• Title/Summary/Keyword: vacuum ultrasonic system

Search Result 18, Processing Time 0.027 seconds

Measurement Uncertainties for Vacuum Standards from a Low to an Ultra-high Vacuum

  • Hong, S.S.;Shin, Y.H.;Lim, J.Y.
    • Applied Science and Convergence Technology
    • /
    • v.23 no.3
    • /
    • pp.103-112
    • /
    • 2014
  • The Korea Research Institute of Standards and Science (KRISS) has three major vacuum systems: an ultrasonic interferometer manometer (UIM; Section II, Figs. 1 and 2) for a low vacuum, a static expansion system (SES; Section III, Figs. 3 and 4) for a medium vacuum, and an orifice-type dynamic expansion system (DES, Section IV, Figs. 5 and 6) for high and ultra-high vacuum systems. For each system, explicit measurement model equations with multiple variables are given. According to ISO standards, all of these system variable errors were used to calculate the expanded uncertainty (U). For each system, the expanded uncertainties (k = 1, confidence level = 95%) and relative expanded uncertainty (expanded uncertainty/generated pressure) levels are summarized in Table 4. Within the uncertainty limits, our bilateral and key comparisons [CCM.P-K4 (10 Pa to 1 kPa)] are extensive and in good agreement with those of other nations (Fig. 8 and Table 5).

Development of Uncertainty Evaluation Model for Vacuum Measurement Standards (진공측정표준의 불확도 평가모델 개발)

  • Hong, S.S.;Lim, J.Y.;Shin, Y.H.
    • Journal of the Korean Vacuum Society
    • /
    • v.20 no.5
    • /
    • pp.313-321
    • /
    • 2011
  • The Korea Research Institute of Standards and Science (KRISS) has three major vacuum systems: an ultrasonic interferometer manometer (UIM), a static volume expansion system (SVES), and an orifice-type dynamic expansion system (ODES). For each system explict measurement model equations with multiple variables are respectively given. According to ISO standards, all these system variables errors were used to calculate the expanded uncertainty (U).

Comparison of Utrasonic and Vibration Diagnostic Techniques for the Inspection of Pipes in CVD System (화학증착 시스템에서의 파이프내 오염입자 관찰을 위한 초음파 및 진동 진단법의 비교연구)

  • Yun Ju-Young;Seong Dae-Jin;Shin Yong-Hyoen;Lee Ji-Hun;Moon Doo-Kyung;Kang Sang-Woo
    • Journal of the Korean Vacuum Society
    • /
    • v.15 no.4
    • /
    • pp.421-426
    • /
    • 2006
  • In examining particulate deposits in the pipes of a chemical vapor deposition (CVD) system, vibration diagnostics is compared and studied against ultrasonic diagnostics, The latter method involves pulsing the outer wall of pipes with an ultrasonic sensor and analyzing the resulting echo to observe particulate deposits inside pipes. Vibration diagnostics examines the existence of particulate deposits by analyzing the difference in the frequencies generated when a vibrator is adhered to the outer wall of pipes. With ultrasonic diagnostics, good test results were obtained only when particulate deposits were attached to the inner wall of the pipes, After some time, however, particulate deposits were not detected properly, as the ultrasonic wave failed to cross the fine gaps created between the inner wall of the pipe and the deposits. The ultrasonic wave bounced back because of the dried particulate deposits on the wall. Thus, it has been proven that the ultrasonic diagnostics is not an appropriate means of examining the particulate deposits in a vacuum, On the other hand, vibration diagnostics succeeded in detecting the particulate deposits regardless of the lapsed time. In conclusion, the vibration diagnostics is being expected as the effective method in monitoring the particulate deposits inside pipes in the CVD system where the desired behavior is reduced frequency along with the particulate deposits in comparison to the case where the pipe is clean.

