• Title/Summary/Keyword: thin-film type

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Effect of Channel Scaling on Zinc Oxide Thin-Film Transistor Prepared by Atomic Layer Deposition

  • Choi, Woon-Seop
    • Transactions on Electrical and Electronic Materials
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    • v.11 no.6
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    • pp.253-256
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    • 2010
  • Different active layer thicknesses for zinc oxide (ZnO) bottom-contact thin-film transistors (TFTs) were fabricated with a poly-4-vinyphenol polymeric dielectric using injector type atomic layer deposition. The properties of the ZnO TFTs were influenced by the active thickness and width-to-length (W/L) ratio of the device. The threshold voltage of ZnO TFTs shifted positively as the active layer thickness decreased, while the subthreshold slope decreased. The W/L ratio of ZnO TFTs also affected the mobility and subthreshold slope. An optimized TFT structure exhibited an on-tooff current ratio of above 106 with solid saturation.

properties of Metal/$ZrTiO_4$/Metal Capacitors for Microwave Applications (고주파 적용을 위한 금속/$ZrTiO_4$/금속 캐피시터 특성)

  • Park, Chang-Sun;Seon, Ho-Jeong
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.197-197
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    • 2008
  • There are fast growing demands for new dielectric materials for passive capacitors of RF-ICs and other wireless applications. One of the bulk microwave dielectric materials which have superior properties is $ZrTiO_4$ due to its large dielectric constant and high quality factor. Therefore, $ZrTiO_4$ is worth studying as a form of thin film to be applied for passive capacitors of integrated circuits. In this study, we fabricated metal-insulator-metal type capacitors with $ZrTiO_4$ dielectric thin film, and evaluated their capacitor properties.

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Fabrication and characterization of thin film asymmetric extrudedclosed-polygon type BLU light guide plate (박막적층 비대칭 Extruded-closed-polygon 형 BLU 도광판의 제작 및 평가)

  • Kim, Byeong-Gwon;Gu, Gyeong-Wan;Han, Chang-Seok;O, Dong-Cheol;Lee, Jae-Gak;Bae, Chang-Hwan
    • Proceedings of the Optical Society of Korea Conference
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    • 2009.10a
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    • pp.103-104
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    • 2009
  • We proposed the laminate thin film asymmetric Extruded-closed-polygon diffusion pattern that was able to improve the performance of back light unit. Developed a pattern of brightness and bright line, half-power angle attribute the improved performance in the uniform, and through the formation of a thin film stackable diffusion layer 970% improved perpendicularity brightness, and 580% improved horizontality brightness.

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The effect of annealing on the Characteristics of CdTe thin film (태양전지용 CdTe박막의 열처리에 따른 특성)

  • Nam, Jun-Hyun;Lee, Jae-Hyung;Park, Yong-Kwan
    • Proceedings of the KIEE Conference
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    • 1995.11a
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    • pp.332-334
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    • 1995
  • In this paper, structual, optical properties of CdTe thin films and photovoltaic properties of thin film CdS/CdTe solar cell prepared by thermal vacuum evaporation were studied. The crystal structure of CdTe films was zircblend type with preferential orientation of the (111)plane parallel to the substrate. The heat treatment appears to stabilize this structure. The result of optical absorption and transmittance show that solar radiation with energy larger than bandgap is almost completely absorbed within an about $2{\mu}m$ thickness of the evaporated CdTe layer and transmittance of the CdTe film was larger with increasing annealing temperature. It was found that CdS/CdTe solar cell characteristics were improved by the heat treatment.

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Semiconductor Sensor for Detecting Freshness of Sea Foods (생선의 신선도 측정을 위한 반도체 센서)

  • Bak, Sung-Hyun;Kwon, Tae-Ha
    • Journal of the Korean Society of Fisheries and Ocean Technology
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    • v.29 no.4
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    • pp.272-278
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    • 1993
  • The trimethylamine-sensing characteristics of ZnO based thin film semiconductors and the sensitivity enhancement by squttering conditions have been investigated to develop a new type sensor for detecting fish freshness. The sensor fabricated with a 300nm of ZnO thin film with 4 wt% Al sub(2) O sub(3) and 1 wt% TiO sub(2) exhibited the highest sensitivity of 155 at 30$0^{\circ}C$ of working temperature and to the 240 ppm TMA gas. Deposition of ZnO thin film using a RF magnetron sputter was carried out at a pressure of 10 super(-2) Torr in pure oxygen gas with an RF power of 100W. The sensor exhibited a large response to the actual gases produced by a mackerel at an early stage of decomposition.

