Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2006.05a
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- Pages.144-145
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- 2006
Oxygen gas dependence of the ITO thin film
ITO 박막의 산소 가스 의존성
- Kim, Kyung-Hwan (Electrical and Information Eng. Kyungwon Univ.) ;
- Keum, Min-Jong (Electrical and Information Eng. Kyungwon Univ.)
- Published : 2006.05.19
Abstract
In this study, the Al doped ZnO thin films were prepared by the facing targets sputtering(FTS) apparatus. The electrical characteristics, transmittance of ITO thin films were investigated as a function of varying input current and oxygen gas flow rate. As a result, the ITO thin film was prepared with a resistivity