• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.67-67
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• 2009

Due to the scaling down of the dielectrics thickness, the leakage currents arising from electron tunneling through the dielectrics has become the major technical barrier. Thus, much works has focused on the development of high k dielectrics in both cases of memories and CMOS fields. Among the high-k materials, $Al_2O_3$ considered as good candidate has been attracting much attentions, which own some good properties as high dielectric constant k value (~9), a high bandgap (~2eV) and elevated crystallization temperature, etc. Due to the easy control of ion energy and flux, low ownership and simple structure of the inductively coupled plasma (ICP), we chose it for high-density plasma in our study. And the $BCl_3$ was included in the gas due to the effective extraction of oxygen in the form of BClxOy compound. In this study, the etch characteristic of ALD deposited $Al_2O_3$ thin film was investigated in $BCl_3/N_2$ plasma. The experiment were performed by comparing etch rates and selectivity of $Al_2O_3$ over $SiO_2$ as functions of the input plasma parameters such as gas mixing ratio, DC-bias voltage and RF power and process pressure. The maximum etch rate was obtained under 15 mTorr process perssure, 700 W RF power, $BCl_3$(6 sccm)/$N_2$(14 sccm) plasma, and the highest etch selectivity was 1.9. We used the x-ray photoelectron spectroscopy (XPS) to investigate the chemical reactions on the etched surface. The Auger electron spectroscopy (AES) was used for elemental analysis of etched surface.

• Journal of the Korean Ceramic Society
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• v.43 no.2 s.285
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• pp.85-91
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• 2006

Electron Beam Physical Vapor Deposition (EB-PVD) was applied to fabricate a thin film YSZ electrolyte with large area on the porous NiO-YSZ anode substrate. Microstructural and thermal stability of the as-deposited electrolyte film was investigated via SEM and XRD analysis. In order to obtain an optimized YSZ film with high stability, both temperature and surface roughness of substrate were varied. A structurally homogeneous YSZ film with large area of $12\times12\;cm^2$ and high thermal stability up to $900^{\circ}C$ was fabricated at the substrate temperature of $T_s/T_m$ higher than 0.4. The smoother surface was proved to give the better film quality. Precise control of heating and cooling rate of the anode substrate was necessary to obtain a very dense YSZ electrolyte with high thermal stability, which affords to survive after post heat treatment for fabrication a cathode layer on it as well as after long time operation of solid oxide fuel cell at high temperature.

• Journal of Sericultural and Entomological Science
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• v.36 no.2
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• pp.147-151
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• 1994

This study was carried out investigate the characteristics of Habutae and Chiffon woven with silk and polyester(S/P) compound yarn. The S/P compound yarn could be produced by the automatic reeling machine with attachment of air jetting device, polyester yarn guider and tension control apparatus. The surface structure, tensile property and dyeing fastness of S/P compound fabric were examined for the fabric properties. Electron microscopy revealed that most part of S/P compound yarn was well interlaced and some silk part of compound yarn were hidden by polyester on an examination of surface of chiffon fabric. By the one bath and two step dyeing of disperse and acidic dyes, the colour fastness of S/P compound fabrics were 4 grade above. The tenacity and initial modulus of the finished S/P compound fabric were lower than those of grey and degummed fabrics, but reversed in elongation.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.36 no.8
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• pp.797-806
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• 2008

In a double-passage cascade apparatus, only two blades are installed in order to increase the accuracy of experimental result by applying bigger blade than the size of multi-blades on the same apparatus. However, this causes difficulties to make correct periodic condition. In this study, sidewalls are designed to meet periodic condition without removing the operating fluid or adjusting tail boards. Surface Mach number on the blade surface is applied to a responsible variable, and 12 design variables which are related with sidewall profile control are selected. A gradient-based optimization is adopted for wall design and CFX-11 is used for the internal flow computation. The computed result shows that it could obtain the same flow structure by modifying only the sidewalls of the double-passage cascade apparatus.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.26 no.5
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• pp.445-454
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• 2015

In this paper, we propose an optimal design method for a dual reflector antenna(DRA) using the Genetic algorithm. In order to reduce the computational burden during the optimal design, we exploit the iterative physical optics(IPO) to calculate the surface current distribution at each reflector antenna. To improve the accuracy, we consider the shadow effect by the structure and the coupling effect by the multi-reflection based on the iterative MFIE(Magnetic Field Integral Equation). To reduce the number of design variables and generate a smooth surface, we use the Bezier function with the control points, which become the design variables in this paper. We adopt the HPBW(Half Power Beam Width), the FNBW(First Null Beam Width), and the SLL(Side Lobe Level) as the objective or cost functions. To verify the results, we compare them with the those of the commercial tool.

• The Korean Journal of Applied Statistics
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• v.21 no.4
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• pp.705-716
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• 2008

The objectives of this study are the detection and forecast of climate change signal in the annual mean of surface temperature data, which are generated by MRI/JMA CGCM over the Korean Peninsula. MRI/JMA CGCM outputs consist of control run data(experiment with no change of $CO_2$ concentration) and scenario run data($CO_2$ 1%/year increase experiment to quadrupling) during 142 years for surface temperature and precipitation. And ECMWF reanalysis data during 43 years are used as observations. All data have the same spatial structure which consists of 42 grid points. Two statistical models, the Bayesian fingerprint method and the regression model with autoregressive error(AUTOREG model), are separately applied to detect the climate change signal. The forecasts up to 2100 are generated by the estimated AUTOREG model only for detected grid points.

