• Title/Summary/Keyword: water vapor

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High Speed Direct Bonding of Silicon Wafer Using Atmospheric Pressure Plasma (상압 플라즈마를 이용한 고속 실리콘 웨이퍼 직접접합 공정)

  • Cha, Yong-Won;Park, Sang-Su;Shin, Ho-Jun;Kim, Yong Taek;Lee, Jung Hoon;Suh, Il Woong;Choa, Sung-Hoon
    • Journal of the Microelectronics and Packaging Society
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    • v.22 no.3
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    • pp.31-38
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    • 2015
  • In order to achieve a high speed and high quality silicon wafer bonding, the room-temperature direct bonding using atmospheric pressure plasma and sprayed water vapor was developed. Effects of different plasma fabrication parameters, such as flow rate of $N_2$ gas, flow rate of CDA (clear dry air), gap between the plasma head and wafer surface, and plasma applied voltage, on plasma activation were investigated using the measurements of the contact angle. Influences of the annealing temperature and the annealing time on bonding strength were also investigated. The bonding strength of the bonded wafers was measured using a crack opening method. The optimized condition for the highest bonding strength was an annealing temperature of $400^{\circ}C$ and an annealing time of 2 hours. For the plasma activation conditions, the highest bonding strength was achieved at the plasma scan speed of 30 mm/sec and the number of plasma treatment of 4 times. After optimization of the plasma activation conditions and annealing conditions, the direct bonding of the silicon wafers was performed. The infrared transmission image and the cross sectional image of bonded interface indicated that there is no void and defects on the bonded wafers. The bonded wafer exhibited a bonding strength of average $2.3J/m^2$.

Thermal and Mechanical Evaluation of Environmental Barrier Coatings for SiCf-SiC Composites (SiCf-SiC 복합재료의 내환경 코팅 및 열, 기계적 내구성 평가)

  • Chae, Yeon-Hwa;Moon, Heung Soo;Kim, Seyoung;Woo, Sang Kuk;Park, Ji-Yeon;Lee, Kee Sung
    • Composites Research
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    • v.30 no.2
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    • pp.84-93
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    • 2017
  • This study investigates thermal and mechanical characterization of environmental barrier coating on the $SiC_f-SiC$ composites. The spherical environmental barrier coating (EBC) powders are prepared using a spray drying process for flowing easily during coating process. The powders consisting of mullite and 12 wt% of Ytterbium silicate are air plasma sprayed on the Si bondcoat on the LSI SiC fiber reinforced SiC composite substrate for protecting the composites from oxidation and water vapor reaction. We vary the process parameter of spray distance during air plasma spray of powders, 100, 120 and 140 mm. After that, we performed the thermal durability tests by thermal annealing test at $1100^{\circ}C$ for 100hr and thermal shock test from $1200^{\circ}C$ for 3000 cycles. As a result, the interface delamination of EBC never occur during thermal durability tests while stable cracks are prominent on the coating layer. The crack density and crack length depend on the spray distance during coating. The post indentation test indicates thermal tests influence on the indentation load-displacement mechanical behavior.

A Study on Direct Decomposition and Selective Catalytic Reduction of NO over Ru-HZSM-5 Catalyst in the Presence of Excess Oxygen (과잉 산소 존재 하에서 Ru-HZSM-5촉매를 사용한 NO 분해 반응 및 선택적 촉매 환원 반응에 관한 연구)

  • Bae, Jae Yong;Chung, Sang Chul;Lee, Wha Young
    • Applied Chemistry for Engineering
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    • v.9 no.3
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    • pp.355-360
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    • 1998
  • Reduction activity of precious metal-loaded HZSM-5 for NO has been studied and was compared to that of Cu-HZSM-5 in the presence of excess oxygen. It was found that among the catalysts used in this study, Ru-HZSM-5 was the most active catalyst for the reduction of NO to $N_2$ in the absence of hydrocarbon reductant. The highest conversion obtained was 45%. No severe inhibition of water vapor to the reduction was observed. It is suggested that the higher catalytic activity of Ru-HZSM-5 may result from the better ability to oxidize NO to $NO_2$ in the presence of excess oxygen. A proposed reaction mechanism for the reduction of NO to $N_2$ in the presence of excess oxygen is that NO is oxidized to $NO_2$ on the surface of Ru-HZSM-5 catalyst and the adsorbed $NO_2$ on the surface is then decomposed to $N_2$. $NO_2$ is supposed to the reaction.

