• 제목/요약/키워드: vacuum ultrasonic system

검색결과 18건 처리시간 0.025초

Measurement Uncertainties for Vacuum Standards from a Low to an Ultra-high Vacuum

  • Hong, S.S.;Shin, Y.H.;Lim, J.Y.
    • Applied Science and Convergence Technology
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    • 제23권3호
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    • pp.103-112
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    • 2014
  • The Korea Research Institute of Standards and Science (KRISS) has three major vacuum systems: an ultrasonic interferometer manometer (UIM; Section II, Figs. 1 and 2) for a low vacuum, a static expansion system (SES; Section III, Figs. 3 and 4) for a medium vacuum, and an orifice-type dynamic expansion system (DES, Section IV, Figs. 5 and 6) for high and ultra-high vacuum systems. For each system, explicit measurement model equations with multiple variables are given. According to ISO standards, all of these system variable errors were used to calculate the expanded uncertainty (U). For each system, the expanded uncertainties (k = 1, confidence level = 95%) and relative expanded uncertainty (expanded uncertainty/generated pressure) levels are summarized in Table 4. Within the uncertainty limits, our bilateral and key comparisons [CCM.P-K4 (10 Pa to 1 kPa)] are extensive and in good agreement with those of other nations (Fig. 8 and Table 5).

진공측정표준의 불확도 평가모델 개발 (Development of Uncertainty Evaluation Model for Vacuum Measurement Standards)

  • 홍승수;임종연;신용현
    • 한국진공학회지
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    • 제20권5호
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    • pp.313-321
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    • 2011
  • 한국표준과학연구원(Korea Research Institute of Standards and Science, KRISS)에는 초음파간섭 수은주압력계(ultrasonic interferometer manometer, UIM), 정적형표준기(static volume expansion system, SVES), 오리피스형 정압표준기(orifice-type dynamic expansion system, ODES) 등 세 개의 주요한 국가 진공표준기가 있다. 이 장치들의 불확도 평가를 위해 각각 변수들의 측정 및 계산 모델을 개발하였다. 국제표준화기구(International Organization for Standardization, ISO) 지침에 따라 표준기들의 확장불확도(expanded uncertainty, U)를 계산하였다.

화학증착 시스템에서의 파이프내 오염입자 관찰을 위한 초음파 및 진동 진단법의 비교연구 (Comparison of Utrasonic and Vibration Diagnostic Techniques for the Inspection of Pipes in CVD System)

  • 윤주영;성대진;신용현;이지훈;문두경;강상우
    • 한국진공학회지
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    • 제15권4호
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    • pp.421-426
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    • 2006
  • 화학증착 시스템의 파이프내 발생하는 오염입자의 진단을 위하여 초음파 및 진동진단법을 각각 비교, 연구하였다. 초음파 진단의 경우 파이프 외벽에 초음파 센서를 부착하여 펄스를 가한 후 에코 분석을 통해 파이프내벽의 오염입자를 관찰하였고 진동 진단의 경우 파이프외벽에 부착된 진통발생기를 통해 파이프에 인위적인 진동을 발생시켜 여기에서 발생되는 주파수 차이를 분석, 파이프내의 오염입자 여부를 관찰하였다. 초음파 진단의 경우, 오염입자가 파이프 내벽에 부착되어 있을 때는 효과가 좋았으나 오염입자가 시간이 지남에 따라 건조되어 파이프 내벽에서 떨어져 나와 파이프 내벽과 오염입자사이에 틈새가 생길 경우 초음파 펄스는 이 공간을 통과하지 못하고 파이프 내벽에서 다시 반사되어 오염입자를 진단하지 못하는 경우가 발생하였다. 따라서 초음파 진단법으로는 진공장비의 오염입자 관찰에 재현성을 보여주지 못하는 것으로 확인되었다. 반면 진동진단법의 경우 위와 같이 일정시간이 지난 동일한 샘플의 경우에서도 오염입자에 의한 차이가 관찰되었다, 즉 파이프내 오염입자가 존재시 새 파이프에 비해 진동음이 저주파대로 떨어짐이 확인되어 추후 화학증착 시스템의 파이프내 오염입자 모니터링 연구에 가장 효과적인 방법으로 기대된다.

