• Korean Journal of Crystallography
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• v.8 no.2
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• pp.81-88
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• 1997

We investigated the CVPE grown of GaN thin films on (0001) sapphire using the $GaCl_3$ and $NH_3$ as source gases. The growth temperatures are ranged 970 to $1040^{\circ}C$ with the various flow rate ratio of source gases. The nitridation treatment was performed using the $NH_3$ gas before the GaN deposition. The optimal growth conditions were determined to be; growth temperature of $1040^{\circ}C$, III/V flow rate ratio of 2, nitridation time of 3 min. The FWHM at the (0002) peak from the XRD analysis was shown to be 0.32 deg. for the sample grown under those conditions. The growth rate was about $40{\mu}m/hr$ at $1040^{\circ}C$.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.304.1-304.1
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• 2016

We have investigated the effect of plasma nitridation of atomic layer deposited-Al2O3 films of monocrystalline Si wafers and the thermal properties of nitridated Al2O3 films. Nitridation was performed on Al2O3 to form aluminum oxynitride (AlON) using NH3 plasma treatment in a plasma-enhanced chemical vapor deposition and it was conducted at temperature of $400^{\circ}C$ with various plasma power condition. After nitridation, we performed firing and forming gas annealing (FGA). For each step, we have observed the minority carrier lifetime and the implied Voc by using quasi-Steady-State photoconductance (QSSPC). We confirmed a tendency to increase the minority carrier lifetime and the implied Voc after the nitridation. On the other hand, the minority carrier lifetime and the implied Voc was decreased after Firing and forming gas annealing (FGA). To get more information, we studied properties of the plasma treated Al2O3 films by using Secondary Ion Mass Spectroscopy (SIMS) and X-ray Photoelectron Spectroscopy (XPS).

• Journal of Soil and Groundwater Environment
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• v.15 no.4
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• pp.13-20
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• 2010

The purpose of this study was to develope the remediation method of contaminated soils with metals and petroleum. The diesel degrading strain was isolated and identified from the soil contaminated by petroleum at industrial sites. Diesel biodegradation experiment was performed by diesel degrading bacteria in both solution and soil slurry. Contaminated soils by Zn or As and diesel were treated consecutively by steam-vapor extraction, biodegradation, and acid washing. The strain was identified as Pseudomonas aeruginosa, and named as Pseudomonas aeruginosa TPH1. The optimal culture conditions of TPH1 were $20^{\circ}C$ and pH 7.0, 3% of diesel concentration. Biodegradation of diesel was performed using the separated strain in liquid medium, and 63% of diesel was degraded in 72 hours. And 52% of diesel was removed in the tested soils. In the treatment of contaminated soils with diesel and Zn or As, 29% ~ 44% of diesel was reduced by steamvapor extraction, 60% ~ 71% of diesel was removed after biodegradation. 47% of Zn and 96% of As were removed after acid(mixture of sulfuric and oxalic acids) washing. It is recommended that consecutive treatment method of steam-vapor extraction, biodegradation and acid washing is effective for remediation of complex contaminated soils with metals and petroleum.

• Proceedings of the Materials Research Society of Korea Conference
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• 2011.05a
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• pp.6.1-6.1
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• 2011

Nanoscale block copolymer (BCP) patterns have been pursued for applications in sub-30 nm nanolithography. BCP self-assembly processing is scalable and low cost, and is well-suited for integration with existing semiconductor fabrication techniques. However, one of the major technical challenges for BCP self-assembly is limited tunability in pattern geometry, dimension, and functionality. We suggest methods for extending the degree of tunability by choosing highly incompatible polymer blocks and utilizing solvent vapor treatment techniques. Siloxane BCPs have been developed as self-assembling resists due to many advantages such as high etch-selectivity, good etch-resistance, long-range ordering, and reduced line-edge roughness. The large incompatibility leads to extensive degree of pattern tunability since the effective volume fraction can be easily manipulated by solvent-based treatment techniques. Thus, control of the microdomain size, periodicity, and morphology is possible by changing the vapor pressure and the mixing ratio of selective solvents. This allows a range of different pattern geometry such as dots, lines and holes and critical dimension simply by changing the processing conditions of a given block copolymer without changing a polymer chain length. We demonstrate highly extensive tunability (critical dimension ~6~30 nm) of self-assembled patterns prepared by a siloxane BCP with extreme incompatibility.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.37 no.3
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• pp.27-33
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• 2000

The selective chemical vapor deposition techniques for Cu metallization were studied. For enhancing the selectivity, furnace annealing and N$_{2}$ plasma were treated on patterned TiN/BPSG prior to the copper deposition. As a result, Cu did not deposited lead to suppressing the nucleation on BPSG singificantly. With the increasement the plasma treatment temperature, copper nucleation on BPSG was suppressed mote effectively, From TOF-SIMS(Time-of-Flight Secondary ion Mass Spectrometry), it is considered that annealing and N$_{2}$ plasma treatment remove hydroxyl(0-H) group so that eliminating the nucleation site for copper precursor enhance the selectivity.

