Journal of the Korean Society of Manufacturing Technology Engineers (한국생산제조학회지)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Numerical Investigation of Factors affecting Photoresist Stripping Process on the ITO Surface using the Spray Method

노즐 분사 방식의 ITO 표면 포토레지스트 박리과정 요인의 수치해석

  • Kim, Joon Hyun (Mechanical and Automotive Engineering, Seoul National University of Science & Technology) ;
  • Lee, Joon Hyuck (Mechanical and Automotive Engineering, Seoul National University of Science & Technology) ;
  • Kang, Tae Seong (Mechanical and Automotive Engineering, Seoul National University of Science & Technology) ;
  • Joo, Gi-Tae (Graduate School of NID Fusing Technology, Seoul National University of Science & Technology) ;
  • Kim, Young Sung (Graduate School of NID Fusing Technology, Seoul National University of Science & Technology) ;
  • Jeong, Byung Hyun (Eotech, GERI) ;
  • Lee, Dae Won (DS Techopia)
  • Received : 2016.11.23
  • Accepted : 2017.03.13
  • Published : 2017.04.15
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Abstract

This study investigated spraying factors applicable to stripper usage. Cyclodextrine, as environment-friendly material, was included in the stripper composition. An efficient spray technology was applied for the Photoresist strip. For industrial applications, stripping requires a temperature below $50^{\circ}C$, a strip time within 50 s, and chemically stable activation. Spraying factors were organized considering many conditions-orifice diameter, working pressure (inlet speed), spray distance, and spray angle. For commercial practicability, the flow rate was limited to 3 L/min. The nozzle parameters were nozzle orifice diameter of 1.8-2.2 mm, spray distance of 40-60 mm, and injection speed of 0.7-1.2 m/s. Through the thermal spray movement of the fluid, the thermal boundary layer for a chemical reaction just above the ITO-glass surface and momentum region for sufficient agitation (above 4 m/s) was achieved.

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References

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