• Journal of the Optical Society of Korea
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• 제19권6호
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• pp.687-694
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• 2015

A photoluminescence (PL) imaging method using a vision camera was employed to inspect InGaN/GaN quantum-well light-emitting diode (LED) epi-wafers. The PL image revealed dark spot defective regions (DSDRs) as well as a spatial map of integrated PL intensity of the epi-wafer. The Shockley-Read-Hall (SRH) nonradiative recombination coefficient increased with the size of the DSDRs. The high nonradiative recombination rates of the DSDRs resulted in degradation of the optical properties of the LED chips fabricated at the defective regions. Abnormal current-voltage characteristics with large forward leakages were also observed for LED chips with DSDRs, which could be due to parallel resistances bypassing the junction and/or tunneling through defects in the active region. It was found that the SRH nonradiative recombination process was dominant in the voltage range where the forward leakage by tunneling was observed. The results indicated that the DSDRs observed by PL imaging of LED epi-wafers were high density SRH nonradiative recombination centers which could affect the optical and electrical properties of the LED chips, and PL imaging can be an inspection method for evaluation of the epi-wafers and estimation of properties of the LED chips before fabrication.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.448-448
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• 2010

Magnetic random access memory (MRAM) has made a prominent progress in memory performance and has brought a bright prospect for the next generation nonvolatile memory technologies due to its excellent advantages. Dry etching process of magnetic thin films is one of the important issues for the magnetic devices such as magnetic tunneling junctions (MTJs) based MRAM. CoFeB is a well-known soft ferromagnetic material, of particular interest for magnetic tunnel junctions (MTJs) and other devices based on tunneling magneto-resistance (TMR), such as spin-transfer-torque MRAM. One particular example is the CoFeB - MgO - CoFeB system, which has already been integrated in MRAM. In all of these applications, knowledge of control over the etching properties of CoFeB is crucial. Recently, transferring the pattern by using milling is a commonly used, although the redeposition of back-sputtered etch products on the sidewalls and the low etch rate of this method are main disadvantages. So the other method which has reported about much higher etch rates of >$50{\AA}/s$ for magnetic multi-layer structures using $Cl_2$/Ar plasmas is proposed. However, the chlorinated etch residues on the sidewalls of the etched features tend to severely corrode the magnetic material. Besides avoiding corrosion, during etching facets format the sidewalls of the mask due to physical sputtering of the mask material. Therefore, in this work, magnetic material such as CoFeB was etched in an ICP etching system using the gases which can be expected to form volatile metallo-organic compounds. As the gases, carbon monoxide (CO) and ammonia ($NH_3$) were used as etching gases to form carbonyl volatiles, and the etched features of CoFeB thin films under by Ta masking material were observed with electron microscopy to confirm etched resolution. And the etch conditions such as bias power, gas combination flow, process pressure, and source power were varied to find out and control the properties of magnetic layer during the process.

• 터널과지하공간
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• 제32권6호
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• pp.345-352
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• 2022

도심지 터널 건설에서 발파공법은 민원이 제기되는 문제점이 있어 적용에 제약받고 있다. 이에 대한 대안으로 TBM 및 기계굴착 공법 적용이 필수적으로 검토되고 있다. 이 중 쉴드 TBM(Tunnel Boring Machine)은 굴진과 세그먼트 체결이 번갈아 반복되며 굴진하는 공정을 가지고 있는데, 세그먼트 체결 동안 굴진을 멈추게 된다. 이러한 가동 정지시간을 최소화하고자 세그먼트 체결 중에도 가동할 수 있는 연속굴착형 TBM 기술이 개발되고 있다. 나선형 세그먼트의 굴진 반력을 확보하기 위해 추진잭을 개조하고 신뢰성을 확보하는 연구가 진행 중이다. 또한 체결 중 세그먼트를 제외한 나머지 부분의 추진잭을 가동하는 유압제어 및 유압시스템 설계기술이 개발될 예정이다. 본 보고는 연속굴착형 TBM 과제 중 부품개조 및 유압제어 기술에 대한 일부 내용을 소개한다.

• 한국지반공학회논문집
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• 제23권9호
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• pp.17-28
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• 2007

도심지 지하 터널은 주변 구조물의 존재 하에서 미고결성 저토피고 지반에 건설되는 경우가 많기 때문에 일반 산악 터널이나 대심도 암반층에 건설되는 지하공동과는 달리 터널 주변의 지반 변위, 지표면 침하와 기울기가 터널 설계의 주요인자가 된다. 본 논문은 도심지 NATM 터널의 변형거동에 대한 합리적 해석 방법의 확립을 위한 연구로서 변형률 연화 모델을 이용한 수치해석적인 방법을 통하여 굴착에 따른 지반 평가와 거동 예측을 수행하였다. 적용되어진 변형률 연화모델은 지반이 항복후 전단변형률의 증가에 따른 전단강성와 강도정수의 저하를 고려한 것이다. 현장 계측 결과는 시공중 설계물성치의 재설정에 이용되어졌다. 연화모델의 결과와 현장 계측값과의 비교에서 적용되어진 모델이 지표 침하, 기울기, 지중 침하 및 지중 수평변위의 변형 양상을 어느 정도 재현될 수 있음을 알 수 있었다. 본 논문에서 제안된 모델을 토대로 시공조건이 엄밀한 도심지 터널의 변형거동에 정량적인 평가 및 예측이 가능할 것으로 기대된다.

