• 제목/요약/키워드: the Rf values

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Recurrent Neural Network Modeling of Etch Tool Data: a Preliminary for Fault Inference via Bayesian Networks

  • Nawaz, Javeria;Arshad, Muhammad Zeeshan;Park, Jin-Su;Shin, Sung-Won;Hong, Sang-Jeen
    • Proceedings of the Korean Vacuum Society Conference
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.239-240
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    • 2012
  • With advancements in semiconductor device technologies, manufacturing processes are getting more complex and it became more difficult to maintain tighter process control. As the number of processing step increased for fabricating complex chip structure, potential fault inducing factors are prevail and their allowable margins are continuously reduced. Therefore, one of the key to success in semiconductor manufacturing is highly accurate and fast fault detection and classification at each stage to reduce any undesired variation and identify the cause of the fault. Sensors in the equipment are used to monitor the state of the process. The idea is that whenever there is a fault in the process, it appears as some variation in the output from any of the sensors monitoring the process. These sensors may refer to information about pressure, RF power or gas flow and etc. in the equipment. By relating the data from these sensors to the process condition, any abnormality in the process can be identified, but it still holds some degree of certainty. Our hypothesis in this research is to capture the features of equipment condition data from healthy process library. We can use the health data as a reference for upcoming processes and this is made possible by mathematically modeling of the acquired data. In this work we demonstrate the use of recurrent neural network (RNN) has been used. RNN is a dynamic neural network that makes the output as a function of previous inputs. In our case we have etch equipment tool set data, consisting of 22 parameters and 9 runs. This data was first synchronized using the Dynamic Time Warping (DTW) algorithm. The synchronized data from the sensors in the form of time series is then provided to RNN which trains and restructures itself according to the input and then predicts a value, one step ahead in time, which depends on the past values of data. Eight runs of process data were used to train the network, while in order to check the performance of the network, one run was used as a test input. Next, a mean squared error based probability generating function was used to assign probability of fault in each parameter by comparing the predicted and actual values of the data. In the future we will make use of the Bayesian Networks to classify the detected faults. Bayesian Networks use directed acyclic graphs that relate different parameters through their conditional dependencies in order to find inference among them. The relationships between parameters from the data will be used to generate the structure of Bayesian Network and then posterior probability of different faults will be calculated using inference algorithms.

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Comparison of Isometric Knee Extension Torque-Angle Relationship between Taekwondo Athletes and Normal Adults (태권도 선수와 일반인의 등척성 무릎신전 토크-각도 관계 특성 비교 분석)

  • Jo, Gye-Hun;Oh, Jeong-Hoon;Lee, Hae-Dong
    • Korean Journal of Applied Biomechanics
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    • 제25권3호
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    • pp.275-281
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    • 2015
  • Objective : In order for Taekwondo athletes to perform destructive kicking performance, they are expected to have Taekwondo-specific muscle properties such as high muscle strength and power. The purpose of this study was to investigate the joint angle-dependent force-producing property of Taekwondo athletes' knee extensor muscles, which is one of the primary muscle groups involved in kicking performance. Method : Ten Taekwondo male athletes (age: $19.9{\pm}0.7yrs$, height: $180.6{\pm}6.2cm$, body mass: $75.9{\pm}8.9kg$, career: $9.2{\pm}2.9yrs$.) and 10 healthy male non-athletes (age: $26.3{\pm}2.6yrs$, height: $174.2{\pm}4.8cm$, body mass: $72.8{\pm}7.7kg$) participated in this study. Subjects performed maximum isometric knee extension at knee joint angles of $40^{\circ}$, $60^{\circ}$, $80^{\circ}$, and $100^{\circ}$ (the full knee extension was set to $0^{\circ}$) with the hip joint angles of $0^{\circ}$ and $80^{\circ}$ (the full extension was set to $0^{\circ}$). During the contractions, knee extension torque using an isokinetic dynamometer simultaneously with muscle activities of the rectus femoris (RF), and the vastus lateralis (VL) and vastus medialis (VM) using surface electromyography were recorded. Based on the torque values at systematically different knee-hip joint angles, the joint torque-angle relationships were established and then the optimal joint angle for the knee extensor was estimated. Results : The results of this study showed that the isometric knee extension torque values were greater for the Taekwondo athletes compared with the non-athlete group at all hip-knee joint angle combinations (p<.05). When the hip joint was set at $80^{\circ}$, the peak isometric torque was greater for the Taekwondo athletes compared with the non-athlete group ($313.61{\pm}36.79Nm$ and $221.43{\pm}35.92Nm$, respectively; p<.05) but the estimated optimum knee joint angles were similar ($62.33{\pm}5.71^{\circ}$ and $62.30{\pm}4.67^{\circ}$ for the Taekwondo athletes and non-athlete group, respectively). When the hip joint was set at $0^{\circ}$, the peak isometric torque was greater for the Taekwondo athletes compared with the non-athlete group ($296.29{\pm}45.13Nm$ and $199.58{\pm}25.23Nm$, respectively; p<.05) and the estimated optimum knee joint angle was larger for the Taekwondo athletes compared with the non-athlete group ($78.47{\pm}5.14^{\circ}$ and $67.54{\pm}5.77^{\circ}$, respectively; p<.05). Conclusion : The results of this study suggests that, compared with non-athletes, Taekwondo athletes have stronger knee extensor strength at all hip-knee joint angle combinations as well as longer optimum muscle length, which might be optimized for the event-specific required performance through prolonged training period.

