• 제목/요약/키워드: vapor phase diffusion

검색결과 58건 처리시간 0.023초

InGaN/GaN 양자우물의 SA-MOVPE에서 표면확산을 고려한 박막성장 해석 (Analysis of Film Growth in InGaN/GaN Quantum Wells Selective Area Metalorganic Vapor Phase Epitaxy including Surface Diffusion)

  • 임익태;윤석범
    • 반도체디스플레이기술학회지
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    • 제10권3호
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    • pp.29-33
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    • 2011
  • Film growth rate and composition variation are numerically analyzed during the selective area growth of InGaN on the GaN triangular stripe microfacet in this study. Both the vapor phase diffusion and the surface diffusion are considered to determine the In composition on the InGaN surface. To obtain the In composition on the surface, flux of In atoms due to the surface diffusion is added to the concentration determined from the Laplace equation which is governing the gas phase diffusion. The solution model is validated by comparing the growth rates from the analyses to the experimental results of GaN and InN films. The In composition and resulting wave length are increased when the surface diffusion is considered. The In content is also increased according to the increasing mask width. The effect of mask width to the In content and wave length is increasing in the case of a small open region.

종이내 수분확산(제2보)-종이의 공극구조에 의한 수분확산 이론- (Molecular Diffusion of Water in Paper(II)-Water-diffusion theory on pore structure of paper-)

  • 윤성훈;전양
    • 펄프종이기술
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    • 제30권3호
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    • pp.46-56
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    • 1998
  • The objective of this study was to investigate the relationship between water vapor diffusion properties and the pore structure of paper. Gas-phase molecular diffusivity of water vapor through pores was determined based on the kinetic theory of gas. A mathematical model was derived to characterize the dimensional changes of the pore caused by the fiber-swelling mechanism. A modified-Fickean diffusion model was designed to simulate the water-vapor diffusion phenomena in porous paper web. Structural characterisocs of paper pores including the tortuosity and the shape factor was studied on a theoretical basis of Knudsen flow diffusion. Results are summarized as follows: 1. The theoretical water vapor diffusivity in gas-phase was 0.092$cm^2$ /min, 2. Porosity was inversely proportional to the degree of wet-swelling of paper, 3. Solid-phase water-diffusivity of fiber was 1.2 $ \times 10^{-5}cm^2/min$, 4. Modified diffusion model was fairly consistent to the experimental data (from part I), and 5. The Fickean pore tortuosity, ranging from 1,000 to 2,500, was in inverse proportion to the porosity of paper, and the Knudsen shape factor and length-angle factor for micro-pores in paper were 0.5~3.5 and about 340, respectively.

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Zn-Vapor확산에 의한 Ti:LiTaO$_{3}$ 광도파로의 굴절률 증가에 관한 연구 (A study on the enhancement of refractive index in Ti:LiTaO$_{3}$ optical waveguides by Zn-vapor diffusion)

  • 정홍식;정영식
    • E2M - 전기 전자와 첨단 소재
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    • 제9권3호
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    • pp.298-303
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    • 1996
  • A double diffusion technique is developed to enhance the effective mode index of optical waveguides in $LiTaO_3$. It consists of Zn diffusion from the vapor phase at relatively low temperatures (750->$800^{\circ}C$), into waveguides initially produced by Ti indiffusion at higher temperature (1150->$1200^{\circ}C$). Both X- and Z-cut substrates are investigated. A model that combines profiles of both diffusion is formulated to calculate the expected effective index values for planar waveguides. Good agreement is found between experimental results and model predictions which assume that the initial Ti profile is not affected by the lower temperature Zn diffusion. Effective index enhancements as high as 0.005 and 0.003 are obtained by this method for the fundamental extraordinary and ordinary modes, respectively.

