Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2004.07a
- /
- Pages.169-172
- /
- 2004
Influence of the Optimized Process in Rapid Thermal Processing on Solar Cells
RTP Furnace에서 공정과정이 태양전지에 미치는 영향
- Lee, Ji-Youn (Photovoltaic R&D Center, Sungjin Semitech Co.) ;
- Lee, Soo-Hong (Strategic Research Energy Center, Dept. of Electronics Engineering, Sejong University)
- Published : 2004.07.05
Abstract
The effect of the process parameters on the stable lifetime in rapid thermal firing(RTF) was investigated in order to optimize the process for the Cz-silicon. The process temperature was varied between