• 한국초전도학회:학술대회논문집
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• 한국초전도학회 2003년도 High Temperature Superconductivity Vol.XIII
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• pp.62-62
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• 2003

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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• pp.1171-1174
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• 2008

We studied the properties of vapor flux distributions of nozzle shaped thermal evaporation sources and the factors, which can change the flux distributions such as nozzle structure. We used a simulation and experiment methods for this study. By using the results of our study, we improved the Circular Nozzle Source, which can make uniform thin films without substrate rotation, into more efficient source.

• 한국세라믹학회지
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• 제46권4호
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• pp.429-435
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• 2009

In this study, we investigated microstructure and the CO gas sensing properties of Ag-CuO-$SnO_2$ thin films prepared by co-evaporation and subsequently thermal oxidation at air atmosphere. The sensitivity of a Cu-Sn films, thermally oxidized at $600^{\circ}C$, is strongly affected by the amount of Cu. At Cu:7 wt%-Sn:93 wt%, the film exhibited a maximum sensitivity of ${\sim}2.3$ to CO gas of 1000 ppm at $300^{\circ}C$. In contrast, the sensitivity of a Sn-Ag film did not change significantly with the amount of Ag. An enhanced sensitivity of ${\sim}3.7$ was observed in the film with a composition of Ag:3 wt%-Cu:4 wt%-Sn:93 wt%, when thermally oxidized at $600^{\circ}C$. In addition, this thin film shows a response time of ${\sim}80$ sec and a recovery time of ${\sim}450$ sec to 1000 ppm CO gas. The results demonstrate that the CO sensitivity of the Ag-CuO-$SnO_2$ thin films may be closely associated with coexistence of $SnO_2$ and SnO phase, decrease in average particle size, and a porous microstructure. We also suggest that co-evaporation and followed by thermal oxidation is a very simple and effective method to prepare oxide gas sensor thin films.

• 한국결정성장학회지
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• 제18권2호
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• pp.81-86
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• 2008

열증착법(thermal evaporation method)에 의해 ZnO 나노선을 합성하였다. 나노선 합성조건에 따른 구조적 특성을 분석하여 그 합성 메카니즘을 확인하였다. ZnO 나노선 합성 시 기화 온도가 고온일수록 성장속도가 빠르고 $CO/CO_2$ 분압이 역전되는 1000$^{\circ}C$ 이상에서는 그 형태가 크게 변화하고, 성장온도 700$^{\circ}C$ 이상에서 Au 촉매가 그 기능을 하고 있음을 확인하였다. 성장된 ZnO 나노선은 380 nm에서의 blue emission을 나타냄을 확인하였다.

• 한국전기전자재료학회논문지
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• 제20권6호
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• pp.546-549
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• 2007

As a rule, high temperature superconducting coated conductors have multi-layered buffers consisting of seed, diffusion barrier and cap layers. Multi-buffer layer deposition requires longer fabrication time. This is one of main reasons which increases fabrication cost. Thus, single buffer layer deposition seems to be important for practical coated conductor process. In this study, a single layered buffer deposition of $CeO_2$ for low cost coated conductors has been tried using thermal evaporation technique. 100 nm-thick $CeO_2$ layers deposited by thermal evaporation were found to act as a diffusion layer. $1\;{\mu}m-thick$ SmBCO superconducting layers were deposited by thermal co-evaporation on the $CeO_2$ buffered Ni-5%W substrate. Critical current of 90 A/cm was obtained for the SmBCO coated conductors.

• 한국초전도학회:학술대회논문집
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• 한국초전도학회 2000년도 High Temperature Superconductivity Vol.X
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• pp.145-145
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• 2000

Large area YBCO - films are series produced by thermal co-evaporation using a deposition scheme known as Garching process, which allows intermittent oxygen supply in a high vacuum ambient by an oxygen cup spaced closely underneath the moving substrates. The deposition area of 9" diameter is capable to handle very large wafers up to 8" diam. or numerous smaller wafers. The large distance between substrates and boat sources and an elaborate heater design guarantee excellent film uniformity over the entire deposition area. YBCO - films deposited by this technique are commercially fabricated for a variety of applications - the most prominent are resistive fault current limiters and microwave filters for mobile or satellite communications. IMUX and OMUX - filters are currently space qualined by Robert Bosch GmbH and are expected to be launched and installed on an experimental platform of the international space station ALPHA in 2001. Both of the above applications require quite different film specifications on the one hand, but at the same time extremely high uniformity and reproducibility on the other hand, since hundreds of YBCO - films are combined to large systems or have to be approved for manned space missions. The success of such projects is direct evidence that the technique of thermal evaporation is readily capable to meet these high demands and has become the major deposition technique to support the emerging HTS market.

