Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2006.05a
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- Pages.467-468
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- 2006
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- 2005-8446(pISSN)
Comparison between $d_{31}\;and\;d_{33}$ actuation characterization of the PZT micro-actuator for RF MEMS switch
RF 스위치 적용을 위한 박막 PZT 엑추에이터의 $d_{31}$ 구동과 $d_{33}$ 구동 특성 비교
- Shin M.J. (KIMM, Nano-Mechanical System Research Center) ;
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Seo Y.H.
(KIMM, Nano-Mechanical System Research Center) ;
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Choi D.S.
(KIMM, Nano-Mechanical System Research Center) ;
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Whang K.H.
(KIMM, Nano-Mechanical System Research Center)
- 신민재 (한국기계연구원, 나노공정장비연구센터) ;
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서영호
(한국기계연구원, 나노공정장비연구센터) ;
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최두선
(한국기계연구원, 나노공정장비연구센터) ;
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황경현
(한국기계연구원, 나노공정장비연구센터)
- Published : 2006.05.01
Abstract
In this work, we present the comparison between