A Novel Method for Rejection of the Spurious Signal in Weaver-Type Up-Conversion Mixer (위버구조 상향변환 혼합기의 스퓨리어스 신호 제거 방법)

  • 김영완;송윤정;김유신;이창석
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • 제15권7호
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    • pp.661-668
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    • 2004
  • A novel method to reject the spurious signals which are occurred at Weaver-type low-IF transmitter was proposed in this paper. The spurious signals are generated by the gain and phase imbalances of I/Q channel or imperfect characteristics of 90$^{\circ}$ phase shifter in local oscillator for I/Q channel source. By deriving the gain and phase-based functions from RF spurious signal with the channel imbalance information, the lie channel imbalances were deduced as functions with magnitude and sign dependent on I/Q channel imbalance degree. The proposed method compensates the estimated I/Q channel imbalances by correlation values between the down-converted signal obtained by squaring the output signal itself using a simple mixer and the modified baseband signal. By comparing two signals after A/D conversion, the magnitude and sign of each type of imbalances can be determined separately and simultaneously. Based on the I/Q channel imbalance compensation, the spurious signals can be reduced by adjusting the gain and phase values of I or Q channel signal. The way to estimate the channel imbalances of the up-conversion mixer was presented and verified by using theoretical derivations and computer simulations.

Antimicrobial Activity and Antioxidative Activity in the Extractives of Quercus dentata Thunberg (떡갈나무 추출물의 항균활성 및 항산화활성)

  • Kim, Min-Young;Kim, Yun-Geun;Kim, Tae-Hong;Jo, Jong-Soo;Yang, Jae-Kyung
    • Journal of the Korean Wood Science and Technology
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    • 제28권3호
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    • pp.42-51
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    • 2000
  • Antimicrobial activity and antioxidative activity of the organosoluble extractives from the leaves, bark and xylem of Quercus dentata were investigated. Antimicrobial activity was tested by paper disk method and bioautography methods, The most pronounced antimicrobial activities of leaves parts were ethyl acetate solubles fraction against the Klebsiella pneumoniae by the paper disk method. The strongest activities of bark parts were ethyl acetate solubles fraction against Bacillus subtilis, Klebsiella pneumoniae. Ethanol extractives from xylem parts showed high activities against Bacillus subtilis, Staphylococcus aureus, Klebsiella pneumoniae and Vibrio parahaemolyticus. These antimicrobial activities of ethanol extractives from Quercus dentata were in order to xylem > bark > leaves. The strong inhibition zones of the ethanol extractives and its fractions of xylem showed Rf values in 0.41~0.63. In leaves extractives, the petroleum ether solubles showed lower antioxidative activity and ethyl acetate insolubles showed higher antioxidative activity of 70% compared with the $EC_{50}$ values of the control. Antioxidative activity of bark and xylem extractives showed higher approximately 2 times than the control except the petroleum ether solubles.

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A Study on Standardization of Shinbaro Pharmacopuncture Using Herbal Medicines Identification Test and HPLC-DAD (신바로 약침의 한약재 확인시험 및 HPLC-DAD를 통한 표준화 연구)

