• Clean Technology
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• v.24 no.3
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• pp.175-182
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• 2018

In this research, we investigated the cleanliness by optimizing the water content of the aqueous stripper in fluidic strip process. The stripping properties of the photoresist with optimized aqueous stripper were compared with the commercial organic stripper. The stripping performance was evaluated by electrical and optical characteristics on the surface of the transparent electrode that compare with stripped the transparent electrode surface and the rare surface before patterning by the photoresist. As a result of the photoresist stripping process of the organic stripper and the aqueous stripper optimized for water content, the aqueous stripper exhibited better electrical and optical characteristics than the organic stripper. In the case of the fluidic strip process with organic stripper, the photoresist dissolves in the stripper solution during stripping which can cause re-adsorption by contamination. Whereas that the aqueous stripper under development seems to decrease the photoresist dissolution in the stripper solution. Because the cyclodextrin contained in the stripper captures organic photoresist into hall of cyclodextrin which stripped through swelling and tearing. The photoresist residue captured by the cyclodextrin can be filtered. After the fluidic stripping process by different chemical stripping mechanism, the cleanliness of the organic stripper and aqueous stripper was compared and analyzed.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.12 no.7
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• pp.3334-3340
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• 2011

In this study, a computer simulation work has been performed for the carbon dioxide removal process using aqueous amine solution in the GTL (Gas To Liquids) process. 30wt% DEA(diethnaol amine) aqueous solution was utilized as a carbon dioxide remvoal agent and an absorber-stripper two-columns configuration was used. Kent-Eisenburg modeling equation built-in amine specicial package was used for the modeling of the carbon dioxide removal process. PRO/II with PROVISION 9.0, a commercial process simulator was used. Through this simulation study, heat and material balance was obtained and packing column diameter and column height were also estimated.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.26 no.2
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• pp.158-165
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• 2017

This study investigated spraying factors applicable to stripper usage. Cyclodextrine, as environment-friendly material, was included in the stripper composition. An efficient spray technology was applied for the Photoresist strip. For industrial applications, stripping requires a temperature below $50^{\circ}C$, a strip time within 50 s, and chemically stable activation. Spraying factors were organized considering many conditions-orifice diameter, working pressure (inlet speed), spray distance, and spray angle. For commercial practicability, the flow rate was limited to 3 L/min. The nozzle parameters were nozzle orifice diameter of 1.8-2.2 mm, spray distance of 40-60 mm, and injection speed of 0.7-1.2 m/s. Through the thermal spray movement of the fluid, the thermal boundary layer for a chemical reaction just above the ITO-glass surface and momentum region for sufficient agitation (above 4 m/s) was achieved.

• Korean Chemical Engineering Research
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• v.49 no.6
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• pp.764-768
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• 2011

The process of $CO_2$ capture using aqueous Monoethanolamine(MEA) has been considered as one of the leading technologies for intermediate-term strategy to reduce the $CO_2$ emission. This MEA process, however, consumes relatively a large amount of energy in the stripper for absorbent regeneration. For this reason, various process alternatives are recently established to reduce the regeneration energy. This paper suggests a flue gas split configuration as one of MEA process alternatives and then simulates this process using commercial simulator. This flue gas splitting has an effect on reducing the temperature of the lower section of absorber as well as decreasing the absorbent flow rate. Compared to the base model, this optimized flue gas split process provides 6.4% reduction of solvent flow rate and 5.8% reduction of absorbent regeneration energy.

• Polymer(Korea)
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• v.28 no.6
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• pp.494-501
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• 2004

A new alkali developable photosensitive poly(amic acid) (PAA-0) with transmittance at 400 nm was synthesized from cyclobutane-1,2,3,4-tetracarboxylic dianhydride, 2-(methacryloyloxy)ethyl-3,5-diamino-benzoate and 1,3-bis(3-aminopropyl)-1,1,3,3-tetramethyl disiloxane in N-methyl-2-pyrrolidinone. Photosensitivity of the PAA-0 was investigated at 365-400 nm in the presence of a photoinitiator using a high pressure mercury lamp. The photo-cured poly(amic acid) was insoluble toward aqueous 2.38 wt% tetramethylammonium hydroxide solution. Negative pattern of the PAA-0 with 25 ${\mu}{\textrm}{m}$ resolution was obtained by developing with 2.38 wt% tetramethylammonium hydroxide solution after exposure of 600 mJ/$\textrm{cm}^2$ in the presence of 2,2-dimethoxy-2-phenyl-acetophenone as a photoinitiator. The patterned poly(amic acid) was converted to polyimide by thermal curing at 25$0^{\circ}C$ for 50 min, which showed chemical resistance against photoresist stripper as well as good transmittance at 400 nm.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.14 no.3
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• pp.1502-1511
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• 2013

In this study, simulation works have been performed for the modeling of $CO_2$ removal process contained in the DME production process through an absorber-stripper system using methanol aqueous solution. Aspen Plus release 7.3 in AspenTech company was utilized as a simulation tool and PC-SAFT modeling equation of state was used as a thermodynamic model. Fitting parameters built-in PC-SAFT model was determined by regressing experimental data, predicted results using PC-SAFT model were compared with experimental data in order to verify the exactness of the thermodynamic model. Optimization works have been performed to reduce the utility consumptions using solvent circulation rate, column operating pressure and feed stage location as manipulated variables.