• 제목/요약/키워드: thick films

검색결과 948건 처리시간 0.025초

CdSe/ZnS 나노결정 양자점 Pyrolysis 제조와 발광다이오드 소자로의 응용 (Pyrolysis Synthesis of CdSe/ZnS Nanocrystal Quantum Dots and Their Application to Light-Emitting Diodes)

  • 강승희;키란쿠마르;손기철;허훈회;김경현;허철;김의태
    • 한국재료학회지
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    • 제18권7호
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    • pp.379-383
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    • 2008
  • We report on the light-emitting diode (LED) characteristics of core-shell CdSe/ZnS nanocrystal quantum dots (QDs) embedded in $TiO_2$thin films on a Si substrate. A simple p-n junction could be formed when nanocrystal QDs on a p-type Si substrate were embedded in ${\sim}5\;nm$ thick $TiO_2$ thin film, which is inherently an n-type semiconductor. The $TiO_2$ thin film was deposited over QDs at $200^{\circ}C$ using plasma-enhanced metallorganic chemical vapor deposition. The LED structure of $TiO_2$/QDs/Si showed typical p-n diode currentvoltage and electroluminescence characteristics. The colloidal core-shell CdSe/ZnS QDs were synthesized via pyrolysis in the range of $220-280^{\circ}C$. Pyrolysis conditions were optimized through systematic studies as functions of synthesis temperature, reaction time, and surfactant amount.

Characterization of an Oxidized Porous Silicon Layer by Complex Process Using RTO and the Fabrication of CPW-Type Stubs on an OPSL for RF Application

  • Park, Jeong-Yong;Lee, Jong-Hyun
    • ETRI Journal
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    • 제26권4호
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    • pp.315-320
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    • 2004
  • This paper proposes a 10-${\mu}m$ thick oxide layer structure that can be used as a substrate for RF circuits. The structure has been fabricated using an anodic reaction and complex oxidation, which is a combined process of low-temperature thermal oxidation (500 $^{\circ}C$ for 1 hr at $H_2O/O_2$) and a rapid thermal oxidation (RTO) process (1050 ${\circ}C$, for 1 min). The electrical characteristics of the oxidized porous silicon layer (OPSL) were almost the same as those of standard thermal silicon dioxide. The leakage current density through the OPSL of 10 ${\mu}m$ was about 10 to 50 $nA/cm^2$ in the range of 0 to 50 V. The average value of the breakdown field was about 3.9 MV/cm. From the X-ray photo-electron spectroscopy (XPS) analysis, surface and internal oxide films of OPSL prepared by a complex process were confirmed to be completely oxidized. The role of the RTO process was also important for the densification of the porous silicon layer (PSL) oxidized at a lower temperature. The measured working frequency of the coplanar waveguide (CPW) type short stub on an OPSL prepared by the complex oxidation process was 27.5 GHz, and the return loss was 4.2 dB, similar to that of the CPW-type short stub on an OPSL prepared at a temperature of 1050 $^{\circ}C$ (1 hr at $H_2O/O_2$). Also, the measured working frequency of the CPW-type open stub on an OPSL prepared by the complex oxidation process was 30.5 GHz, and the return was 15 dB at midband, similar to that of the CPW-type open stub on an OPSL prepared at a temperature of $1050^{\circ}C$ (1 hr at $H_2O/O_2$).