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Principles and Applications of Multi-Level H2O/CO2 Profile Measurement System (다중 수증기/이산화탄소 프로파일 관측 시스템의 원리와 활용)

  • Yoo, Jae-Ill;Lee, Dong-Ho;Hong, Jin-Kyu;Kim, Joon
    • Korean Journal of Agricultural and Forest Meteorology
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    • v.11 no.1
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    • pp.27-38
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    • 2009
  • The multi-level profile system is designed to measure the vertical profile of $H_2O$ and $CO_2$ concentrations in the surface layer to estimate the storage effects within the plant canopy. It is suitable for long-term experiments and can be used also in advection studies for estimating the spatial variability and vertical gradients in concentration. It enables the user to calculate vertical fluxes of water vapor, $CO_2$ and other trace gases using the surface layer similarity theory and to infer their sources or sinks. The profile system described in this report includes the following components: sampling system, calibration and flow control system, closed path infrared gas analyzer(IRGA), vacuum pump and a datalogger. The sampling system draws air from 8 inlets into the IRGA in a sequence, so that for 80 seconds air from all levels is measured. The calibration system, controlled by the datalogger, compensates for any deviations in the calibration of the IRGA by using gas sources with known concentrations. The datalogger switches the corresponding valves, measures the linearized voltages from the IRGA, calculates the concentrations for each monitoring level, performs statistical analysis and stores the final data. All critical components are mounted in an environmental enclosure and can operate with little maintenance over long periods of time. This report, as a practical manual, is designed to provide helpful information for those who are interested in using profile system to measure evapotranspiration and net ecosystem exchanges in complex terrain.

Treatment of decomposition of Aqueous 2,4-Dichlorophenol Solution by Ultrasonic Irradiation (초음파 검사에 의한 수중의 2,4-Dichlorophenol 분해처리)

  • 손종렬;문경환;김영환;우완기
    • Journal of environmental and Sanitary engineering
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    • v.14 no.3
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    • pp.54-62
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    • 1999
  • 2,4-Dichlorophenol was known pollutants caused by the endocrine disruptor into the refractory substances of environment and this is difficult to be degradable by conventional methods. Therefore, a considerable interest has been devoted to developing new process where 2,4-Dichlorophenol can easily decomposed. In this study, the series of ultrasonic irradiation for removal of 2,4-Dichlorophenol has been selected as a model reaction in the batch reactor system in order to obtain the basic data investigate the influence of various experimental parameters such as concentration, pH, reaction temperature, acoustic intensity. The products obtained form the ultrasonic irradiation were analysed by GC/MS and HPLC. The formation of $H_2O_2$, a well-known the strong oxidant was found proportionally to increase with irradiation time. The intermediates of ultrasonic irradiation of 2,4-Dichlorophenol were identified as HCl, catechol, hydroquinone, o,p-benzoquinone, muconic acid, and maleic acid. The final products of this was $CO_2$ and $H_2O$. As the decomposition of 2,4-Dichlorophenol proceeds by the ultrasonic irradiation, the pH of 2,4-Dichlorophenol containing aqueous solution increases slowly, The decomposition of 2,4-Dichlorophenol was found to be occured fast in the basic medium. In general, the rate of reaction is proportional to the reaction temperature obeying the Arrhenius' law. However, in the ultrasonic irradiation, this suggests as the reaction temperature increase the decomposition rate of the reactant decreases. This result meant that the increase of reaction temperature due to the increase of vapor pressure of water accelerated the decrease of acoustic intensity which was can be proportional to the decomposition rae of these compounds. It was found that more than 80% of phenol solution was removed within hours in all reaction conditions. The reaction order in the degradation of the 2,4-Dichlorophenol compounds was verified as the Pseude-first order. From the fore-mentioned results, it can be concluded that the refractory organic compounds caused by endocrine disruptor as 2,4-dichlorophenol could be removed by the ultrasonic irradiation with radicals, such as $H{\;}{\cdot}{\;}and{\;}OH{\;}{\cdot}$ radical causing the high increase of pressure and temperature. Finally, it apeared that the technology using ultrasonic irradiation can be applied to the treatment of refractory substances caused by endocrine disruptor which are difficult to be decomposed by the conventional methods.