National Vacuum Standards from Low to Ultra-high Vacuum (저진공에서 초고진공까지의 국가 진공표준)

  • Hong S. S.;Lim I. T.;Shin Y. H.;Chung K. H.
    • Journal of the Korean Vacuum Society
    • /
    • v.15 no.1
    • /
    • pp.1-13
    • /
    • 2006
  • Vacuum laboratory in Korea Research Institute of Standards and Science (KRISS) was opened in 1983 for establishing and disseminating vacuum standard in Korea. The major three systems such as the ultrasonic interferometer manometer (UIM), the static expansion system (SES) and the dynamic expansion system (DES) with orifice and porous plug conductance are developed. In this study, the standard systems from low to ultra-high vacuum, uncertainty analysis by ISO regulation, and key and bilateral comparison results will be described.

Study on the heat and mass transfer in ultrasonic assisting vacuum membrane distillation

  • Guo, Hao;Peng, Changsheng;Ma, Weifang;Yuan, Hetao;Yang, Ke
    • Membrane and Water Treatment
    • /
    • v.8 no.3
    • /
    • pp.293-310
    • /
    • 2017
  • An ultrasonic assisting vacuum membrane distillation (VMD) system was designed to promote the heat and mass transfer in membrane distillation (MD) process. Both the effects of operating conditions and ultrasonic parameters to permeation flux in this process were investigated; the heat and mass transfer mechanism was also being discussed in this paper. The results showed that the performance of VMD process was improved significantly by ultrasonic assisting. The permeation flux was boosted at a certain feed solution temperature, pressure at permeate side and feed solution velocity whether or not to PP and PTFE. The results also indicated that ultrasonic power and frequency also was the key factor affecting the mass and transfer efficiencies. The feed side transfer coefficient ($K_f$), corresponding to ultrasonic power ($K_f=4.406-0.026{\times}P+7.824{\times}10^{-5}{\times}P^2$) and ultrasonic frequency ($K_f=0.941+0.598{\times}f-0.012{\times}f^2+6.283{\times}10^{-5}f^3$), was obtained and employed in the modeling of ultrasonic assisting VMD process. The modeling results showed that the calculated value of $K_f$ aligned with experimental results well. Both variations of temperature polarization coefficient (TPC) and concentration polarization coefficient (CPC) were studied based on the obtained data. The results showed that both TPC and CPC were improved obviously by the ultrasonic parameters.

Immediate Autogenous Fresh Demineralized Tooth (Auto-FDT) Graft for Alveolar Bone Reconstruction (즉시 탈회 치아이식재를 사용한 치조골 재건술)

  • Lee, Eun-Young
    • The Journal of the Korean dental association
    • /
    • v.54 no.5
    • /
    • pp.348-355
    • /
    • 2016
  • Ideal autogenous or allogenic bone graft materials should provide 1) stabilization of blood clot, 2) scaffolds for cellular proliferation and differentiation, 3) release of osteogenic growth factors, 4) appropriate resorption profile for remodeling of new bone. Teeth, especially dentin, mostly contain hydroxyapatite and type I collagen which are similar to bone, and could be valuable graft material. Clinically teeth are used as calcined or demineralized forms. Demineralized form of dentin can be more effective as a graft material. But a conventional decalcification method takes time and long treatment time may give negative effects to various osteogenic proteins in dentin. Author used a new clinical method to prepare autogenous teeth, which could be grafted into the removal defects immediately after extraction using vacuum ultrasonic system. The process could be finished within two hours regardless of the form (powder, chip or block). Teeth were processed to graft materials in block, chip, or powder types immediately after extraction. It took 120 minutes to prepare block types and 40 minutes to prepare powder. Clinical cases did not show any adverse response and the healing was favorable. Rapid preparation of autogenous teeth with the vacuum ultrasonic system could make the immediate one-day extraction and graft possible.

