• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 추계학술대회 논문집 전기물성,응용부문
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• pp.33-35
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• 2005

In this paper, a two-mass system for SiOG (Silicon on Glass) vibratory gyroscope with the need of frequency tuning was proposed to increase the stability of the device with wide bandwidth. Air damping and bandwidth were analyzed using MATLAB. The measured resonance frequency is 5.2 kHz, which is 7 kHz in the design. But the measured bandwidth is 450 Hz, similar to the designed bandwidth with 500 Hz. Also the frequency difference (210 Hz) between the driving and sensing part is smaller than the wide bandwidth of two mass system.

• 대한기계학회논문집A
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• 제26권9호
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• pp.1931-1942
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• 2002

In this paper a formulation of robust optimization is presented and illustrated by a design example of vibratory micro gyroscopes in order to reduce the effect of variations due to uncertainties in MEMS fabrication processes. For the vibratory micro gyroscope considered it is important to match the resonance frequencies of the vertical (sensing) and lateral (driving) modes as close as possible to attain a high sensing sensitivity. A deterministic optimization in which the difference of both the sensing and driving natural frequencies is minimized as an objective function results in highly enhanced performance but apt to be very sensitive to fabrication errors. The formulation proposed is to attain robustness of the performance by including the sensitivity of the response with respect to uncertain variables as a term of objective function to be minimized. This formulation is simple and practically applicable since no detail statistical information on fabrication errors is required. The geometric variables, beam width, length and thickness of vibratory micro gyroscopes are adopted as design variables and at the same time considered as uncertain variables because here occur the fabrication errors. A robustness test in terms of a percentage yield by using the Monte Carlo simulation has shown that the robust optimum produces twice more acceptable designs than the deterministic optimum. Improvement of robustness becomes bigger as the amount of fabrication errors is assumed larger. Considering that the magnitude of fabrication errors and uncertainties in a MEMS structure are comparatively large, the present method is illustrated to be a viable approach for a robust MEMS design.

• 한국항공우주학회지
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• 제47권6호
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• pp.438-445
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• 2019

본 논문에서는 MEMS 자이로스코프에서 발생하는 G-민감도 오차를 관성센서 오차 모델에 정의하고, 이를 분석하여 오차 성분을 추출하는 기법을 제안한다. 일반적으로 MEMS기반 자이로스코프는 스프링과 관성질량체를 갖는 진동형 방식으로 개발된다. 따라서 구조적으로 고기동 환경에서 인가되는 가속도에 비례하는 G-민감도 오차 특성을 갖게 된다. 이러한 G-민감도 오차는 외부에서 높은 가속도가 인가되지 않는 민수분야에서는 무시할 정도로 작다. 하지만 전술급 성능의 MEMS 관성측정기가 고가속 환경에서 외란과 가속도에 의해 G-민감도 오차가 발생하게 되면 항체의 유도조종을 위한 항법장치 성능에 큰 영향을 미치게 되므로 오차 분석과 보상은 필수적이다. 따라서 본 논문에서는 MEMS 자이로스코프에 발생하는 G-민감도 오차를 분석하고 정의하여 관성센서 오차모델에 적용한다. 새로 정의된 관성센서 오차모델을 분석하여, 오차 성분을 고가속도 시험환경이 아닌 FMS 시험만으로 정확히 추출하는 방법을 제안한다. 그리고 제안한 방법으로 얻은 오차를 보상하여 고가속도 시험을 수행하고 그 결과를 분석하여 성능과 신뢰성을 검증한다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2000년도 하계학술대회 논문집 C
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• pp.2230-2232
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• 2000

This paper reports an electrostatically driven and electromagnetically sensed planar vibratory gyroscope based on a surface-bulk combined micromachining. The fabricated structure has comb electrodes which are 400${\mu}m$ thick, 18${\mu}m$ wide, 600${\mu}m$ long and separated by 7${\mu}m$ so that the height-gap ratio is about 57. It also has electroplated gold springs which are 15${\mu}m$ wide, 14${\mu}m$ thick and 500${\mu}m$ long on both sides of the seismic mass. The open-loop characteristics of fabricated gyroscope at atmospheric pressure are measured on a rate table. The fabricated gyroscope has a sensitivity of 30mV/deg/sec, and a resolution of 0.1deg/sec at atmospheric pressure. It is expected that non linearity of full scale output is less than 0.8% with. the dynamic range of $\pm$500deg/sec.

• 소음진동
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• 제10권5호
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• pp.880-885
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• 2000

In a verical type, vibratory gyroscope, the coupled motion between the reference and sensing vibrations causes the zero-point output which means non-zero sensing vibration without angular velocity. This structural coupling leaks to an inherent discrepancy between the natural frequencies of the reference and sensing oscillations, causing the degradation of the sensing performance and dynamic stability. In this paper, the dynamic characteristics associated the coupling phenomenon are theoretically analyzed. Effects of reference frequency and coupling factor on the rotational direction and amplitude of elliptic oscillation are studied. A technique to predict the existence of curve veering of crossing in frequency trajectories is introduced to apply the design of micro gyroscopes with decoupled structures.

