Elctrical Properties of DLPC Lipid Membrane Fabricated on the Silicon Wafer

실리콘 웨이퍼 위에 제작된 DLPC 지질막의 전기적특성

  • 이우선 (조선대학교 전기공학과) ;
  • 김충원 (조선대학교 컴퓨터공학과) ;
  • 이강현 (조선대학교 전자정보통신공학부) ;
  • 정용호 (서강정보대학 열냉동과) ;
  • 김남오 (주선대학교 전기공학과) ;
  • 김상용 ((주)이남반도체)
  • Published : 1998.12.01

Abstract

MLS capacitor with lipid ultra thin films were deposited by Langmuir-Blodgett (LB) method on the silicon wafer. The current versus voltage and capacitance versus voltage relationships are depend on the applied voltage, electrode area and electrode materials. LB films deposited were made of L-$\alhpa$-DLPC, the 1 layer’s thickness of 35${\AA}$ was measured by ellipsometer. And MLS capacitor with different electrode materials, the work function of these materials was investigated to increase the leakage current. The result indicated the lower leakage current and very high saturation value of capacitance was reached within 700-800 pF when the two electrode was Ag. And $\varepsilon$1, $\varepsilon$2 versus photon energy showed good film formation.

Keywords

References

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