저진공에서 초고진공까지의 국가 진공표준 (National Vacuum Standards from Low to Ultra-high Vacuum)

  • 홍승수;임인태;신용현;정광화
    • 한국진공학회지
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    • 제15권1호
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    • pp.1-13
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    • 2006
  • 한국표준과학연구원 진공연구실은 1983년 설립된 이후 초음파간섭 수은주압력계, 정적형 표준기 및 동적교정장치 등을 개발하여 저진공에서 초고진공까지 국가 진공표준의 확립 및 보급을 하고 있다. 본 연구에서는 각각의 진공표준기, 국제표준화기구의 권고에 의한 불확도 분석방법, 그리고 핵심측정표준 국제비교 및 국가간 상호비교 결과를 소개한다.

Study on the heat and mass transfer in ultrasonic assisting vacuum membrane distillation

  • Guo, Hao;Peng, Changsheng;Ma, Weifang;Yuan, Hetao;Yang, Ke
    • Membrane and Water Treatment
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    • 제8권3호
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    • pp.293-310
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    • 2017
  • An ultrasonic assisting vacuum membrane distillation (VMD) system was designed to promote the heat and mass transfer in membrane distillation (MD) process. Both the effects of operating conditions and ultrasonic parameters to permeation flux in this process were investigated; the heat and mass transfer mechanism was also being discussed in this paper. The results showed that the performance of VMD process was improved significantly by ultrasonic assisting. The permeation flux was boosted at a certain feed solution temperature, pressure at permeate side and feed solution velocity whether or not to PP and PTFE. The results also indicated that ultrasonic power and frequency also was the key factor affecting the mass and transfer efficiencies. The feed side transfer coefficient ($K_f$), corresponding to ultrasonic power ($K_f=4.406-0.026{\times}P+7.824{\times}10^{-5}{\times}P^2$) and ultrasonic frequency ($K_f=0.941+0.598{\times}f-0.012{\times}f^2+6.283{\times}10^{-5}f^3$), was obtained and employed in the modeling of ultrasonic assisting VMD process. The modeling results showed that the calculated value of $K_f$ aligned with experimental results well. Both variations of temperature polarization coefficient (TPC) and concentration polarization coefficient (CPC) were studied based on the obtained data. The results showed that both TPC and CPC were improved obviously by the ultrasonic parameters.

즉시 탈회 치아이식재를 사용한 치조골 재건술 (Immediate Autogenous Fresh Demineralized Tooth (Auto-FDT) Graft for Alveolar Bone Reconstruction)

  • 이은영
    • 대한치과의사협회지
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    • 제54권5호
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    • pp.348-355
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    • 2016
  • Ideal autogenous or allogenic bone graft materials should provide 1) stabilization of blood clot, 2) scaffolds for cellular proliferation and differentiation, 3) release of osteogenic growth factors, 4) appropriate resorption profile for remodeling of new bone. Teeth, especially dentin, mostly contain hydroxyapatite and type I collagen which are similar to bone, and could be valuable graft material. Clinically teeth are used as calcined or demineralized forms. Demineralized form of dentin can be more effective as a graft material. But a conventional decalcification method takes time and long treatment time may give negative effects to various osteogenic proteins in dentin. Author used a new clinical method to prepare autogenous teeth, which could be grafted into the removal defects immediately after extraction using vacuum ultrasonic system. The process could be finished within two hours regardless of the form (powder, chip or block). Teeth were processed to graft materials in block, chip, or powder types immediately after extraction. It took 120 minutes to prepare block types and 40 minutes to prepare powder. Clinical cases did not show any adverse response and the healing was favorable. Rapid preparation of autogenous teeth with the vacuum ultrasonic system could make the immediate one-day extraction and graft possible.