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쌀전분으로부터 분리한 아밀로오스와 아밀로펙틴 혼합겔의 형태학적 구조 (Microstructure of Recombinated Gels of Amylose and Amylopectin Isolated from Rice Starch)

  • 백만희;신말식
    • 한국식품과학회지
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    • 제31권5호
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    • pp.1171-1177
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    • 1999
  • 쌀전분으로부터 분리한 아밀로오스와 아밀로펙틴이겔을 형성할 수 있는 최저농도로 아밀로오스와 아밀로펙틴 혼합겔을 제조하여 주사전자현미경과 X-선 회절기를 이용하여 겔 구조를 관찰하였다. 겔을 형성할 수 있는 최저농도인 용해성 아밀로오스 1.08% 농도에 아밀로펙틴을 $1.5%{\sim}7%$ 첨가하면 겔 그물망구조가 잘 형성되었고, 아밀로펙틴을 2%와 3% 첨가한 겔은 저장에 따라 $2{\theta}\;=\;17.0^{\circ}$에서 피크가 커졌다. 15% 아밀로오스/아밀로펙틴 혼합겔을 저장했을 때 아밀로오스 함량이 높을수록 단단하고 안정된 그물망구조를 이루었으며 생전분에서의 겔형성 양상과는 달리 아밀로오스와 아밀로펙틴이 함께 겔메트릭스를 이루는데 참여하는 것으로 생각되었고, 아밀로오스 함량이 증가할수록 $2{\theta}\;=\;17.0^{\circ}$에서 피크의 크기와 결정강도는 커졌다.

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Li 도핑된 NiO 합성 및 열전식 수소센서에의 적용 (Synthesis of Li-doped NiO and its application of thermoelectric gas sensor)

  • 한치환;한상도;김병권
    • 한국수소및신에너지학회논문집
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    • 제16권2호
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    • pp.136-141
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    • 2005
  • Li-doped NiO was synthesized by molten salt method. $LiNO_3$-LiOH flux was used as a source for Li doping. $NiCl_2$ was added to the molten Li flux and then processed to make the Li-doped NiO material. Li:Ni ratios were maintained from 5:1 to 30:1 during the synthetic procedure and the Li doping amount of synthesized materials were found between 0.086-0.190 as a Li ion to Ni ion ratio. Li doping did not change the basic cubic structural characteristics of NiO as evidenced by XRD studies, however the lattice parameter decreased from 0.41769nm in pure NiO to 0.41271nm as Li doping amount increased. Hydrogen gas sensors were fabricated using these materials as thick films on alumina substrates. The half surface of each sensor was coated with the Pt catalyst. The sensor when exposed to the hydrogen gas blended in air, heated up the catalytic surface leaving rest half surface (without catalyst) cold. The thermoelectric voltage thus built up along the hot and cold surface of the Li-doped NiO made the basis for detecting hydrogen gas. The linearity of the voltage signal vs $H_2$ concentration was checked up to 4% of $H_2$ in air (as higher concentrations above 4.65% are explosive in air) using Li doped NiO of Li ion/Ni ion=0.111 as the sensor material. The response time T90 and the recovery time RT90 were less than 25 sec. There was minimum interference of other gases and hence $H_2$ gas can easily be detected.

전도성 AFM 탐침에 의한 YBa2Cu3O7-x 스트립 라인의 산화피막 형성 (Anodization Process of the YBa2Cu3O7-x Strip Lines by the Conductive Atomic Force Microscope Tip)

  • 고석철;강형곤;임성훈;한병성;이해성
    • 한국전기전자재료학회논문지
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    • 제17권8호
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    • pp.875-881
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    • 2004
  • Fundamental results obtained from an atomic force microscope (AFM) chemically-induced direct nano-lithography process are presented, which is regarded as a simple method for fabrication nm-scale devices such as superconducting flux flow transistors (SFFTs) and single electron tunneling transistors (SETs). Si cantilevers with Pt coating and with 30 nm thick TiO coating were used as conducting AFM tips in this study. We observed the surfaces of superconducting strip lines modified by AFM anodization' process. First, superconducting strip lines with scan size 2 ${\mu}{\textrm}{m}$${\times}$2 ${\mu}{\textrm}{m}$ have been anodized by AFM technology. The surface roughness was increased with the number of AFM scanning, The roughness variation was higher in case of the AFM tip with a positive voltage than with a negative voltage in respect of the strip surface. Second, we have patterned nm-scale oxide lines on ${YBa}-2{Cu}_3{O}_{7-x}$ superconducting microstrip surfaces by AFM conductive cantilever with a negative bias voltage. The ${YBa}-2{Cu}_3{O}_{7-x}$ oxide lines could be patterned by anodization technique. This research showed that the critical characteristics of superconducting thin films were be controlled by AFM anodization process technique. The AFM technique was expected to be used as a promising anodization technique for fabrication of an SFFT with nano-channel.