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Improvement of Non-linear Estimation Equation of Rainfall Intensity over the Korean Peninsula by using the Brightness Temperature of Satellite and Radar Reflectivity Data (기상위성 휘도온도와 기상레이더 반사도 자료를 이용한 한반도 영역의 강우강도 추정 비선형 관계식 개선)

  • Choi, Haklim;Seo, Jong-Jin;Bae, Juyeon;Kim, Sujin;Lee, Kwang-Mog
    • Journal of the Korean earth science society
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    • v.39 no.2
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    • pp.131-138
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    • 2018
  • The purpose of this study is to improve the quantitative precipitation estimation method based on satellite brightness temperature. The non-linear equation for rainfall estimation is improved by analysing precipitation cases around the Korean peninsula in summer. Radar reflectivity is adopted the CAPPI 1.5 and CMAX composite fields that provided by the Korea Meteorological Agency (KMA). In addition, the satellite data are used infrared, water vapor and visible channel measured from meteorological imager sensor mounted on the Chollian satellite. The improved algorithm is compared with the results of the A-E method and CRR analytic function. POD, FAR and CSI are 0.67, 0.76 and 0.21, respectively. The MAE and RMSE are 2.49 and 6.18 mm/h. As the quantitative error was reduced in comparison to A-E and qualitative accuracy increased in compare with CRR, the disadvantage of both algorithms are complemented. The method of estimating precipitation through a relational expression can be used for short-term forecasting because of allowing precipitation estimation in a short time without going through complicated algorithms.

Evaluation of Thermoregulatory Properties of Thermal Underwear Named as 'Heating Underwear' using Thermal Manikin and Human Performance Test ('발열내복'이라 광고되는 시판 기능성 보온내복의 써멀 마네킹과 인체 착용 실험을 통한 체온조절 성능 평가)

  • Lee, Hyo-Hyun;Lee, Young-Ran;Kim, Ji-Eun;Kim, Siyeon;Lee, Joo-Young
    • Fashion & Textile Research Journal
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    • v.17 no.4
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    • pp.657-665
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    • 2015
  • This study evaluated the thermoregulatory properties of functional thermal underwear ('heating underwear') in markets using a thermal manikin and human wear trials. One ordinary thermal underwear (ORD) and two functional thermal underwear (HEAT1 and HEAT2; manufactured goods, HEAT1: moisture absorbing heat release mechanism, HEAT2: heat storage, release mechanism) were chosen. Thermo-physiological and subjective responses were evaluated at an air temperature of $5.0{\pm}0.5^{\circ}C$ and air humidity of $30{\pm}5%RH$ with five male subjects ($21.6{\pm}1.3yr$ in age, $178.0{\pm}5.9cm$ in height, $68.2{\pm}5.9kg$ in body mass). Experimental conditions consisted of four ensembles that included winter clothes (Control: no underwear, ORD, HEAT1, HEAT2). Water-vapor resistance was greater in fabric of HEAT1 than others. The results were: 1) Total thermal insulation (IT) using a thermal manikin were not greater for HEAT1 (0.860clo) and HEAT 2 (0.873clo) than for ORD (0.886clo). 2) There were no significant differences in rectal temperature, mean skin temperature, heart rate and total body mass loss between the four conditions. Microclimate clothing temperature on the back was greater for ORD than for HEAT1 and HEAT2. Subjects felt more comfortable with HEAT1 than for others at rest. HEAT2 was higher in microclimate humidity when compared to other conditions. The results suggest that thermoregulatory properties of 'heating underwear' in market did not differ from those of ordinary thermal underwear in terms of total thermal insulation and thermoregulatory responses in a cold environment.

Experimental Study on Optimization of Absorber Configuration in Compression/Absorption Heat Pump with NH3/H2O Mixture (NH3/H2O 혼합냉매를 사용한 압축/흡수식 히트펌프 시스템의 흡수기 최적화에 관한 실험적 연구)

  • Kim, Ji-Young;Kim, Min-Sung;Baik, Young-Jin;Park, Seong-Ryong;Chang, Ki-Chang;Ra, Ho-Sang;Kim, Yong-Chan
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.35 no.3
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    • pp.229-235
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    • 2011
  • This research aims todevelopa compression/absorption hybrid heat pump system using an $NH_3/H_2O$ as working fluid.The heatpump cycle is based on a combination of compression and absorption cycles. The cycle consists of two-stage compressors, absorbers, a desorber, a desuperheater, solution heat exchangers, a solution pump, a rectifier, and a liquid/vapor separator. The compression/absorption hybrid heat pump was designed to produce hot water above $90^{\circ}C$ using high-temperature glide during a two-phase heat transfer. Distinct characteristics of the nonlinear temperature profile should be considered to maximize the performance of the absorber. In this study, the performance of the absorber was investigated depending on the capacity, shape, and arrangementof the plate heat exchangers with regard tothe concentration and distribution at the inlet of the absorber.