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CVD 공정의 전구체 잔존량 실시간 진단방법 연구 (Study on a Real Time Quantitative Diagnostic Technique for Measuring CVD Precursors)

  • 윤주영;신용현;정광화
    • 한국진공학회지
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    • 제14권3호
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    • pp.110-114
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    • 2005
  • 본 연구는 화학증착(Chemical Vapor Deposition, CVD) 시스템에서 전구체 소모량을 모니터링 하기 위한 방법이다. 전구체는 가격이 매우 비싸기 때문에 이를 모니터링 하기 위한 효과적인 방법이 요구된다. 하나의 예로서 용기내 수위진단을 할 수 있는 초음파 센서를 들 수 있는데 이는 비접촉식이고 가격이 저렴한 유리한 점이있다 본 연구에서는, CVD 시스템에서의 전구체 소모량 모니터링을 위한 초음파 진단기술 개발에 관해 연구한다. 또한 반도체 생산라인에 적용이 가능한 실제 진단장치를 개발, 적용한다.

초음파 연료공급장치용 가솔린 분사식 자동차의 저공해화 연구 (A study on the Pollution Emissions of the Ultrasonic Fuel Feeding System in Gasoline Injection Vehicle)

  • 최관호;김봉석;류정인
    • 한국자동차공학회논문집
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    • 제4권1호
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    • pp.86-95
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    • 1996
  • This study was on the pollution emissions of the Ultrasonic fuel feeding system in gasoline injection vehicle. This work measured th SMD of the fuel, and compared the characteristics through chassis dynamometer and highway road test by the conventional vehicle. And this work measured vacuum degree, turbulence intensity and the rate of fuel consumption according to intake air velocity with swirler. The results are as followed; The effects of the vehicle installed the ultrasonic fuel feeding system are better than those of the conventional vehicle.

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가공력 제어 위치 서보 시스템을 이용한 초음파 가공기의 개발 (Development of Ultrasonic Machine with Force Controlled Position Servo System)

  • 장인배;이승범;전병희
    • 소성∙가공
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    • 제13권3호
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    • pp.253-261
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    • 2004
  • The machining technology for the brittle materials such as ceramics are applied to the fields of MEMS(micro electromechanical system) by the progress of new machining technologies such as Etching, Diamond machining, Micro drilling, EDM(Electro discharge machining), ECDM(Electro discharge machining), USM(Ultrasonic machining), LBM(Laser beam machining), EBM(Electron beam machining). Especially, the USM technology can be applied to the dieletric brittle materials such as silicon, borosilicate glass, silicon nitride, quartz and ceramics with high aspect ratio. The micro machining system with machining force controlled position servo is developed in this paper and the optimized ultrasonic machining algorithm is constructed by the force controlled position servo control. The load cell is adapted in the force measuring and the servo control algorithm, suit for the ultrasonic machining characteristics, is estabilished with using the PID auto-tunning functions at the PMAC system which is generally adapted in the field of robot industries. The precision force signal amplifier is constructed with high precision operational amplifier AD524. The vacuum adsorption chuck which is made of titanum and internal flow line is engraved, is used in the workpiece fixing. The mahining results by USM shows that there are some deviation between the force command and the actual machining force that the servo control algorithm should be applied in the machining procedures. Therefore, the constant force controlled position servo system is developed for the micro USM system and by the examination machining process in USM, the stable USM system is realized by tracking the average value of machining force.

전자빔 용접 측정 시스템에 관한 연구 (A Study of the Measurements System in Electron Beam Welding)

  • 홍민성;김종민
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2005년도 춘계학술대회 논문집
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    • pp.258-263
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    • 2005
  • Because of its high performance and accuracy, electron beam welding has an important role in industrial applications such as semi-conductor and LCD manufactures. Since its operation has been done in a vacuum room, it is very difficult to check out their weldability as well as the correct welding area of the specimen. In this study, a measurement system of the electron beam welding has been developed based on the 3-axis LVDT controlled table. In addition, the algorithm to tracking the welding line has been developed. Welded regions were measured by using an A-scan ultrasonic sensor only. Weldability of the aluminum specimen has been tested by newly developed measuring system. The results are compared with those by using an C-scan ultrasonic sensor, which show good agreements with each other.

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