• 센서학회지
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• 제19권3호
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• pp.191-196
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• 2010

In this paper, modeling of the non-ideal frequency response, especially "notch-and-spike" magnitude phenomenon and phase lag distortion, are discussed. To characterize the non-ideal frequency response, a new electro-mechanical simulation model based on SPICE is proposed using the driving loop of the capacitive vibratory gyroscope. The parasitic components of the driving loop are found to be the major factors of non-ideal frequency response, and it is verified with the measurement results.

• Journal of Advanced Marine Engineering and Technology
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• 제10권4호
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• pp.41-49
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• 1986

With the trend towards high propulsive level, increasing ship's dimensions and heavier shaft systems supported by the hull structure of relatively stiffness in modern ships, transverse vibrations of propulsion shaft system have become one of the problems that should be predicted in the early design stage. Regarding transverse vibrations, coupling terms such as oilfilm, gyroscope and hydrodynamic effect of the propeller exist between the vertical and horizontal vibration, furthermore for the shaft system with strut and bossing its physical properties incorporated with hull structure must be considered. In order to predict the transverse vibratory condition of the propulsion shaft and take some appropriate countermeasures, it is necessary to make a fairly strict estimation of the vibratory behaviours of it. In this paper, theoretical approach using the finite element method is investigated to calculate natural frequencies and vibration modes for coupled free transverse vibrations of shaft system in two planes. Based on the method investigated a digital computer program is developed and is applied to calculate the above-mentioned vibrations of an experimental model shaft system. The results of the calculation are compared with those of the experimental measurements and they show an acceptable agreement.

• 대한기계학회논문집A
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• 제26권5호
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• pp.914-923
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• 2002

Recently, there has been considerable interest in micro gyroscopes made of silicon chips. It can be applied to many micro-electro-mechanical systems (MEMS): devices for stabilization, general rate control, directional pointing, autopilot systems, and missile control. This paper shows how the mechanical design of the gyroscope can be done using axiomatic design, followed by the application of the Taguchi robust design method to determine the dimensions of the parts so as to accommodate the dimensional variations introduced during manufacturing. Functional requirements are defined twofold. One is that the natural frequencies should have fixed values, and the other is that the system should be robust to large tolerances. According to the Independence Axiom, design parameters are classified into a few groups. Then, the detailed design process is performed fellowing the sequence indicated by the design matrix. The dimensions of the structure are determined to have constant values fur the difference of frequencies without consideration of the tolerances. It is noted that the Taguchi concept is utilized as a unit process of the entire axiomatic approach.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2003년도 하계종합학술대회 논문집 V
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• pp.2485-2488
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• 2003

본 논문에서는 DSP를 이용하여 운동하는 물체의 회전량을 측정하는 실린더형 진동 자이로스코프(이하 자이로) 제어기를 개발하였다. 진동 자이로를 구동하기 위해서는 정밀 진동제어와 신호 처리와 같은 고급 제어 기술이 필요하다. 정밀진동제어는 진동 자이로를 구동하기 위해 필요한 핵심기술로써 기존의 PLL(phase-locked loop)방식은 외부환경에 민감하여 구현이 까다로울 뿐만 아니라 자이로 개개의 고유 진동수가 다르기 때문에 대량 생산에 어려움이 있었다. 또한 자이로 출력 신호로부터 회전량을 검출하기 위해서는 진폭과 당향성 검출의 본 회로뿐만 아니라 잡음 제거와 신호 증폭, 온도 보상과 같은 전처리 과정도 필요하다. 본 논문에서는 DSP를 통해 정밀 진동제어와 잡음 제거, 방향성 검출 등의 기능들을 구현하였으며 증폭과 진폭(회전량) 검출은 아날로그 회로를 이용하였다. 또 한 외부와의 인터페이스를 위해 D/A 회로를 설계하였고 이들을 실험을 통해 검증하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.602-606
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• 2005

A systematic procedure of probability analysis for general distributions is developed based on the first four moments estimated from polynomial interpolation of the system response function and the Pearson system. The function approximation is based on a specially selected experimental region for accuracy and the number of function evaluations is taken equal to that of the unknown coefficient for efficiency. For this purpose, three error-minimizing conditions are proposed and corresponding canonical experimental regions are formed for popular probability. This approach is applied to study the stochastic properties of the performance functions of a MEMS structure, which has quite large fabrication errors compared to other structures. Especially, the vibratory micro-gyroscope is studied using the statistical moments and probability density function (PDF) of the performance function to be the difference between resonant frequencies corresponding to sensing and driving mode. The results show that it is very sensitive to the fabrication errors and that the types of PDF of each variable also affect the stochastic properties of the performance function although they have same the mean and variance.