• Journal of the Korean Society for Heat Treatment
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• v.2 no.4
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• pp.11-18
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• 1989

To investigate the influence of $TiCl_4$, $N_2$ inlet fraction on the TiN layer, TiN film was deposited onto the STC3 and STD11 steel from gas mixtures of $TiCl_4/N_2/H_2$ by the radio frequency plasma assisted chemical vapor deposition. The films were deposited at various $TiCl_4$, $N_2$ inlet fractions. The results showed that the film thickness was increased with $TiCl_4$ inlet fraction. However, while the thickness was increased with $N_4$ inlet fraction under 0.4 the thickness was decreased with increasing $N_2$ inlet fraction over 0.4. The density of deposited films was varied as $TiCl_4$, $N_2$ inlet fraction and its maximum value was about $5.6g/cm^3$. The contents of chlorine were increased with increasing $TiCl_4$ inlet fraction and nearly constant with increasing $N_2$ inlet fraction.

• Textile Coloration and Finishing
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• v.23 no.2
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• pp.131-139
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• 2011

This study surveyed on the synthesis of one-step type hydrophilic non-porous PU resin and the physical property of the coated fabric for the garment. Three kinds of chain extender such as MEG, 1,4-BD and NPG were used for the preparation of one-step type hydrophilic non-porous PU resin in order to examine the effect of chain extender on the physical properties of PU-coated fabric. And the effects of isocyanate on the physical properties of PU coated fabric were surveyed by mixing with various TDI and MDI ratios. In addition, the physical properties of the coated fabric treated with one-step type hydrophilic non-porous PU resin were examined according to the pre-treatment conditions such as cire finishing. Finally, the washing durability of the coated fabrics was assessed. The coated fabrics treated with PU resin synthesized with PEG1000, MEG and TDI/MDI (6/4) showed the best physical properties. Considering the pre-treatment conditions, best performance of hydraulic pressure, water vapor permeability, and water repellency were obtained with top roller rotation ratio of 150% under 50 ton pressure at $170^{\circ}C$.

• 한국정보디스플레이학회:학술대회논문집
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• 2008.10a
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• pp.867-869
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• 2008

We have investigated the effects of hydrogen plasma treatment by PECVD (Plasma Enhanced Chemical Vapor Deposition) in the back channel region, the method for reducing the off state leakage current which increases with the short channel length of a-Si:H TFTs. To improve the off current characteristics, we analyzed the hydrogen plasma treatment with various RF power and plasma treatment times of PECVD. As the result of hydrogen plasma treatment in the back channel region it was remarkably reduced the off current level of 2um channel length TFT.

• Applied Chemistry for Engineering
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• v.2 no.1
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• pp.38-46
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• 1991

Regeneration of Ni catalyst deactivated by carbon-deposition and sulfur-poisoning was studied. When a carbon-deposited catalyst was regenerated by hydrogen, the final recovery of catalytic activity for benzene hydrogenation was large but relatively long period of regeneration was required, and futhermore the deposited carbon could not be removed completely. In case of oxygen-treatment, the regeneration rate was high and the deposited carbon could be removed almost completely after a subsequent reduction treatment. When a sulfur-poisoned catalyst was regenerated by hydrogen and water vapor, the catalytic activity was not recovered. The regeneration treatment with oxygen at $650^{\circ}C$ recovered the catalytic activity up to 60 % of the initial value. When $Cl^-$ was added to oxygen, the activity was easily recovered to 45 % of the initial value even after treatment at $500^{\circ}C$. Sintering of the dispersed Ni particles was enhanced by water vapor but was hindered by oxygen and chlorine addition.

• Journal of the Korean Vacuum Society
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• v.22 no.6
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• pp.291-297
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• 2013

ZnO nanowires were synthesized by vapor-liquid-solid (VLS) process using ZnO and graphite powders on the sapphire substrate coated with an Au film as a catalyst. ZnO nanowires had two prominent emission bands; i) near-band edge (NBE) emission band at 380 nm, and ii) a relatively stronger deep level (DL) emission band ($I_{NBE}/I_{DL}$ <1). In order for the ZnO nanowires to be utilized as an effective material for UV emitting devices, the photoluminescence intensity of NBE needs to be improved with the decreased intensity of DL. In the current study, hydrogen plasma treatment was performed to improve the photoluminescence characteristics of ZnO nanowires. With the hydrogen plasma treatment time of more than 120 sec, the extent of performance improvement was gradually decreased. However, the intensity ratio of NBE to DL ($I_{NBE}/I_{DL}$) was significantly improved to about 4 with a relatively short plasma treatment time of 90 sec, suggesting hydrogen plasma treatment is a promising approach to improve the photoluminescence properties of ZnO nanowires.