  • Lee, Jin Ho;Kim, Min Jeong;Lee, Jae Woong;Kim, Me Riong;Lee, In Hee;Kim, Eun Jee
    • Journal of Acupuncture Research
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    • 제32권2호
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    • pp.1-9
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    • 2015
  • Objectives : The present study was an evaluation and standardization of herbal components in order to establish the efficacy and safety of Shinbaro pharmacopuncture. Methods : Among the raw materials of Shinbaro pharmacopuncture, the components Cibotii Rhizoma, Eucommiae Cortex, and Ledebouriellae Radix were assessed through ingredient verification experiments using thin-layer chromatography(TLC) and ultraviolet rays(UV) lamps. In addition, we standardized Acanthopanacis Cortex and Achyranthis Radix through validation using high performance liquid chromatograph-diode array detector(HPLC-DAD). Results : As result appeared a blue-white fluorescence under ultraviolet rays; changed to dark green after adding 1 % ferric chloride solution(due to Cibotii Rhizoma), and presented a yellow-green fluorescence when mixed with an ethyl ether under UV lamps by way of the ethyl ether layer, confirming Eucommiae Cortex. Ledebouriellae Radix was confirmed as dark brown spots at Rf values of 0.56 and 0.71 using TLC. Additionally, Acanthopanacis Cortex and Achyranthis Radix HPLC test results showed that linearity was $R^2{\geq}0.99$, and detection limit and quantitation limit were 0.23 to $1.29{\mu}g/mL$, and 0.71 to $3.90{\mu}g/mL$, respectively. Furthermore, precision and accuracy were confirmed to have relative standard deviation(RSD) values of 0.10 to 1.89 % and 96.19 to 103.72 %, respectively. Shinbaro pharmacopuncture did not have any overlapping or interference from other peaks in detection under the abovementioned analysis conditions. Conclusions : In conclusion, we confirmed that maintenance of Shinbaro pharmacopuncture validity was possible by means of quality control of Cibotii Rhizoma, Eucommiae Cortex, and Ledebouriellae Radix through ingredient identification and Acanthopanacis Cortex and Achyranthis Radix through high performance liquid chromatograph(HPLC) analysis. Further, we hope to contribute to the development strategy of herbal industry acupuncture.

SURFACE CHANCE OF EXTERNAL HEXAGON OF IMPLANT FIXTURE AND INTERNAL HEXAGON OF ABUTMENT AFTER REPEATED DELIVERY AND REMOVAL OF ABUTMENT (지대주의 반복적인 착탈에 따른 임플랜트 고정체의 external hexagon과 지대주 internal hexagon의 변화에 관한 연구)

  • Jung Seok-Won;Kim Hee-Jung;Chung Chae-Heon
    • The Journal of Korean Academy of Prosthodontics
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    • 제43권4호
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    • pp.528-543
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    • 2005
  • Statement of problem: Repeated delivery and removal of abutment cause some changes such as wear, scratch or defect of hexagonal structure. It may increase the value of rotational freedom(RF) between hexagonal structures. Purpose: The purpose of this study was to evaluate surface changes and rotational freedom between the external hexagon of the implant fixture and internal hexagon of abutment after repeated delivery and removal under SEM and toolmaker's microscope. Materials and methods: Implant systems used for this study were 3i and Avana. Seven pail's of implant fixture, abutment and abutment screws for each system were selected and all fixtures were perpendicularly mounted in liquid unsaturated polyesther with dental surveyor. Each one was embedded beneath the platform of fixture. Surfaces of hexagonal structure before repeated closing and opening of abutment were observed using SEM and rotational freedom was measured by using toolmaker's microscope. Each abutment was secured to the implant future by each abutment screw with recommended torque value using a digital torque controller and was repeatedly delivered and removed by 20 times respectively. After experiment, evaluation for the change of hexagonal structures and measurement of rotational freedom were performed. Result : The results were as follows; 1. Wear of contact area between implant fixture and abutment was considerable in both 3i and Avana system. Scratches and defects were frequently observed at the line-angle of hexagonal structures of implant fixture and abutment. 2. In the SEM view of the external hexagon of implant fixture, the point-angle areas at the corner edge of hexagon were severely worn out in both systems. It was more notable in the case of 3i systems than in that of Avana systems. 3. In the SEM view of the internal hexagon of abutment, Gingi-Hue abutment of 3i systems showed severe wear in micro-stop contacts that were machined into the corners to prevent rotation and cemented abutment of Avana systems showed wear in both surface area adjacent to the corner mating with external hexagon of implant fixture. 4 The mean values of rotational freedom between the external hexagon of the implant fixture and internal hexagon of abutment were 0.48$\pm$0.04$^{\circ}$ in pre-tested 3i systems and 1.18$\pm$0.25$^{\circ}$ after test, and 1.80$\pm$0.04$^{\circ}$ in pre-tested Avana systems and 2.61$\pm$0.16$^{\circ}$ after test. 5. Changes of rotational freedom after test shouted statistical)y a significant increase in both 3i and Avana systems(P<0.05, paired t-test). 6. Statistically, there was no significant difference between amount of increase in the rotational freedom of 3i systems and amount of increase in that of Avana ones(P>0.05, unpaired t-test). Conclusion: Conclusively, it was considered that repeated delivery and remove of abutment by 20 times would not have influence on screw joint stability. However, it caused statistically the significant change of rotational freedom in tested systems. Therefore, it is suggested that repeated delivery and remove of abutment should be minimal as possible as it could be and be done carefully Additionally, it is suggested that the means or treatment to prevent the wear of mating components should be devised.

