Kim, Jongbaeg (School of Mechanical Engineering, Yonsei Univ.)
  • Received : 2014.03.25
  • Accepted : 2014.03.27
  • Published : 2014.03.25
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Abstract

In this paper, we present a novel approach for tuning the resonant frequency of torsionally driven vertical comb actuators. The tuning unit composed of thermal actuator, scissor mechanism and V-shape shaft enables continuous and reversible resonant frequency tuning. The proposed method is based on the stiffness alteration of the V-shape shaft. It is experimentally verified that the resonant frequency of the torsional microscanner is shifted up to 1.59 kHz from 1.51 kHz showing the maximum tuning ratio of 5.29%.

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References

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