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가스 확산층(GDL)내부의 물이 연료전지 성능에 미치는 영향 (The Effect of Liquid Water in Fuel Cell Cathode Gas Diffusion Layer on Fuel Cell Performance)

  • 박상균
    • Journal of Advanced Marine Engineering and Technology
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    • 제39권4호
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    • pp.374-380
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    • 2015
  • 본 연구에서는 연료전지 캐소드 가스 확산층에서의 물의 영향이 연료전지 성능에 미치는 영향을 검토하기 위하여 연료전지 스택의 부하 변동에 따른 가스 확산층에서의 2상 현상의 구현이 가능한 동적 모델을 개발하였다. 개발된 모델에 대하여 2상의 영향에 의한 연료전지 부하변동에 따른 연료전지 스택 성능, 가스 확산층 내부에서의 물 증기와 산소의 농도분포, 가스 확산층의 두께 및 다공성이 연료전지 스택 전압에 미치는 영향에 대하여 검토하였다. 그 결과 본 연구의 범위 내에서 연료전지 스택 전압은 부하에 관계없이 2상 모델이 1상 모델보다 낮아짐을 알 수 있다. 촉매층 부근 가스 확산층에서의 산소 농도는 가장 낮고 물 증기의 농도는 가장 높음을 알 수 있었다. 또한, GDL의 두께가 두꺼울수록 GDL의 다공성이 작을수록 연료전지 스택 전압이 낮아짐을 알 수 있었다.

고분자전해질형연료전지의 가스 채널 최적화를 위한 수치적 연구 (II) - 가스 채널 치수가 온도와 액체포화 분포에 미치는 영향성 - (Numerical Study of Land/Channel Flow-Field Optimization in Polymer Electrolyte Fuel Cells (PEFCs) (II) - The Effects of Land/Channel Flow-Field on Temperature and Liquid Saturation Distributions -)

  • 주현철;남진무
    • 대한기계학회논문집B
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    • 제33권9호
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    • pp.688-698
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    • 2009
  • Using the multi-dimensional, multi-phase, nonisothermal Polymer Electrolyte Fuel Cell (PEFC) model presented in Part I, the effects of land/channel flow-field on temperature and liquid saturation distributions inside PEFCs are investigated in Part II. The focus is placed on exploring the coupled water transport and heat transfer phenomena within the nonisothermal and two-phase zone existing in the diffusion media (DM) of PEFCs. Numerical simulations are performed varying the land and channel widths and simulation results reveal that the water profile and temperature rise inside PEFCs are considerably altered by changing the land and channel widths, which indicates that oxygen supply and heat removal from the channel to the land regions and liquid water removal from the land toward the gas channels are key factors in determining the water and temperature distributions inside PEFCs. In addition, the adverse liquid saturation gradient along the thru-plane direction is predicted near the land regions by the numerical model, which is due to the vapor-phase diffusion driven by the temperature gradient in the nonisothermal two-phase DM where water evaporates at the hotter catalyst layer, diffuses as a vapor form and then condenses on the cooler land region. Therefore, the vapor phase diffusion exacerbates DM flooding near the land region, while it alleviates DM flooding near the gas channel.

Preferential Sorption and Its Role on Pervaporation of Organic Liquid Mixtures

  • 박현채;김은영
    • 한국막학회:학술대회논문집
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    • 한국막학회 1995년도 춘계 총회 및 학술발표회
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    • pp.34-35
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    • 1995
  • The unique feature of pervaporation is the mass transfer from a liquid phase to a vapor phase through a non-porous polymeric membrane. When a liquid mixture is brought into contact with a membrane at one side, it is sorbed into the membrane. Due to a driving force applied across the membrane, the sotbed liquid molecules permeate through the membrane and evaporate at the downstream side of the membrane. In pervaporation the permeated species are usually removed from the downstream side under a relatively low vapor pressure, for example by evacuation with a vacuum pump. As far as this condition is fulfilled, the evaporation step can be considered to be much faster than sorption or diffusion. Hence evaporation does not contribute to permselectivity. Therefore the separation by pervaporation results from the differences in the preferential sorption of the individual components of a mixture into the membrane together with the diffusion rates through the membrane. This postulation implies that both sorption and diffusion phenomena have to be accounted for to understand the physico-chemical nature of the pervaporation separation process.

