• Title/Summary/Keyword: ultra-thin film

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Elctrical Properties of DLPC Lipid Membrane Fabricated on the Silicon Wafer (실리콘 웨이퍼 위에 제작된 DLPC 지질막의 전기적특성)

  • 이우선;김충원;이강현;정용호;김남오;김상용
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.11 no.12
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    • pp.1115-1121
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    • 1998
  • MLS capacitor with lipid ultra thin films were deposited by Langmuir-Blodgett (LB) method on the silicon wafer. The current versus voltage and capacitance versus voltage relationships are depend on the applied voltage, electrode area and electrode materials. LB films deposited were made of L-$\alhpa$-DLPC, the 1 layer’s thickness of 35${\AA}$ was measured by ellipsometer. And MLS capacitor with different electrode materials, the work function of these materials was investigated to increase the leakage current. The result indicated the lower leakage current and very high saturation value of capacitance was reached within 700-800 pF when the two electrode was Ag. And $\varepsilon$1, $\varepsilon$2 versus photon energy showed good film formation.

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Fabrication of Ultra Thin Films with (N-docosyl quinolinium)-TCNQ(1:2) complex by the Langmuir -Blodgett Technique (Langmuir-Blodgett법을 이용한 (N-docosyl quinolinium)-TCNQ(1:2) 착물의 초박막 제작)

  • Jeong, Soon-Wook;Jeong, Hwae-Gul
    • Korean Journal of Materials Research
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    • v.9 no.12
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    • pp.1229-1233
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    • 1999
  • In this research, We fabricated Langmuir-Blodgett(LB) ultra-thin films with (N-docosyl quinolinium)- TCNQ(1:2) complex. The characteristics ${\pi}$-A isotherms were studied to find optimum conditions of deposition by varing temperature of subphase, compression speed of barrier and amount of spreading solution. Film formation was verified by measuring transfer ratio, maximum absorption of UV-vis spectra, capacitance and ellipsometry. From the results, it was concluded that the LB film formed well with molecular oder was fabricated.

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Thickness-dependent magnetic domain structures of Co ultra-thin film investigated by scanning transmission X-ray microscopy

  • Yoon, Ji-Soo;Kim, Namdong;Moon, Kyoung-Woong;Lee, Joo In;Kim, Jae-Sung;Shin, Hyun-Joon;Kim, Wondong
    • Current Applied Physics
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    • v.18 no.11
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    • pp.1185-1189
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    • 2018
  • Thickness-dependent magnetic domain structure of ultrathin Co wedge films (0.3 nm-1.0 nm) sandwiched by Pt layers was investigated by scanning transmission x-ray microscopy (STXM) employing X-ray magnetic circular dichroism (XMCD), utilizing elliptically polarized soft x-rays and electromagnetic fields, with a spatial resolution of 50 nm. The magnetic domain images measured at the Co $L_3$ edge showed the evolution of the magnetic domain structures from maze-like form to the bubble-like form as the perpendicular magnetic field was applied. The asymmetric domain expansion of a 500 nm-scale bubble domain was also measured when the in-plane and perpendicular external magnetic field were applied simultaneously.

Ultra low temperature polycrystalline silicon thin film transistor using sequential lateral solidification and atomic layer deposition techniques

  • Lee, J.H.;Kim, Y.H.;Sohn, C.Y.;Lim, J.W.;Chung, C.H.;Park, D.J.;Kim, D.W.;Song, Y.H.;Yun, S.J.;Kang, K.Y.
    • 한국정보디스플레이학회:학술대회논문집
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    • 2004.08a
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    • pp.305-308
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    • 2004
  • We present a novel process for the ultra low temperature (<150$^{\circ}C$) polycrystalline silicon (ULTPS) TFT for the flexible display applications on the plastic substrate. The sequential lateral solidification (SLS) was used for the crystallization of the amorphous silicon film deposited by rf magnetron sputtering, resulting in high mobility polycrystalline silicon (poly-Si) film. The gate dielectric was composed of thin $SiO_2$ formed by plasma oxidation and $Al_2O_3$ deposited by plasma enhanced atomic layer deposition. The breakdown field of gate dielectric on poly-Si film showed above 6.3 MV/cm. Laser activation reduced the source/drain resistance below 200 ${\Omega}$/ㅁ for n layer and 400 ${\Omega}$/ㅁ for p layer. The fabricated ULTPS TFT shows excellent performance with mobilities of 114 $cm^2$/Vs (nMOS) and 42 $cm^2$/Vs (pMOS), on/off current ratios of 4.20${\times}10^6$ (nMOS) and 5.7${\times}10^5$ (PMOS).

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Organic TFT fabricated on ultra-thin flexible plastic with a rigid glass support

  • Son, Young-Rae;Han, Seung-Hoon;Lee, Sun-Hee;Lee, Ki-Jung;Choi, Min-Hee;Choo, Dong-Joon;Jang, Jin
    • 한국정보디스플레이학회:학술대회논문집
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    • 2007.08a
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    • pp.756-759
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    • 2007
  • We have fabricated pentacene OTFT on ultra-thin flexible polyimide film with a rigid glass support. Polyimide film of the thickness of $10{\mu}m$ has formed on glass by spin coating from the solution. After the entire OTFT process, the OTFT exhibited a fieldeffect mobility of $0.4\;cm^2/Vs$, an $I_{on}/I_{off}$ ratio of $10^7$ and a subthreshold swing of 0.7 V/dec. The OTFT on polyimide film has been detached from the glass support and laminated on a plastic support of $130\;{\mu}m-thick$ PET film. After the detach process, in spite of the degrading of its field-effect mobility, the OTFT showed high $I_{on}/I_{off}$ as high $as{\sim}10^6$.

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Characteristics of As-doped ZnO thin films with various buffer layer temperatures prepared by PLD method (PLD법을 이용한 Buffer Layer 증착온도에 따른 As-doped ZnO 박막의 특성)

  • Lee, Hong-Chan;Shim, Kwang-Bo;Oh, Young-Jei
    • Journal of Sensor Science and Technology
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    • v.15 no.2
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    • pp.84-89
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    • 2006
  • Highly concentrated p-type ZnO thin films can be obtained by doping of N, P and As elements. In this study, undoped ZnO buffer layers were prepared on a (0001) sapphire substrate by a ultra high vaccum pulsed laser deposition(UHV-PLD) method. ZnO buffer layers were deposited with various deposition temperature($400{\sim}700^{\circ}C$) at 350 mtorr of oxygen working pressure. Arsenic doped(1 wt%) ZnO thin films were deposited on the ZnO buffer layers by UHV-PLD. Crystallinity of the samples were evaluated by X-ray diffractometer and scanning electron microscopy. Optical, electrical properties of the ZnO thin films were estimated by photoluminescence(PL) and Hall measurements. The optimal condition of the undoped ZnO buffer layer for the deposition of As-doped ZnO thin films was at $600^{\circ}C$ of deposition temperature.