Freshness Monitoring of Raw Salmon Filet Using a Colorimetric Sensor that is Sensitive to Volatile Nitrogen Compounds (휘발성 질소화합물 감응형 색변환 센서를 활용한 연어 신선도 모니터링)

  • Kim, Jae Man;Lee, Hyeonji;Hyun, Jung-Ho;Park, Joon-Shik;Kim, Yong Shin
    • Journal of Sensor Science and Technology
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    • v.29 no.2
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    • pp.93-99
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    • 2020
  • A colorimetric paper sensor was used to detect volatile nitrogen-containing compounds emitted from spoiled salmon filets to determine their freshness. The sensing mechanism was based on acid-base reactions between acidic pH-indicating dyes and basic volatile ammonia and amines. A sensing layer was simply fabricated by drop-casting a dye solution of bromocresol green (BCG) on a polyvinylidene fluoride substrate, and its color-change response was enhanced by optimizing the amounts of additive chemicals, such as polyethylene glycol, p-toluene sulfonic acid, and graphene oxide in the dye solution. To avoid the adverse effects of water vapor, both faces of the sensing layer were enclosed by using a polyethylene terephthalate film and a gas-permeable microporous polytetrafluoroethylene sheet, respectively. When exposed to basic gas analytes, the paper-like sensor distinctly exhibited a color change from initially yellow, then to green, and finally to blue due to the deprotonation of BCG via the Brønsted acid-base reaction. The use of ammonia analyte as a test gas confirmed that the sensing performance of the optimized sensor was reversible and excellent (detection time of < 15 min, sensitive naked-eye detection at 0.25 ppm, good selectivity to common volatile organic gases, and good stability against thermal stress). Finally, the coloration intensity of the sensor was quantified as a function of the storage time of the salmon filet at 28℃ to evaluate its usefulness in monitoring of the food freshness with the measurement of the total viable count (TVC) of microorganisms in the food. The TVC value increased from 3.2 × 105 to 3.1 × 109 cfu/g in 28 h and then became stable, whereas the sensor response abruptly changed in the first 8 h and slightly increased thereafter. This result suggests that the colorimetric response could be used as an indicator for evaluating the degree of decay of salmon induced by microorganisms.

Effects of a Carbohydrase Mixture, Ultrasound, and Irradiation Treatments on the Physical Properties of Defatted Mustard Meal-based Edible Films (탈지 겨자씨로 제조한 가식성 생고분자 필름의 물리적 특성에 대한 탄수화물 가수분해 효소 혼합체, 초음파, 그리고 방사선 처리의 효과)

  • Yang, Hee-Jae;Noh, Bong-Soo;Kim, Jae-Hun;Min, Sea-C.
    • Korean Journal of Food Science and Technology
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    • v.43 no.1
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    • pp.30-38
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    • 2011
  • Effects of depolymerization treatments of a carbohydrase mixture (CM), ultrasound, and irradiation on the physical properties of defatted mustard meal-based edible films (DMM films) were investigated. DMM hydrocolloids were added to CM (0.42% (w/w solution)), treated by ultrasound (500-700 W, 10-30 min) or ${\gamma}$-ray (40-100 kGy) to prepare film-forming solutions. Films were formed by drying. The CM treatment at 0.42% (w/w), pH 5.5, and 40-$50^{\circ}C$ with a 0.5 hr incubation time resulted in the highest colloidal stability in the film-forming solution. The depolymerization treatments did not dramatically change the water vapor permeability of the films. The solubility of the film decreased up to 53.1% by the CM treatment. The ultrasound treatment (700 W-30 min) decreased tensile strength and elongation. The ultrasound treatment (600 W-20 min) resulted in more compact and uniform structures of the films. Flavor profiles were differentiated by the power level and the time of the ultrasound treatment.