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Numerical Analysis on the Die Pad/Epoxy Molding Compound(EMC) Interface Delamination in Plastic Packages under Thermal and Vapor Pressure Loadings

  • Jin Yu
    • 마이크로전자및패키징학회지
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    • 제5권2호
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    • pp.37-48
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    • 1998
  • The popcorn cracking phenomena in plastic IC packages during reflow soldering are investigated by considering the heat transfer and moisture diffusion through the epoxy molding compound(EMC) along with the mechanics of interface delamination. Heat transfer and moisture diffusion through EMC under die pad are analyzed by finite difference method (FDM)during the pre-conditioning and subsequent reflow soldiering pro-cess and the amounts of moisture mass and vapor pressure at delaminated die pad/ EMC interface are calculated as a function of the reflow soldering time. The energy release rate stress intensity factor and phase angle were obtained under various loading conditions which are thermal crack face vapor pressure and mixed loadings. It was shown that thermal loading was the main driving force for the crack propagation for small crack lengths but vapor pressure loading played more significant role as crack grew.

엑시머 레이져를 이용한 극히 얕은 접합과 소스, 드레인의 형성과 50nm 이하의 극미세 n-MOSFET의 제작 (Ultra Shallow Junction wish Source/Drain Fabricated by Excimer Laser Annealing and realized sub-50nm n-MOSFET)

  • 정은식;배지철;이용재
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 하계학술대회 논문집
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    • pp.562-565
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    • 2001
  • In this paper, novel device structures in order to realize ultra fast and ultra small silicon devices are investigated using ultra-high vacuum chemical vapor deposition(UHVCVD) and Excimer Laser Annealing (ELA). Based on these fundamental technologies for the deep sub-micron device, high speed and low power devices can be fabricated. These junction formation technologies based on damage-free process for replacing of low energy ion implantation involve solid phase diffusion and vapor phase diffusion. As a result, ultra shallow junction depths by ELA are analyzed to 10~20nm for arsenic dosage(2${\times}$10$\_$14//$\textrm{cm}^2$), exciter laser source(λ=248nm) is KrF, and sheet resistances are measured to 1k$\Omega$/$\square$ at junction depth of 15nm and realized sub-50nm n-MOSFET.

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비정상 증발디젤분무의 측정과 그 응용해석 (Advanced Analysis and Measurement of the Unsteady Evaporative Diesel Spray)

  • 염정국;박종상;김시범;정성식;하종률
    • 대한기계학회논문집B
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    • 제32권7호
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    • pp.529-535
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    • 2008
  • The characteristics of combustion process in an internal combustion engine are affected by the mixing process between injected fuel and ambient gas. Therefore, it is necessary to understand the mixture formation process of diesel spray. In this study, the spray structure was visualized by the exciplex fluorescence method, which can provide the simultaneous 2-D images of vapor and liquid phase in inner spray. For accurate investigation, the liquid-phase images were recorded with a 35mm still camera and CCD camera. Consequentially, it could be confirmed that the high-concentration vapor phase is formed in the region of spray tip and the edge of the liquid phase where droplets exist in the evaporating diesel spray, and the formed vapor is spread by diffusion. Also, the distribution of vapor is determined by the motion of droplets that exist in the edge of the liquid phase and the spray-tip region.

ZnO 기판 위에 Hydride Vapor-Phase Epitaxy법에 의한 GaN의 성장 (Growth of GaN on ZnO Substrate by Hydride Vapor-Phase Epitaxy)

  • 조성룡;김선태
    • 한국재료학회지
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    • 제12권4호
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    • pp.304-307
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    • 2002
  • A zinc oxide (ZnO) single crystal was used as a substrate in the hydride vapor-phase epitaxy (HVPE) growth of GaN and the structural and optical properties of GaN layer were characterized by x- ray diffraction, transmission electron microscopy, secondary ion mass spectrometry, and photoluminescence (PL) analysis. Despite a good lattice match and an identical structure, ZnO is not an appropriate substrate for application of HVPE growth of GaN. Thick film could not be grown. The substrate reacted with process gases and Ga, being unstable at high temperatures. The crystallinity of ZnO substrate deteriorated seriously with growth time, and a thin alloy layer formed at the growth interface due to the reaction between ZnO and GaN. The PL from a GaN layer demonstrated the impurity contamination during growth possibly due to the out-diffusion from the substrate.