• 제목/요약/키워드: thermal vacuum evaporation

검색결과 168건 처리시간 0.028초

정공 주입 물질 두께 변화에 따른 유기 발광 다이오우드 효율 향상 (Efficiency Improvement of the Organic Light-Emitting Diodes depending on Thickness Variation of Hole-Infection Materials)

  • 김원종;이영환;차기호;이상교;김태완;홍진웅
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2006년도 제37회 하계학술대회 논문집 C
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    • pp.1291-1292
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    • 2006
  • In the structure of ITO/HIL/$Alq_3$/Al device, we investigated an efficiency improvement of the Organic Light-Emitting Diodes depending on thickness variation of hole-injection layer. Using the thermal evaporation in a base vacuum $5{\times}10^{-5}$[Torr], we have measured efficiency after the $Alq_3$ was evaporated to 100 [nm] as a deposition rate $1.5[{\AA}/s]$. In optimal condition, when PTFE thickness increased from 0 to 3.0 [nm], we have obtained that an optimal thickness of PTFE was 2.5 [nm]. And using the PTFE, luminance efficiency and external quantum efficiency of the device were improved by 12.8 times and 11.1 times, respectively.

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디지털 X선 영상센서 적용을 위한 진공증착 CsI 특성평가 (The X-ray Detection Characteristic of vacuum evaporated CsI for Digital X-ray Image Sensor)

  • 신정욱;박지군;최장용;석대우;김재형;남상희
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 춘계학술대회 논문집 센서 박막재료 반도체 세라믹
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    • pp.15-18
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    • 2003
  • In recent years, there has been keen interest in phosphor materials responding X-ray. Cesium iodide of the materials is a material with a high $\gamma$-ray stopping power due to its relative high density and atomic number. CsI is noted for its high resistance to thermal and mechanical shock due to the absence of a cleavage plane. To design the structure of CsI detector, we analysed the structure with SEM and XRD and measured UV meter.

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은 박막이 코팅된 베어링강의 마찰거동에 미치는 마모입자의 영향에 대한 실험적 고찰 (An Experimental Study on the Effect of Wear Particles on the Sliding Behavior of Silver-Coated Bearing Steels)

  • 양승호;공호성;윤의성;김대은
    • 한국윤활학회:학술대회논문집
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    • 한국윤활학회 2000년도 제32회 추계학술대회 정기총회
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    • pp.59-66
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    • 2000
  • An experimental study on the effect of silver particles on the sliding behavior of bearing steels was performed by using a ball-on-disk tribometer. Tests were carried out in ambient air, dry and vacuum. Disks of AISI 52100 were silver-coaled by a thermal evaporation method, and the effects of silver particle transfer on friction were firstly analyzed. In order to understand further the mechanism of silver particles transfer and its effect on friction and wear, pre-compressed silver particles were artificially introduced into the friction interface and the results were compared to those of silver-coated specimens. Results showed that the introduced silver particles produced transfer layers and resulted in low friction. It also showed that this low friction is closely related to the characteristic behavior of transfer layers. Shakedown and rachetting occurred at the friction interface and affected the friction and wear.

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솔-젤법에 의한 강유전성 PFN 박막의 제조 및 특성평가 (Fabrication and Characterization of Ferroelectric PFN Thin Film by Sol-Gel Processing)

  • 류재율;김병호;임대순
    • 한국세라믹학회지
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    • 제33권6호
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    • pp.665-671
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    • 1996
  • Ferroelectric Pb(Fe1/2Nb1/2)O3 thin films were successfully fabricated on ITO/Glass substrate by sol-gel proces-sing and characterized to determine the dielectric and electric properties. Viscosity of PEN sol measured to investigate rheological properties was 3.25 cP which was proper for coating. The sol also showed Newtonian behavior. RTA(Rapid Thermal Annealing) was used for the annealing of the thin film and 1200~1700$\AA$ thick PEN thin films were fabricated by repeating the intermediate and the final annealing. After the deposition of Pt as top electrode by vacuum evaporation dielectric and electric properties were measured. Dielectric properties of FFN thin film were enhanced by increasing the perovskite phase fraction with increasing the annealing temperature. Measured dielectric constant of 1700$\AA$ PFN thin film annealed at $650^{\circ}C$ was 890 at 1kHz Capacitatnce density and dielectric loss were 47 fF/${\mu}{\textrm}{m}$2 and 0.47 respectively. As a result of measuring Curie temperature PFN thin films had Curie point with a rang of 110~12$0^{\circ}C$ and showed broad dielectric peak at that point. Leakage current of the PFN thin films were increased with increasing the annealing tempera-ture.

