• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 춘계학술대회
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• pp.1087-1091
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• 2004

In this study, the ultra precision centerless grinder for ferrule grinding was designed. The centerless grinder is composed of the high damping concrete bed, grinding wheel spindle unit, regulating wheel spindle unit, feeding table and dressing unit. For a newly developed centerless grinder, hydrostatic system with high precision feeding and high stiffness was proposed. The grinding and regulating wheel spindle units were composed of hydrostatic spindle and feeding table was hydrostatic table. The prototype of hydrostatic table was manufactured and tested.

• 한국기계가공학회지
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• 제5권4호
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• pp.27-32
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• 2006

This study aims to find the optimal cutting conditions, when are nonferrous metals(aluminum and silicon) are machined with diamond tool of diamond turning machine. Diamond turning machine has been widely used in manufacturing optical reflectors of nonferrous metals. Such as aluminium and copper are easy to be machined because of their proper ductility. But optical crystals being discussed here are characterized by their high brittleness which makes it difficult to obtain high quality optical surfaces on them. The purpose of this study is to find the optimum machining conditions for ductile cutting of silicon and aluminium.

• 한국기계가공학회지
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• 제8권3호
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• pp.1-6
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• 2009

This paper presents a geometrical error compensation of tool alignment for sharp edge bite on B axis controlled machine. In precision micro patterning, bite alignment is crucial parameter for machined surface. To decrease bite alignment error, plus tilted bite from B axis center is touched to reference work piece(pin gauge) and checked the deviation from original position. Same process is repeated for maximum touch deviation value. From this touched position value, wheel alignment error in X axis and Z axis can be calculated on B axis center. Experimental results show that this compensation method is efficient to correct sharp edge bite alignment.

• 한국생산제조학회지
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• 제25권2호
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• pp.143-148
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• 2016

A micro end mill is one of the precise tools used in machining ultra-precision products such as microchannel and micropatterned mold. To achieve the required precision of these products, several studies investigated the cutting force, burr formation, and burr generation mechanism of micro end mills; however, there are few studies on the alignment of micro tools, which is the foundation of machining. Hence, in this investigation, relation expressions were derived to determine the relation between the misalignment parameters and the machining accuracy. At the same time, the effect of the machining parameters was analyzed using a multiple linear regression analysis and the analysis of variance. The results indicate that the tilting angle of a micro tool has more influence on the machining accuracy than other parameters.

• 한국공작기계학회논문집
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• 제17권4호
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• pp.29-34
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• 2008

Application of ceramic has increased due to excellent mechanical properties, and machining of ceramic has demanded gradually a precision surface machining. For decreasing the surface roughness, the control of IED lapping parameters is very important. This paper deal with the analysis of the process parameters such as applied forces, percentage of h-BN and IED lapping time, developed based on Taguchi method. Also, SEM was used for monitoring of a machinable ceramic surface.

• International Journal of Precision Engineering and Manufacturing
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• 제8권2호
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• pp.3-8
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• 2007

A machining system that generates accurate relative motions between the tool and workpiece is required to realize ultra precise machining or measurements. Accuracy improvements for each element of the machine are also required. This paper proposes a machining system that uses a compensation device for the six-degree-of-freedom (6-DOF) motion error between the tool and workpiece. The compensation device eliminates elastic and thermal errors of the joints and links due to temperature fluctuations and external forces. A hexapod parallel kinematics mechanism installed between the tool spindle and surface plate is passively actuated by a conventional machine. Then the parallel mechanism measures the 6-DOF motions. We describe the conception and fundamentals of the system and test a passively extensible strut with a compensation device for the joint errors.

• International Journal of Precision Engineering and Manufacturing
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• 제8권2호
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• pp.49-53
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• 2007

In this study, we investigated experimentally the potential of a planer positioning mechanism with three degrees of freedom using a flexure guide and an electromagnetic linear motor. The goal was to produce a multi-axis positioning system with nanometric resolution over a 1-mm stroke. An $X-Y-\theta$ stage was designed based on previous results from a single-axis prototype and was constructed with a flexure guide mechanism and voice coil motor type linear actuators. We examined the necessity of a driving method and control system to ensure high resolution for multi-axis positioning. Experiments were conducted to evaluate the performance, and the results confirmed the mechanism's potential; fine point-to-point (PTP) positioning was achieved over a 1-mm stroke, with a resolution of 2 nm for translation in X-Y and 0.01 asec for yaw in $\theta$.

• 한국정밀공학회지
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• 제27권6호
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• pp.39-46
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• 2010

Linear induction motor is adopted as an actuator of the planar stage. An inherently poor characteristic at zero or ultra-low speed zone of the induction motor is remarkably improved due to a recent development of power electronic semiconductor technology and a spatial vector control theory. At present, a servo response speed of the induction motor reaches 90 percent of one of PM synchronous or BLDC motor. Specially, as a secondary of the induction motor can be constructed using uniform conducting sheets, there is no periodic force ripple as in PM motors. So, the induction motor can be superior to another driving means under a certain condition. This paper discusses the overall development procedure of non-contact planar stage with a big workspace using linear induction motors.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.81-84
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• 2005

We suggest flux quantum-based mechanism for force realization in the sub-pico-Newton range. By controlling the number of flux quantum in a superconducting ring, a force can be created as an integer multiple of a constant force step. For a 50 nm-thick Nb ring with the inner and outer radii of $5{\mu}m\;and\;10{\mu}m$, respectively, the force step is estimated to be 165 fN, assuming the magnetic field gradient of 10 T/m. We also estimated a maximum force limit to be $1\sim2$ pN.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.685-688
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• 2005

In the micro electrochemical machining (MECM) using ultra short pulses, the machining rate is closely related to the tool electrode area. The machining rate varies according to the machining depth or the immersion depth. When using insulated tool electrodes, those depths do not matter. In addition, micro structures with high machining depth can be fabricated because the machining characteristics do not vary with the machining depth. Another advantage of insulated electrodes is prevention of taper shape. Micro structures with high machining depth or high aspect ratio were fabricated using insulated tool electrodes.