압전박막을 이용한 감압전장효과 트랜지스터(PSFET)의 동작 특성 (The Operational Characteristics of a Pressure Sensitive FET Sensor using Piezoelectric Thin Films)

  • 양규석;조병욱;권대혁;남기홍;손병기
    • 센서학회지
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    • 제4권2호
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    • pp.7-13
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    • 1995
  • MOSFET의 전장효과와 압전물질의 압전효과를 결합한 새로운 FET형 반도체압력소자(PSFET : pressure sensitive field effect transistor)를 제조하고 동작 특성을 조사하였다. PSFET의 압전박막은 RF 마그네트론 스퍼터링으로 ZnO박막을 약 $5000{\AA}$ 게이트 위에 성막하였다. ZnO 압전박막의 최적 c-축 배향분극 구조를 얻기 위한 막 제조조건은 기판온도가 $300^{\circ}C$, RF 전력이 140W, 작업 분위기압은 5mtorr였으며, 플라즈마가스는 아르곤이었다. 제조된 PSFET는 적용된 압력범위($1{\times}10^{5}\;Pa{\sim}4{\times}10^{5}\;Pa$)에서 비록 감도는 낮으나 비교적 안정한 동작특성을 나타내었다.

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고온초전도 헤어핀 콤 여파기의 급전 구조에 관한 연구 (A Study on the Feeding Structure of the High-Temperature Superconducting Hairpin-comb Filter)

  • 윤석순;박익모;민병철;최영환;문승현;이승민;오병두
    • 전자공학회논문지D
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    • 제36D권12호
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    • pp.11-20
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    • 1999
  • 직접 결합과 사이 결합을 이용하여 신호를 인가하는 두 가지 경우의 마이크로스트립 헤어핀 콤 여파기를 직경 50 mm, 두께 0.5 mm인 하나의 $LaAlO_3$ 기판 위에 양면 증착한 YBCO 박막을 이용하여 설계 제작하였다. 두 가지 헤어핀 콤 여파기 모두 중심 주파수가 1.773 GHz 이였고, 대역폭이 12 MHz 이었으며, 통과 대역에서 최소 삽입 손실이 0.5 dB 이었고, 저지 대역에서는 매우 강한 반사 손실 특성을 지니고 있었다. 직접 결합 헤어핀 콤 여파기는 통과 대역 아래쪽과 위쪽에 감쇠 폴이 생겼으나, 사이 결합 헤어핀 콤 여파기는 통과 대역 아래쪽에서만 감쇠 폴이 존재하였다. 따라서 직접 결합 헤어핀 콤 여파기가 사이 결합 헤어핀 콤 여파기에 비해서 더 좋은 스커트 특성을 보여주었다.

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나노 Indium을 부착한 ZnO:In 가스센서의 제작 및 특성 (Characteristics and Preparation of Gas Sensor Using Nano Indium Coated ZnO:In)

