Journal of the Microelectronics and Packaging Society (마이크로전자및패키징학회지)
- Volume 14 Issue 3
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- Pages.57-64
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- 2007
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- 1226-9360(pISSN)
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- 2287-7525(eISSN)
Chip-on-Glass Process Using the Thin Film Heater Fabricated on Si Chip
Si 칩에 형성된 박막히터를 이용한 Chip-on-Glass 공정
- Jung, Boo-Yang (Department of Materials Science and Engineering, Hongik University) ;
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Oh, Tae-Sung
(Department of Materials Science and Engineering, Hongik University)
- Published : 2007.09.30
Abstract
New Chip-on-glass technology to attach an Si chip directly on the glass substrate of LCD panel was studied with local heating method of the Si chip by using thin film heater fabricated on the Si chip. Square-shaped Cu thin film heater with the width of
Si 칩에 박막히터를 형성하고 이에 전류를 인가하여 LCD (liquid crystal display) 패널의 유리기판은 가열하지 않으면서 Si 칩만을 선택적으로 가열함으로써 Si 칩을 LCD 패널의 유리기판에 실장 하는 새로운 COG 공정기술을 연구하였다.