Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2004.07a
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- Pages.165-168
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- 2004
Transparent Conductive Oxide(TCO) thin film(AZO) prepared for display application
디스플레이용 투명전도막(AZO)의 제작
Abstract
In this study, AZO(ZnO:Al) thin film were prepared by FTS(Facing Target Sputtering) system. The electrical, optical and crystallographic properties of AZO thin film with