Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Development of a MEMS Resonant Accelerometer Based on Robust Structural Design

강건 구조설계에 기반한 미소 공진형 가속도계의 개발

  • 박우성 (포항공과대학교 기계공학과) ;
  • 부상필 (울산대학교 기계공학과) ;
  • 박수영 ((주)마이크로인피니티) ;
  • 김도형 ((주)마이크로인피니티) ;
  • 송진우 ((주)마이크로인피니티) ;
  • 전종업 (울산대학교 기계공학과) ;
  • 김준원 (포항공과대학교 기계공학과)
  • Received : 2011.10.17
  • Accepted : 2011.12.20
  • Published : 2012.03.31
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Abstract

This paper describes the design, fabrication and testing of a micromachined resonant accelerometer consisting of a symmetrical pair of proof masses and double-ended tuning fork(DETF) oscillators. Under the external acceleration along the input axis, the proof mass applies forces to the oscillators, which causes a change in their resonant frequency. This frequency change is measured to indicate the applied acceleration. Pivot anchor and leverage mechanisms are adopted in the accelerometer to generate larger force from a proof mass under certain acceleration, which enables increasing its scale factor. Finite element method analyses have been conducted to design the accelerometer and a silicon on insulator(SOI) wafer with a substrate glass wafer was used for fabricating it. The fabricated accelerometer has a scale factor of 188 Hz/g, which is shown to be in agreement with analysis results.

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References

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