  • PDF

Study on a Real Time Quantitative Diagnostic Technique for Measuring CVD Precursors (CVD 공정의 전구체 잔존량 실시간 진단방법 연구)

  • Yun Ju-Young;Shin Yong-Hyoen;Chung Kwang-Hwa
    • Journal of the Korean Vacuum Society
    • /
    • v.14 no.3
    • /
    • pp.110-114
    • /
    • 2005
  • This study proposes an accurate method of monitoring precursor consumption in chemical vapor deposition (CVD) systems. Since precursor costs are significant, finding an efficient method to monitor precursor consumption is necessary One example is the use of non-contact and inexpensive ultrasonic sensors for determining the liquid level in a container. In this study, sensors based on ultrasonic techniques have been developed for monitoring the precursor consumption in a CVD system. Moreover, the prototype sensors developed in this study can be useful in the field of semiconductors.

A study on the Pollution Emissions of the Ultrasonic Fuel Feeding System in Gasoline Injection Vehicle (초음파 연료공급장치용 가솔린 분사식 자동차의 저공해화 연구)

  • 최관호;김봉석;류정인
    • Transactions of the Korean Society of Automotive Engineers
    • /
    • v.4 no.1
    • /
    • pp.86-95
    • /
    • 1996
  • This study was on the pollution emissions of the Ultrasonic fuel feeding system in gasoline injection vehicle. This work measured th SMD of the fuel, and compared the characteristics through chassis dynamometer and highway road test by the conventional vehicle. And this work measured vacuum degree, turbulence intensity and the rate of fuel consumption according to intake air velocity with swirler. The results are as followed; The effects of the vehicle installed the ultrasonic fuel feeding system are better than those of the conventional vehicle.

  • PDF

Development of Ultrasonic Machine with Force Controlled Position Servo System (가공력 제어 위치 서보 시스템을 이용한 초음파 가공기의 개발)

  • 장인배;이승범;전병희
    • Transactions of Materials Processing
    • /
    • v.13 no.3
    • /
    • pp.253-261
    • /
    • 2004
  • The machining technology for the brittle materials such as ceramics are applied to the fields of MEMS(micro electromechanical system) by the progress of new machining technologies such as Etching, Diamond machining, Micro drilling, EDM(Electro discharge machining), ECDM(Electro discharge machining), USM(Ultrasonic machining), LBM(Laser beam machining), EBM(Electron beam machining). Especially, the USM technology can be applied to the dieletric brittle materials such as silicon, borosilicate glass, silicon nitride, quartz and ceramics with high aspect ratio. The micro machining system with machining force controlled position servo is developed in this paper and the optimized ultrasonic machining algorithm is constructed by the force controlled position servo control. The load cell is adapted in the force measuring and the servo control algorithm, suit for the ultrasonic machining characteristics, is estabilished with using the PID auto-tunning functions at the PMAC system which is generally adapted in the field of robot industries. The precision force signal amplifier is constructed with high precision operational amplifier AD524. The vacuum adsorption chuck which is made of titanum and internal flow line is engraved, is used in the workpiece fixing. The mahining results by USM shows that there are some deviation between the force command and the actual machining force that the servo control algorithm should be applied in the machining procedures. Therefore, the constant force controlled position servo system is developed for the micro USM system and by the examination machining process in USM, the stable USM system is realized by tracking the average value of machining force.

A Study of the Measurements System in Electron Beam Welding (전자빔 용접 측정 시스템에 관한 연구)

  • Hong MinSung;Kim JongMin
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
    • /
    • 2005.05a
    • /
    • pp.258-263
    • /
    • 2005
  • Because of its high performance and accuracy, electron beam welding has an important role in industrial applications such as semi-conductor and LCD manufactures. Since its operation has been done in a vacuum room, it is very difficult to check out their weldability as well as the correct welding area of the specimen. In this study, a measurement system of the electron beam welding has been developed based on the 3-axis LVDT controlled table. In addition, the algorithm to tracking the welding line has been developed. Welded regions were measured by using an A-scan ultrasonic sensor only. Weldability of the aluminum specimen has been tested by newly developed measuring system. The results are compared with those by using an C-scan ultrasonic sensor, which show good agreements with each other.

  • PDF