Quality Characteristics of Red Ginseng Cheonggukjang According to Addition Methods of Red Ginseng (홍삼첨가 방법에 따른 홍삼청국장의 품질특성)

  • Jeong, Yong-Jin;Woo, Seung-Mi;Kwon, Joong-Ho;Choi, Myung-Sook;Seong, Jong-Hwan;Lee, Jong-Won
    • Journal of the Korean Society of Food Science and Nutrition
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    • 제36권7호
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    • pp.889-895
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    • 2007
  • This study investigated the quality characteristics of red ginseng cheonggukjang development by a various of concentration of red ginseng extract and powder to enhance its acceptability and functional properties. In the cheonggukjang added with red ginseng extract, viscous substances, reducing sugars, and fibrinolytic activity showed higher values by the addition of red ginseng extract. The standard crude saponin content of products containing red ginseng was evaluated, and found to be suitable in cheonggukjang added with 4% red ginseng extract. In the cheonggukjang added with red ginseng powder, viscous substances, reducing sugars, and fibrinolytic activity showed a similar tendency to the cheonggukjang added with red ginseng extract. Amino type nitrogen and ammonia type nitrogen decreased by increasing the addition of red ginseng powder, and the crude saponin content of cheonggukjang with the addition of 14% red ginseng powder was suitable, in terms of manufacturing standards for products containing red ginseng. Dependent on the addition time of red ginseng in cheonggukjang, viscous substances, reducing sugars, fibrinolytic activity, amino type nitrogen, and ammonia type nitrogen showed no differences based on the addition time; however, for crude saponin content, the cheonggukjang with red ginseng added before fermentation showed a higher saponin content than the cheonggukjang with red ginseng added after fermentation. The ginsenosides $Rg_{1}$, Re, Rf, $Rh_{1}$, $Rg_{2}$, $Rb_{1}$, Rc, $Rb_{2}$, Rd and $Rg_{3}$ were detected, but ginsenoside content did not show significant difference according to addition time. In conclusion, the addition amount of red ginseng in cheonggukjang for optimum fermentation was concentration of 4% (w/w), which showed the best results in quality characteristics.

Quality and Functional Properties of Red Ginseng Prepared with Different Steaming Time and Drying Methods (원료삼의 증삼 및 건조 조건별 홍삼의 품질 및 기능성)

  • Kim, Kyo-Youn;Shin, Jin-Ki;Lee, Su-Won;Yoon, Sung-Ran;Chung, Hun-Sik;Jeong, Yong-Jin;Choi, Myung-Sook;Lee, Chi-Moo;Moon, Kwang-Deog;Kwon, Joong-Ho
    • Korean Journal of Food Science and Technology
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    • 제39권5호
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    • pp.494-499
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    • 2007
  • The quality and functional properties of red ginseng in relation to steaming and drying conditions were evaluated. Fresh ginseng (5-year roots), cultivated in the Punggi region, were steamed for 2.5, 3.5, or 4.5 hr, and then dried by hot-air (60-$65^{\circ}C$/24 hr and $40^{\circ}C$,/3-4d) freezing ($-80^{\circ}C$/56 hr), and infrared (900 W/$62^{\circ}C$/68 hr). Hunter#s yellowness (b-value) and browning indexes (420 nm) of the samples were higher in the rootlets than in the main roots. Furthermore, these same index values were found to be high in the order of 3.5, 4.5, and 2.5 hr and infrared, hot-air, and freezing for steaming and subsequent drying, respectively. Analysis of soluble solids, total phenolics, total flavonoids, acidic polysaccharides, and electron donating abilities of the steamed and dried samples showed that 3.5hr of steaming with infrared drying was optimal. However, crude saponin contents were not influenced by steaming and drying conditions. The contents of $ginsenoside-Rg_l$, -Re, -Rf and $-Rb_2$, which were the major components in the samples, were reduced with steaming time, while the amounts of $-Rg_3$ and $-Rh_2$ increased, reaching the highest levels at 3.5 and 4.5 hr in the main roots and rootlets, respectively. The contents of $-Rg_3$ and $-Rh_2$ were similar in both the freeze-dried and hot-air dried samples.

