Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2004.07c
- /
- Pages.1817-1819
- /
- 2004
Time variation characteristic of pulse-modulated high frequency plasma
펄스 모듈레이션된 고주파 플라즈마의 시변 특성
- Lee, S.H. (Pusan National University) ;
- Lee, D.S. (Pusan National University) ;
- Jo, Y.S. (Pusan National University) ;
-
Kim, D.H.
(Pusan National University)
;
-
Lee, H.J.
(Pusan National University)
;
-
Park, C.H.
(Pusan National University)
- 이선홍 (부산대학교 전기공학과) ;
- 이대성 (부산대학교 전기공학과) ;
- 조용성 (부산대학교 전기공학과) ;
-
김동현
(부산대학교 전기공학과)
;
-
이호준
(부산대학교 전기공학과)
;
-
박정후
(부산대학교 전기공학과)
- Published : 2004.07.14
Abstract
From the plasma application point of view, electron temperature and density are one of the most important parameters for plasma process. But it is only available to control plasma by adjusting external factors like gas pressure and input power. In this paper, pulse-modulated plasma is generated by modulating 13.56GHz RF power with 1, 5, 10kHz pulse. And Langmuir probe technique is used to study the distribution of electron temperature and density. When modulated pulse is off, electron temperature decreases gradually in form of exponential decay. The value t of exponential decay slope is 33.619, 13.834, 10.803 in 1kHz. 5kHz. 10kHz. This implies that this method can be used to control electron temperature and density.
Keywords