• Geomechanics and Engineering
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• v.20 no.6
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• pp.485-495
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• 2020

Based on the movement characteristics of overlying strata with gangue backfilling, the compression test of gangue is designed. The deformation characterristics of gangue is obtained based on the different Talbot index. The deformation has a logarithmic growth trend, including sharp deformation stage, linear deformation stage, rheological stage, and the resistance to deformation changes in different stages. The more advantageous Talbot gradation index is obtained to control the surface subsidence. On the basis of similarity simulation test with gangue backfilling, the characteristics of roof failure and the evolution of the supporting force are analyzed. In the early stage of gangue backfilling, beam structure damage directly occurs at the roof, and the layer is separated from the overlying rock. As the working face advances, the crack arch of the basic roof is generated, and the separation layer is closed. Due to the supporting effect of filling gangue, the stress concentration in gangue backfilling stope is relatively mild. Based on the equivalent mining height model of gangue backfilling stope, the relationship between full ratio and mining height is obtained. It is necessary to ensure that the gradation of filling gangue meets the Talbot distribution of n=0.5, and the full ratio meets the protection grade requirements of surface buildings.

• Journal of the Korean institute of surface engineering
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• v.47 no.4
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• pp.198-203
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• 2014

ZnO nanorods have been deposited on ITO glass by electrodeposition method. The optimization of two process parameters (precursor concentration and current) has been studied in order to control the orientation, morphology, and optical property of the ZnO nanorods. The structural and optical properties of ZnO nanorods were systematically investigated by using field-emission scanning electron microscopy, X-ray diffractometer, and photoluminescence. Commonly, the results show that ZnO nanorods with a hexagonal form and wurtzite crystal structure have a c-axis orientation and higher intensity for the ZnO (002) diffraction peaks. Both high precursor concentration and high electrodeposition current cause the increase in nanorods diameter and coverage ratio. ZnO nanorods show a strong UV (3.28 eV) and a weak visible (1.9 ~ 2.4 eV) bands.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2017.05a
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• pp.157-157
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• 2017

Titanium and its alloys that have a good biocompatibility, corrosion resistance, and mechanical properties such as hardness and wear resistance are widely used in dental and orthopedic implant applications. They can directly connect to bone. However, they do not form a chemical bond with bone tissue. Plasma electrolytic oxidation (PEO) that combines the high voltage spark and electrochemical oxidation is a novel method to form ceramic coatings on light metals such as titanium and its alloys. This is an excellent reproducibility and economical, because the size and shape control of the nano-structure is relatively easy. Silicon (Si), manganese (Mn), and magnesium (Mg) has a useful to bone. Particularly, Si has been found to be essential for normal bone, cartilage growth and development. Manganese influences regulation of bone remodeling because its low content in body is connected with the rise of the concentration of calcium, phosphates and phosphatase out of cells. Insufficience of Mn in human body is probably contributing cause of osteoporosis. Pre-studies have shown that Mg plays very important roles in essential for normal growth and metabolism of skeletal tissue in vertebrates and can be detected as minor constituents in teeth and bone. The objective of this work was to study nucleation and growth of bone-like apatite formation on Ti-6Al-4V in solution containing Mn, Mg, and Si ions after plasma electrolytic oxidation. Anodized alloys was prepared at 270V~300V voltages. And bone-like apatite formation was carried out in SBF solution for 1, 3, 5, and 7 days. The morphologies of PEO-treated Ti-6Al-4V alloy in containing Mn, Mg, and Si ions were examined by FE-SEM, EDS, and XRD.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2017.05a
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• pp.80-80
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• 2017

Titanium and its alloys that have a good biocompatibility, corrosion resistance, and mechanical properties such as hardness and wear resistance are widely used in dental and orthopedic implant applications. However, they do not form a chemical bond with bone tissue. Plasma electrolytic oxidation (PEO) that combines the high voltage spark and electro-chemical oxidation is a novel method to form ceramic coatings on light metals such as tita-nium and its alloys. This is an excellent re-producibility and economical, because the size and shape control of the nano-structure is relatively easy. Silicon (Si), manganese (Mn), and magne-sium (Mg) have a useful to bone. Particularly, Si has been found to be essential for normal bone, cartilage growth, and development. Mn influences regulation of bone remodeling be-cause its low content in body is connected with the rise of the concentration of calcium, phosphates and phosphatase out of cells. Pre-studies have shown that Mg plays very im-portant roles in essential for normal growth and metabolism of skeletal tissue in verte-brates and can be detected as minor constitu-ents in teeth and bone. In this study, Electrochemical behavior of plasma electrolytic oxidized films formed in solution containing Mn, Mg and Si ions were researched using various experimental in-struments. A series of Si-Mn-Mg coatings are produced on Ti dental implant using PEO, with the substitution degree, respectively, at 5 and 10%. The potentiodynamic polarization and AC impedance tests for corrosion behav-iors were carried out in 0.9% NaCl solution at similar body temperature using a potentiostat with a scan rate of 1.67mV/s and potential range from -1500mV to + 2000mV. Also, AC impedance was performed at frequencies anging from 10MHz to 100kHz for corrosion resistance.