• 한국지반공학회:학술대회논문집
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• 한국지반공학회 1999년도 봄 학술발표회 논문집
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• pp.177-184
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• 1999

In soft ground tunneling, shield method is very good for safety of neighboring structures. Although shield tunnel method has the merits to minimize the deformation of ground around tunnel, ground deformations occurred until the material grouted in tail void hardens are inevitable. In this study, the effects of micropile used as one method to restrain the settlement of neighboring structures by the tail void are studied by laboratory model tests. As a basic test result, the effective direction of micropile and the restraint rate of settlement by micropile reinforcement are known.

• 한국신뢰성학회지:신뢰성응용연구
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• 제10권1호
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• pp.65-71
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• 2010

NAND-type SONOS with a separated double-gate FinFET structure (SDF-Fin SONOS) flash memory devices are proposed to reduce the unit cell size of the memory device and increase the memory density in comparison with conventional non volatile memory devices. The proposed memory device consists of a pair of control gates separated along the direction of the Fin width. There are two unique alternative technologies in this study. One is a channel doping method and the other is an oxide thickness variation method, which are used to operate the SDF-Fin SONOS memory device as two-bit. The fabrication processes and the device characteristics are simulated by using technology comuter-adided(TCAD). The simulation results indicate that the charge trap probability depends on the different channel doping concentration and the tunneling oxide thickness. The proposed SDG-Fin SONOS memory devices hold promise for potential application.

• 한국철도학회:학술대회논문집
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• 한국철도학회 2007년도 추계학술대회 논문집
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• pp.337-344
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• 2007

This paper is about the examination and selection of the special method applied to the railway tunnel which will lie under the road. Moreover, the road was constructed on the weak ground. Eventually, we select DSM, considering geological condition, stability during construction of the railway tunnel, and economic efficiency. The 3D-analysis, performed with PENTAGON-3D and MIDAS CIVIL-3D, shows that allowable standards are all satisfied. In the design of the railroad tunnel under the road at low depth, this paper will give useful data for the selection of the tunneling method.

• 자연, 터널 그리고 지하공간
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• 제22권1호
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• pp.26-35
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• 2020

Tunnelling to bypass major landslide areas is considered as a good and long-term environmentally friendly solution to reduce an existing hazard. In Norway, hundreds of kilometres of tunnels have been constructed in areas prone to landslides and snow avalanches. Although tunnelling is considered as an expensive mitigation strategy for bypassing landslides, analysis indicate that in some cases the cost of building a tunnel can be repaid by savings in driving costs (fuel) alone over a period of 5-10 years due to reduced driving distances. The other benefits of constructing tunnels in landslide areas include savings in time and increased safety. The Norwegian Method of Tunnelling (NMT) is considered safe, efficient and cost effective compared to other tunnelling techniques. Some aspects of NMT, which are considered safe and cost efficient, are presented. The application of updated rock support techniques, including reinforced ribs of shotctrete (RRS), which is a key component of the Norwegian Method of Tunnelling (NMT), is highlighted.

• Geomechanics and Engineering
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• 제20권5호
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• pp.421-432
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• 2020

Cutting of rocks is very common encountered in tunneling and mining during underground excavations. A deep understanding of rock-tool interaction can promote industrial applications significantly. In this paper, a distinct element method based approach, PFC^3D, is adopted to simulate the rock cutting under different operation conditions (cutting velocity, depth of cut and rake angle) and with various tool geometries (tip angle, tip wear and tip shape). Simulation results showed that the cutting force and accumulated number of cracks increase with increasing cutting velocity, cut depth, tip angle and pick abrasion. The number of cracks and cutting force decrease with increasing negative rake angle and increase with increasing positive rake angle. The numerical approach can offer a better insight into the rock-tool interaction during the rock cutting process. The proposed numerical method can be used to assess the rock cuttability, to estimate the cutting performance, and to design the cutter head.

• 한국철도학회:학술대회논문집
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• 한국철도학회 2005년도 추계학술대회 논문집
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• pp.860-865
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• 2005

In Korea, NATM (New Austrian Tunneling Method) has widely been used in order for constructing tunnels. The major support materials of the method are the shotcrete and rock bolt together with the arch-shaped tunnel section, which ensure the inherent strength of the rock masses. One of the most important features of the method is the feedback system between tunnel analyses and measurements, such as tunnel displacement and support stresses. This study, therefore, attempts to examine the difference in displacement and stresses between numerical results. and measurements in order for more practical design and construction of tunnels.