• 한국산학기술학회논문지
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• 제7권5호
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• pp.811-816
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• 2006

이방성 자기저항효과(anisotropic magnetoresistance : AMR)는 단층 자성박막으로 구성되므로 경제성 있게 박막화 시켜서 소형화가 가능하다. 기존의 급속응고법으로 생산된 리본형 MCo(M=Cu, Ag) 소자가 경제적으로 공업적 목적을 달성하였으나, 리본형 특유의 두께와 가공성이 부족하여 소형 소자에 함께 집적하기 곤란한 단점이 있었다. 새로운 박막형을 쓰면 추가 열처리 없이 기존의 리본형 소자와 비교하여 박막상태로 적절한 AMR 특성이 나오는지와 최적 AMR을 얻기 위한 Co의 조성을 아는 것이 중요하다. 열증착기를 써서 100nm의 $Cu_{1-x}Co_x$와 $Ag_{1-x}$ 박막을 Co의 조성을 $10{\sim}70wt%$로 달리하며 제작하여 이때의 자기적 특성을 확인하였다. CuCo는 40% Co에 0.5T에서 1.4%, AgCo는 30% Co에 2.6%의 MR비를 얻었고 이는 리본형 소자보다는 표면 산란 효과에 의해 MR비는 작지만 표면산화막 없이 직접 다른 소자공정과 함께 진행할 수 있는 장점이 있음을 확인하였다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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• pp.180-181
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• 2006

As a rule, high temperature superconducting coated conductors have multi-layered buffers consisting of seed, diffusion barrier and cap layers. Multi-buffer layer deposition requires longer fabrication time. This is one of main reasons which increases fabrication cost Thus, single buffer layer deposition seems to be important for practical coated conductor process. In this study, a single layered buffer deposition of $CeO_2$ for low cost coated conductors has been tried using thermal evaporation technique 100nm-thick $CeO_2$ layers deposited by thermal evaporation were found to act as a diffusion layer. $0.4{\mu}m$-thick SmBCO superconducting layers were deposited by thermal co-evaporation on the $CeO_2$ buffered Ni-W substrate. Critical current of 118A/$cm^2$ was obtained for the SmBCO coated conductors.

• 전자공학회논문지A
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• 제29A권8호
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• pp.89-98
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• 1992

IIM(Implantation Into Metal) process usning Co silicides has been investigated to obtain ultra-shallow junctions less than 0.1$\mu$m. Rapid Thermal Annealing using halogen lamps was employed to form CoSi$_2$ and junctions simultaneously.. Resistivities of CoSi$_2$ were 13-17$\mu$ $\Omega$-cm. CoSi$_2$/p$^{+}$/Si and CoSi$_2$/n$^{+}$/Si junction were formed by diffusion of B and As, respectively, from Co film. It was found out that B and As were severely lost by the evaporation during high temperature annealing Therefore SiO$_2$ capping layers were introduced to prevent the evaporation of the implanted dopants from the films. Investigation of the behavior of dopants with respect to annealing time revealed that increasing the annealing time enhanced the diffusion of dopants into Si from CoSi$_2$.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2007년도 심포지엄 논문집 정보 및 제어부문
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• pp.55-57
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• 2007

$CO_2$ laser sees that is most suitable to get this effect through minimum formation damage and advantage that is root enemy of effect that happen in minimum cellular tissue depth of 0.1mm is stable living body organization or internal organs institution. Formation damage by ten can be related in formation's kind or energy density, length of evaporation time. If shorten evaporation time, surroundings cellular thermal damage 200 - because happen within 400ums laser beam in rain focus sacred ground surroundings cellular, tissue without vitiation me by evaporation Poe of very small floor as is clean steam can. Application is possible to vulva cuticle cousins by a paternal aunt quantity, uterine cancer, cuticle tumor by laser system that $CO_2$ laser gets into standard in obstetrics and gynecology application. Because effect that super pulse output is ten enemies of laser if uniformity one pulse durations are short almost is decreased, most of all pulse module special quality of pulse style $CO_2$ laser for obstetrics and gynecology mode stabilization by weight very, in this research to get into short pulse duration and higher frequency density, do switching by high frequency in DC-DC Converter output DC's ripple high frequency to be changed, high frequency done current ripple amount of condenser for output filter greatly reduce can. Ripple of output approximately to Zero realization applying possible inductor realization through a special quality experiment do.