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The Fabrication of Ceramic Thin-Film Type Pressure Sensors for High-Temperature applications (고온용 세라믹 박막형 압력센서의 제작)

  • Kim, Jae-Min;Choi, Sung-Kyu;Chung, Gwiy-Sang
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.11a
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    • pp.456-459
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    • 2002
  • This paper describes fabrication and characteristics of ceramic pressure sensor for working at high temperature. The proposed pressure sensor consists of a Ta-N thin-film, patterned on a Wheatstone bridge configuration, sputter deposited onto thermally oxidized Si membranes with an aluminium interconnection layer. The fabricated pressure sensor presents a low temperature coefficient of resistance, high sensitivity, low non-linearity and excellent temperature stability. The sensitivity is 1.097~1.21mV/$V{\cdot}kgf/cm^2$ in the temperature range of $25{\sim}200^{\circ}C$ and the maximum non-linearity is 0.43 %FS.

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Resist characteristics and molecular structure control of polystyrene by plasma polymerization method (플라즈마중합법에 의한 폴리스티렌의 분자구조 제에 및 레지스트 특성 조사)

  • 박종관;김영봉;김보열;임응춘;이덕출
    • The Transactions of the Korean Institute of Electrical Engineers
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    • v.45 no.3
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    • pp.438-443
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    • 1996
  • The effect of plasma polymerization conditions on the structure of the plasma polymerized styrene were investigated by using Fourier Transform Infrared Ray(FT-IR), Differential Scanning Calorimetry (DSC), Gel Permeation Chromatography(GPC). Plasma polymerized thin film was prepared using an interelectrode inductively coupled gas-flow-type reactor. We show that polymerization parameters of thin film affect sensitivity and etching resistance of plasma polymerized styrene is 1.41~3.93, and deposition rate of that are 32~383[.angs./min] with discharge power. Swelling and etching resistance becomes more improved with increasing discharge power during plasma polymerization. (author). 11 refs., 10 figs., 1 tab.

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A Study on the MgO thin film prepared by Unbalanced Magnetron Sputtering in AC PDP (AC PDP의 불평형 마그네트론 스파트링에 의해 형성된 MgO 박막의 특성에 관한 연구)

  • 김영기;박정후;김영대;박정후;조정수
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1999.05a
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    • pp.379-382
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    • 1999
  • In this paper, we investigated the characteristics of MgO thin film prepared by unbalanced magnetron sputtering(UBMS) in surface discharge type AC PDP The minimum discharge voltage is obtained for the sample of substrate bias voltage-10V. Moreover the anti-sputtering characteristics of MgO thin film by UBMS is improved about 40% than one of balanced magnetron sputtering(BMS)

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Fabrication of Metal Thin-Film Type Pressure Sensors (금속박막형 압력센서의 제작)

  • 최성규;김병태;남효덕;정귀상
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.11a
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    • pp.587-590
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    • 2000
  • This paper presents the characteristics of metal thin-film pressure sensors. The micro pressure sensors consists of a chrom thin-film, patterned on a Wheatstone bridge configuration, sputter-deposited onto thermally oxidized Si wafer an aluminium interconnection layer. The fabricated micro pressure sensors shows a low temperature coefficient of resistance, high-sensitivity, low non-linearity and excellent temperature stability. The sensitivity is 1.16~1.21 mV/V.kgf/$\textrm{cm}^2$ in the temperature range of 25~l0$0^{\circ}C$ and the maximum non-linearity is 0.21 %FS.

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Study of Surface Properties on Fouling Resistance of Reverse Osmosis Membranes (역삼투 분리막 표면 특성의 내오염성 상관 관계 연구)

  • 김노원
    • Membrane Journal
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    • v.12 no.1
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    • pp.28-40
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    • 2002
  • The primary objective of this study is to elucidate the contribution of the electrostatic and molecula structural properties of an active layer of the thin film compsite (TFC) membranes to fouling tendency. The studies of surface morphology and surface charge were very effective in understanding fouling behaviors of the reverse osmosis (RO) membranes which were the thin film composite type of ployamide. Results of microscopic morphology analyzed by atomic force microscopy (AFM) and surface charge analyzed by electrokinetic analyzer (EKA) showed important factors affecting the fouling of RO membranes. The active layer of the composite membrane possessing realtively neutral streaming charge and less roughness provided a RO membrane with slowly decreasing flux.