The Synthesis and MR Properties of New Macromolecular MR Contrast Agent (새로운 거대분자 MR 조영제의 합성 및 MR 특성에 관한 연구)

  • 장용민;장영환;황문정;박현정;전경녀;이종민;배경수;강봉석
    • Investigative Magnetic Resonance Imaging
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    • 제6권1호
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    • pp.35-40
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    • 2002
  • Purpose : To evaluate the NMR relaxation properties and imaging characteristics of tissue-specificity for a newly developed macromolecular MR agent. Materials and methods : Phthalocyanine (PC) was chelated with paramagnetic ion, Mn.2.01g (5.2 mmol) of Phthalocyanine was mixed with 0.37g (1.4 mmol) of Mn chloride at $310^{\circ}C$ for 36 hours and then purified by chromatography (CHC13/CH3OH 98/2 v/v, Rf, 0.76) to obtain 1.04g (46%) of MnPC (molecular weight= 2000d). The $T1}T2$ relaxivity of MnPC was measured in 1.5T(64 MHz) MR using 0.1 mM MnPC. The MR image characteristics of MnPC was evaluated using spin-echo (TR/TE=500/14 msec) and gradient-echo (FLASH) (TR/TE=80/4 msec, flip angle=60) techniques in 1.57 MR scanner. The images of rabbit liver were obtained every 10 minutes up to 4 hours. To study the effect of concentration on image, 20 mM, 50 mM, 100 mM of MnPC were tested. Results : The relaxivities of MnPC at 1.5T(64MHz) were Rl=7.28 $mM^{-1}S^{-1},{\;}R2=55.56mM^{-1}S^{-1}$. Compared to the values of Gd-DTPA (Rl[=4.8 $mM^{-1}S^{-1})$], R2[=5.2 $mM^{-1}S^{-1}])$]), both T1/T2 relaxivities of MnPC were higher than those of Gd-DTPA. For both of SE and FLASH techniques, the contrast enhancement reached maximum at 10 minutes after bolus injection and the enhancement continued for more than 2 hours. When compared with small molecular weight liver agents such as Gd-EOB-DTPA, Gd-BOPTA and MnDPDP, MnPC was characterized by more prolonged enhancement time. The time course of MR images also revealed biliary excretion of MnPC. Conclusion : We developed a new macromolecular MR agent, MnPC. The relaxivities of MnPC were higher than those of small molecular weight Gd-chelate. Hepatic uptake and biliary excretion of MnPC suggests that this agent is a new liver-specific MR agent.

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Fabrication and Characteristics of Zinc Oxide- and Gallium doped Zinc Oxide thin film transistor using Radio Frequency Magnetron sputtering at Room Temperature (Zinc Oxide와 갈륨이 도핑 된 Zinc Oxide를 이용하여 Radio Frequency Magnetron Sputtering 방법에 의해 상온에서 제작된 박막 트랜지스터의 특성 평가)

  • Jeon, Hoon-Ha;Verma, Ved Prakash;Noh, Kyoung-Seok;Kim, Do-Hyun;Choi, Won-Bong;Jeon, Min-Hyon
    • Journal of the Korean Vacuum Society
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    • 제16권5호
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    • pp.359-365
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    • 2007
  • In this paper we present a bottom-gate type of zinc oxide (ZnO) and Gallium (Ga) doped zinc oxide (GZO) based thin film transistors (TFTs) through applying a radio frequency (RF) magnetron sputtering method at room temperature. The gate leakage current can be reduced up to several ph by applying $SiO_2$ thermally grown instead of using new gate oxide materials. The root mean square (RMS) values of the ZnO and GZO film surface were measured as 1.07 nm and 1.65 nm, respectively. Also, the transmittances of the ZnO and GZO film were more than 80% and 75%, respectively, and they were changed as their film thickness. The ZnO and GZO film had a wurtzite structure that was arranged well as a (002) orientation. The ZnO TFT had a threshold voltage of 2.5 V, a field effect mobility of $0.027\;cm^2/(V{\cdot}s)$, a on/off ratio of $10^4$, a gate voltage swing of 17 V/decade and it operated in a enhancement mode. In case of the GZO TFT, it operated in a depletion mode with a threshold voltage of -3.4 V, a field effect mobility of $0.023\;cm^2/(V{\cdot}s)$, a on/off ratio of $2{\times}10^4$ and a gate voltage swing of 3.3 V/decade. We successfully demonstrated that the TFTs with the enhancement and depletion mode type can be fabricated by using pure ZnO and 1wt% Ga-doped ZnO.