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VDP(Vapor Deposition Polymerization) 방법을 이용한 유기 게이트 절연막의 대한 연구 (Study on the Organic Gate Insulators Using VDP Method)

  • 표상우;심재훈;김정수;김영관
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.1
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    • pp.185-190
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    • 2003
  • In this paper, it was demonstrated that the organic thin film transistors were fabricated by the organic gate insulators with vapor deposition polymerization (VDP) processing. In order to form polyimide as a gate insulator, vapor deposition polymerization process was also introduced instead of spin-coating process, where polyimide film was co-deposited by high-vacuum thermal evaporation from 4,4'-oxydiphthalic anhydride (ODPA) and 4,4'-oxydianiline (ODA) and 2,2-bis(3,4-dicarboxyphenyl)hexafluoropropane dianhydride (6FDA) and ODA, and cured at $150^{\circ}C$ for 1hr. Electrical output characteristics in our organic thin film transistors using the staggered-inverted top-contact structure obtained to the saturated slop in the saturation region and the subthreshold non-linearity in the triode region. Field effect mobility, threshold voltage, and on-off current ratio in $0.45\;{\mu}m$ thick gate dielectric layer were about $0.17\;cm^2/Vs$, -7 V, and $10^6\;A/A$, respectively. Details on the explanation of compared to organic thin-film transistors (OTFTS) electrical characteristics of ODPA-ODA and 6FDA-ODA as gate insulators by fabricated thermal co-deposition method.

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Hybrid 형 X선 Sensor 기술을 위한 a-Se:Te 필름의 성장 (Growth of a-Se:Te thick films for Hybrid X-ray sensor technology)

  • 차병열;박지군;최장용;강상식;김재형;남상희
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 춘계학술대회 논문집 센서 박막재료 반도체 세라믹
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    • pp.79-82
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    • 2003
  • a-Se film is known as promising medical X-ray detector material but a-Se as dopanted Tellurium is not available in X-ray detectors. a-Se thick film was grown by vacuum thermal evaporator to $3{\mu}m$ thickness. The characteristics of thick films were analyzed by XRD, U-V Meter, and SEM measurements. Te composition is 0.1, 0.3, 0.5, 0.7g. This paper is fundmental data for phosphor layer's essential parameter that selenium have absorption wavelength along to various Te concentration rate.

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유기 발광 소자 디스플레이를 위한 적외선 램프 소스를 활용한 열 전사 픽셀 패터닝 (Thermal Transfer Pixel Patterning by Using an Infrared Lamp Source for Organic LED Display)

  • 배형우;장영찬;안명찬;박경태;이동구
    • 센서학회지
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    • 제29권1호
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    • pp.27-32
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    • 2020
  • This study proposes a pixel-patterning method for organic light-emitting diodes (OLEDs) based on thermal transfer. An infrared lamp was introduced as a heat source, and glass type donor element, which absorbs infrared and generates heat and then transfers the organic layer to the substrate, was designed to selectively sublimate the organic material. A 200 nm-thick layer of molybdenum (Mo) was used as the lightto-heat conversion (LTHC) layer, and a 300 nm-thick layer of patterned silicon dioxide (SiO2), featuring a low heat-transfer coefficient, was formed on top of the LTHC layer to selectively block heat transfer. To prevent the thermal oxidation and diffusion of the LTHC material, a 100 nm-thick layer of silicon nitride (SiNx) was coated on the material. The fabricated donor glass exhibited appropriate temperature-increment property until 249 ℃, which is enough to evaporate the organic materials. The alpha-step thickness profiler and X-ray reflection (XRR) analysis revealed that the thickness of the transferred film decreased with increase in film density. In the patterning test, we achieved a 100 ㎛-long line and dot pattern with a high transfer accuracy and a mean deviation of ± 4.49 ㎛. By using the thermal-transfer process, we also fabricated a red phosphorescent device to confirm that the emissive layer was transferred well without the separation of the host and the dopant owing to a difference in their evaporation temperatures. Consequently, its efficiency suffered a minor decline owing to the oxidation of the material caused by the poor vacuum pressure of the process chamber; however, it exhibited an identical color property.

