Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1999.05a
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- Pages.379-382
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- 1999
A Study on the MgO thin film prepared by Unbalanced Magnetron Sputtering in AC PDP
AC PDP의 불평형 마그네트론 스파트링에 의해 형성된 MgO 박막의 특성에 관한 연구
Abstract
In this paper, we investigated the characteristics of MgO thin film prepared by unbalanced magnetron sputtering(UBMS) in surface discharge type AC PDP The minimum discharge voltage is obtained for the sample of substrate bias voltage-10V. Moreover the anti-sputtering characteristics of MgO thin film by UBMS is improved about 40% than one of balanced magnetron sputtering(BMS)