• Title/Summary/Keyword: PZT actuate

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Comparison between $d_{31}\;and\;d_{33}$ actuation characterization of the PZT micro-actuator for RF MEMS switch (RF 스위치 적용을 위한 박막 PZT 엑추에이터의 $d_{31}$ 구동과 $d_{33}$ 구동 특성 비교)

  • Shin M.J.;Seo Y.H.;Choi D.S.;Whang K.H.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2006.05a
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    • pp.467-468
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    • 2006
  • In this work, we present the comparison between $d_{31}\;and\;d_{33}$ mode characterization using the PZT micro-actuator for large displacement. The PZT micro-actuator consisted of Si, PZT, and Pt layer on SOI wafer. The electrode shapes were laminated and interdigitated for $d_{31}\;and\;d_{33}$ mode, respectively. In order to characterize the actuation mode, we measured the displacement using laser interferometer. The maximum displacement of d31 mode was $12.2{\mu}m$ at 10V, the actuation characterization of d31 was better than that of d33 mode. We estimated that displacement of d33 mode would be larger than that of d31 above 30V.

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Proposal of Equation on Changable Performance Stroke (Δ h) and Radius of Curvature (ρ) According to the CERP Ply Orientation in PZTCA (CFRP 배향각에 따라 변화하는 PZTCA의 작동변위(Δ h)와 곡률반경(ρ)의 관계식 제안)

  • Hong Jung-Hwa;Yoon Kwang-Joon;Kim Cheol-Woong
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.30 no.3 s.246
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    • pp.318-327
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    • 2006
  • Due to the diversified use of recent Piezoelectric Zirconate Titanate Composite Actuate. (PZTCA), various PZTCAs with the different ply orientation of the fiber layer have been applied. For this reason, the applicable bending moment equation is necessary even though the fiber layer ply orientation and the laminate configuration are changed. The aim of this research is to evaluate the relationship between the total effective moment $(M^E)$ and Bernoulli-Euler bending moment (M) when the ply orientations of UD CFRP are changed. In conclusions, firstly, as the performance test results by the CFRP ply orientation, the performance of [0] and [90] were stable. However, while the performance of [+45] was suddenly decreased after 5 hours. Secondly, the change of $(M^E)$ by the CFRP ply orientation was evaluated. As the CFRP ply orientation was increased from [0] to [+60], the $(M^E)$ were gradually decreased. However, they became a little bit increased from [+60] to [90]. Finally, after the change of M by the CFRP ply orientation was evaluated, it was found that $M^E=2.2M$ was valid for just [0] and that there was a relationship between $M^E$ and M according to the ply orientation.