Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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A Cantilever Type Contact Force Sensor Array for Blood Pressure Measurement

혈압 측정을 위한 외팔보형 접촉힘 센서 어레이

  • Lee, Byeung-Leul (School of Mechatronics Engineering, Korea University of Technology and Education) ;
  • Jung, Jin-Woo (School of Electrical Engineering and Computer Science, Seoul National Unversity) ;
  • Chun, Kuk-Jin (School of Electrical Engineering and Computer Science, Seoul National Unversity)
  • 이병렬 (한국기술교육대학교 메카트로닉스공학부) ;
  • 정진우 (서울대학교 전기컴퓨터공학부) ;
  • 전국진 (서울대학교 전기컴퓨터공학부)
  • Received : 2011.10.27
  • Accepted : 2012.01.04
  • Published : 2012.03.31
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Abstract

Piezoresistive type contact force sensor array is fabricated by (111) Silicon bulk micromachining for continuous blood pressure monitoring. Length and width of the unit sensor structure is $200{\mu}m$ and $190{\mu}m$, respectively. The gap between sensing elements is only $10{\mu}m$. To achieve wafer level packaging, the sensor structure is capped by PDMS soft cap using wafer molding and bonding process with $10{\mu}m$ alignment precision. The resistance change over contact force was measured to verify the feasibility of the proposed sensor scheme. The maximum measurement range and resolution is 900 mm Hg and 0.57 mm Hg, respectively.

Keywords

References

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