  • 정종훈;유윤식;유일
    • 한국재료학회지
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    • 제21권9호
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    • pp.486-490
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    • 2011
  • Nano-indium-coated ZnO:In thick films were prepared by a hydrothermal method. ZnO:In gas sensors were fabricated by a screen printing method on alumina substrates. The gas sensing properties of the gas sensors were investigated for hydrocarbon gas. The effects of the indium concentration of the ZnO:In gas sensors on the structural and morphological properties were investigated by X-ray diffraction and scanning electron microscopy. XRD patterns revealed that the ZnO:In with wurtzite structure was grown with (1 0 0), (0 0 2), and (1 0 1) peaks. The quantity of In coating on the ZnO surface increased with increasing In concentration. The sensitivity of the ZnO:In sensors was measured for 5 ppm $CH_4$ gas and $CH_3CH_2CH_3$ gas at room temperature by comparing the resistance in air with that in target gases. The highest sensitivity to $CH_4$ gas and $CH_3CH_2CH_3$ gas of the ZnO:In sensors was observed at the In 6 wt%. The response and recovery times of the 6 wt% indiumcoated ZnO:In gas sensors were 19 s and 12 s, respectively.

열처리와 In 중간층 적용에 의한 CBD-In2S3/CIGS 태양전지의 특성 향상 (Annealing and In Interlayer Effects on the Photovoltaic Properties of CBD-In2S3/CIGS Solar Cells)

  • 김희섭;김지혜;신동협;안병태
    • 한국재료학회지
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    • 제21권8호
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    • pp.432-438
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    • 2011
  • In this study, chemical bath deposited (CBD) indium sulfide buffer layers were investigated as a possible substitution for the cadmium sulfide buffer layer in CIGS thin film solar cells. The performance of the $In_2S_3$/CIGS solar cell dramatically improved when the films were annealed at $300^{\circ}C$ in inert gas after the buffer layer was grown on the CIGS film. The thickness of the indium sulfide buffer layer was 80 nm, but decreased to 60 nm after annealing. From the X-ray photoelectron spectroscopy it was found that the chemical composition of the layer changed to indium oxide and indium sulfide from the as-deposited indium hydroxide and sulfate states. Furthermore, the overall atomic concentration of the oxygen in the buffer layer decreased because deoxidation occurred during annealing. In addition, an In-thin layer was inserted between the indium sulfide buffer and CIGS in order to modify the $In_2S_3$/CIGS interface. The $In_2S_3$/CIGS solar cell with the In interlayer showed improved photovoltaic properties in the $J_{sc}$ and FF values. Furthermore, the $In_2S_3$/CIGS solar cells showed higher quantum efficiency in the short wavelength region. However, the quantum efficiency in the long wavelength region was still poor due to the thick buffer layer.

Bone-like Apatite Morphology on Si-Zn-Mn-hydroxyapatite Coating on Ti-6Al-4V Alloy by Plasma Electrolytic Oxidation

  • Park, Min-Gyu;Choe, Han-Cheol
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2017년도 춘계학술대회 논문집
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    • pp.158-158
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    • 2017
  • Titanium and its alloys have been used in the field dental and orthopedic implants because of their excellent mechanical properties and biocompatibility. Despite these attractive properties, their passive films were somewhat bioinert in nature so that sufficient adhesion of bone cells to implant surface was delayed after surgical treatment. Recently, plasma electrolyte oxidation (PEO) of titanium metal has attracted a great deal of attention is a comparatively convenient and effective technique and good adhesion to substrates and it enhances wear and corrosion resistances and produces thick, hard, and strong oxide coatings. Silicon(Si), Zinc(Zn), and Manganese(Mn) have a beneficial effect on bone. Si in particular has been found to be essential for normal bone and cartilage growth and development. And, Zn has been shown to be responsible for variations in body weight, bone length and bone biomechanical properties. Also, Mn influences regulation of bone remodeling because its low content in body is connected with the rise of the concentration of calcium, phosphates and phosphatase out of cells. The objective of this work was research on bone-like apatite morphology on Si-Zn-Mn-hydroxyapatite coating on Ti-6Al-4V alloy by plasma electrolytic oxidation. Anodized alloys were prepared at 280V voltage in the solution containing Si, Zn, and Mn ions. The surface characteristics of PEO treated Ti-6Al-4V alloy were investigated using XRD, FE-SEM, and EDS.

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