비행시간형 직충돌 이온산란 분광법을 사용한 TiC(001)면에 성장된 MgO막의 구조해석 (Structure of epitaxial MgO layers on TiC(001) studied by time-of-flight impact-collision ion scattering spectroscopy)

  • 황연;소다 류타로
    • 한국진공학회지
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    • 제6권3호
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    • pp.181-186
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    • 1997
  • TiC(001) 면위에 Mg금속을 증착시킨 후 상온에서 산소를 노출시키는 방법으로 hetero-epitaxial MgO막을 성장시켰으며, 성장된 MgO epitaxial막의 구조를 비행시간형 직 충돌 이온산란분광법을 사용하여 해석하였다. MgO막은 산화 직후 무질서한 배열을 갖으나, 약 $300^{\circ}C$의 가열에 의해서 1$\times$1구조로 전환된다. TiC(001) 위에 성장된 MgO막은 다음과 같은 구조를 갖고 있음이 밝혀졌다. Mg 및 O원자는 TiC의 on-top site에 위치하고, 면내방 향의 격자상수는 TiC의 격자상수와 일치하며, MgO막의 대부분은 2층 이내의 원자층으로 구성되어 있다.

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Small Molecular Solar Cells toward Improved Efficiency and Stability

  • 김지환;김효정;정원익;김태민;이영은;김세용;김장주
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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    • pp.73-73
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    • 2011
  • We will report a few methods to improve the efficiency and stability in small molecule based organic solar cells, including the formation of bulk heterojunctions (BHJs) through alternative thermal deposition (ATD), the use of a micro-cavity structure and interface modifications. By ATD which is a simple modification of conventional thermal evaporation, the thicknesses of alternative donor and acceptor layers were precisely controlled down to 0.1 nm, which is critical to form BHJs. The formation of a BHJ in copper(II) phthalocyanine (CuPc) and fullerene (C60) systems was confirmed by AFM, GISAXS and absorption measurements. From analysis of the data, we found that the CuPc|C60 films fabricated by ATD were composed of the nanometer sized disk shaped CuPc nano grains and aggregated C60, which explains the phase separation of CuPc and C60. On the other hand, the co-deposited CuPc:C60 films did not show the existence of separated CuPc nano grains in the CuPc:C60 matrix. The OPV cells fabricated using the ATD method showed significantly enhanced power conversion efficiency compared to the co-deposited OPV cells under a same composition [1]. We will also present by numerical simulation that adoption of microcavity structure in the planar heterojunction can improve the short circuit current in single and tandem OSCs [2]. Interface modifications also allowed us to achieve high efficiency and high stability OSCs.

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유리 기판에 ZnO Buffer Layer를 적용한 ZnO Nano Structure의 성장 특성

  • 주재형;서성보;김동영;김해진;손선영;김화민
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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    • pp.350-350
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    • 2011
  • ZnO는 II-VI족 화합물 반도체로서 3.37 ev의 band gap energy와 60 mv의 exciton binding energy를 가지며 차세대 소자로 다양한 분야에서 연구되어지고 있다. ZnO 박막과는 다르게 ZnO nano structure는 효율성과 특성 향상의 이점으로 태양전지와 투명전극 소자에 많은 연구가 되고 있으며 UV 레이저, 가스센서, LED, 압전소자, Field Emitting Transistor (FET) 등 다양한 응용분야에서 연구되고 있다. 본 연구에서는 유리 기판 위에 RF Magnetron sputtering법을 이용해 ZnO buffer layer를 다양한 두께(~1,000${\AA}$)로 증착한 뒤, Zn powder (99.99%)를 지름 2inch 석영관 안에 넣어 Thermal furnace장비를 이용하여 Thermal Evaporation법으로 약 500$^{\circ}C$에서 30분 동안 촉매 없이 성장 하였다. 수직성장된 ZnO 나노 구조체의 특성을 전계방출주사전자현미경(SEM), X-선 회절패턴(XRD), UV-spectra를 이용하여 분석하였다. SEM 분석을 통하여 ZnO buffer layer위에 성장된 ZnO 나노 구조체는 직경이 약 ~50 nm, 길이가 ~2 um까지 성장을 보였으며, XRD 측정결과, ZnO 우선 성장 방향(002)을 확인하였다. 두 가지 측정을 통하여 ZnO buffer layer의 유무에 따라 성장 특성이 향상되었음을 확인하였으며, 이는 buffer layer가 seed 역할을 한 것으로 사료된다. UV-spectra 측정을 통하여 가시광 영역(400~780 nm)에서 60%대의 투과도를 보여 가시광 영역에서 투명성을 요구하는 전자 소자 및 광소자 등에 적용 가능성을 확인하였다. 이 연구를 통하여 우수한 투과도를 가지며 유리 기판위에 수직성장된 ZnO 나노구조체는 태양전지와 플렉서블 디스플레이 등 다양한 활용 분야를 제시할 수 있다.

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