Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Modeling of non-ideal frequency response in capacitive MEMS resonator

정전 용량형 MEMS 공진기의 비이상적 주파수 응답 모델링

  • Ko, Hyoung-Ho (School of Electrical Engineering and Computer Science, Seoul National University)
  • 고형호 (서울대학교 전기 컴퓨터공학부)
  • Received : 2010.01.29
  • Accepted : 2010.03.22
  • Published : 2010.05.31
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Abstract

In this paper, modeling of the non-ideal frequency response, especially "notch-and-spike" magnitude phenomenon and phase lag distortion, are discussed. To characterize the non-ideal frequency response, a new electro-mechanical simulation model based on SPICE is proposed using the driving loop of the capacitive vibratory gyroscope. The parasitic components of the driving loop are found to be the major factors of non-ideal frequency response, and it is verified with the measurement results.

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References

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