Fabrication of a Resonator using suspended Multi-wall Carbon Nanotubes

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A single-wall carbon nanotube (SWCNT) has been studied as a material of Nano-Eletro-Mechanical-System (NEMS) device together with various nanowires. In order for oscillation of a multi-wall carbon nanotube (MWCNT) or a single-walled carbon nanotube (SWCNT) on plane surface, it needs suspension of a CNT across trench electrodes. So we propose fabrication method of a MWCNT resonator using dielectrophoresis and show successful results of suspeneded MWNT. Thin electrodes with large gaps could not suspend small diameter MWNT but thicker electrodes could. Thin MWNT could be suspended only when the electrode gap was reduced.